Invention Grant
- Patent Title: Replaceable module for a charged particle apparatus
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Application No.: US17344446Application Date: 2021-06-10
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Publication No.: US11961698B2Publication Date: 2024-04-16
- Inventor: Christiaan Otten , Peter-Paul Crans , Marc Smits , Laura Del Tin , Christan Teunissen , Yang-Shan Huang , Stijn Wilem Herman Karel Steenbrink , Xuerang Hu , Qingpo Xi , Xinan Luo , Xuedong Liu
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: EP 197510 2020.09.22
- Main IPC: H01J37/15
- IPC: H01J37/15 ; H01J37/02 ; H01J37/14 ; H01J37/147 ; H01J37/18 ; H01J37/244 ; H01J37/28 ; H01J37/20 ; H01J37/317
Abstract:
Disclosed herein is a module for supporting a device configured to manipulate charged particle paths in a charged particle apparatus, the module comprising: a support arrangement configured to support the device, wherein the device is configured to manipulate a charged particle path within the charged particle apparatus; and a support positioning system configured to move the support arrangement within the module; wherein the module is arranged to be field replaceable in the charged particle apparatus.
Public/Granted literature
- US20210391139A1 REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS Public/Granted day:2021-12-16
Information query
IPC分类:
