- Patent Title: Method for operating a multiple particle beam system while altering the numerical aperture, associated computer program product and multiple particle beam system
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Application No.: US17572767Application Date: 2022-01-11
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Publication No.: US12057290B2Publication Date: 2024-08-06
- Inventor: Hans Fritz , Ingo Mueller
- Applicant: Carl Zeiss MultiSEM GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss MultiSEM GmbH
- Current Assignee: Carl Zeiss MultiSEM GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE 2019005362.1 2019.07.31
- Main IPC: H01J37/317
- IPC: H01J37/317 ; H01J37/10 ; H01J37/145 ; H01J37/147 ; H01J37/26 ; H01J37/302

Abstract:
A method includes operating a multiple particle beam system at different working points. The numerical aperture can be set for each of the working points in such a way that the resolution of the multiple particle beam system is optimal. In the process, the beam pitch between adjacent individual particle beams on the sample to be scanned is kept constant as a boundary condition. There are no mechanical reconfigurations of the system whatsoever for the purposes of varying the numerical aperture.
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