Invention Grant
- Patent Title: Charged particle beam system and method
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Application No.: US17002472Application Date: 2020-08-25
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Publication No.: US11239053B2Publication Date: 2022-02-01
- Inventor: Dirk Zeidler
- Applicant: Carl Zeiss MultiSEM GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss MultiSEM GmbH
- Current Assignee: Carl Zeiss MultiSEM GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Main IPC: H01J37/00
- IPC: H01J37/00 ; H01J37/317 ; H01J37/145 ; H01J37/147 ; H01J37/244 ; H01J37/26 ; H01J37/28
Abstract:
Charged particle beam systems and methods, such as a multi beam charged particle beam system and related methods, can compensate sample charging.
Public/Granted literature
- US20210005423A1 CHARGED PARTICLE BEAM SYSTEM AND METHOD Public/Granted day:2021-01-07
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