Invention Grant
- Patent Title: Charged particle source
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Application No.: US16042871Application Date: 2018-07-23
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Publication No.: US10468227B2Publication Date: 2019-11-05
- Inventor: Shuai Li
- Applicant: Hermes Microvision, Inc.
- Applicant Address: TW Hsinchu
- Assignee: HERMES MICROVISION, INC.
- Current Assignee: HERMES MICROVISION, INC.
- Current Assignee Address: TW Hsinchu
- Agency: Finnegan, Henderson Farabow, Garrett & Dunner, LLP
- Main IPC: H01J37/143
- IPC: H01J37/143 ; H01J37/28 ; H01J3/20 ; H01J37/063 ; H01J37/065 ; H01J37/14 ; H01J37/09

Abstract:
This invention provides a charged particle source, which comprises an emitter and means of generating a magnetic field distribution. The magnetic field distribution is minimum, about zero, or preferred zero at the tip of the emitter, and along the optical axis is maximum away from the tip immediately. In a preferred embodiment, the magnetic field distribution is provided by dual magnetic lens which provides an anti-symmetric magnetic field at the tip, such that magnetic field at the tip is zero.
Public/Granted literature
- US20190057833A1 Charged Particle Source Public/Granted day:2019-02-21
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