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公开(公告)号：KR101966582B1
公开(公告)日：2019-04-05
申请号：KR1020180013584
申请日：2018-02-02
Applicant: 성균관대학교산학협력단
IPC: H01L21/02 , H01L21/3065 , H01L21/28
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