Invention Grant
- Patent Title: Source for selectively providing positively or negatively charged particles for a focusing column
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Application No.: US15052650Application Date: 2016-02-24
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Publication No.: US09601312B2Publication Date: 2017-03-21
- Inventor: Brian Roberts Routh, Jr.
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI COMPANY
- Current Assignee: FEI COMPANY
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, P.C.
- Agent Michael O. Scheinberg
- Main IPC: H01J37/30
- IPC: H01J37/30 ; H01J37/305 ; H01J37/147 ; H01J37/10 ; H01J37/077 ; H01J37/08 ; H01J37/285 ; H01J27/16 ; H01J37/05 ; H01J37/304 ; G01T1/28 ; H01J37/26
Abstract:
A single column charged particle source with user selectable configurations operates in ion-mode for FIB operations or electron mode for SEM operations. Equipped with an x-ray detector, energy dispersive x-ray spectroscopy analysis is possible. A user can selectively configure the source to prepare a sample in the ion-mode or FIB mode then essentially flip a switch selecting electron-mode or SEM mode and analyze the sample using EDS or other types of analysis.
Public/Granted literature
- US20160172156A1 SOURCE FOR SELECTIVELY PROVIDING POSITIVELY OR NEGATIVELY CHARGED PARTICLES FOR A FOCUSING COLUMN Public/Granted day:2016-06-16
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