公开(公告)号：EP1340985A1

公开(公告)日：2003-09-03

申请号：EP03075312.3

申请日：2003-02-03

Applicant: Delphi Technologies, Inc.

Inventor： Zarabadi, Seyed R. ,  Jay, Ian D. ,  Johnson, Jack D. ,  Christenson, John C. ,  Noll, Tracy A.

IPC: G01P15/125 ,  G01P15/08

CPC classification number: G01P15/125 ,  G01C19/5712 ,  G01P15/0888

Abstract: A balanced angular accelerometer (10;110) is provided having a substrate (60), a fixed electrode (20A) with a plurality of fixed capacitive plates (24), and a rotational inertia mass (12) with a central opening (13) and substantially suspended over a cavity (34) and including a plurality of movable capacitive plates (14) arranged to provide a capacitive coupling with the first plurality of fixed capacitive plates (24). The accelerometer (10) has a central member (15) and an outer member (18) fixed to the substrate (60). According to one embodiment, a plurality of inner support arms (16A-16D) extend between the central member (15) and the inertia mass (12) and a plurality of outer support arms (40A-40D) extend between the inertia mass (12) and the outer member (18) to support the mass (12) over the cavity (34).

Abstract translation: 提供一种平衡角加速度计（10; 110），具有基片（60），具有多个固定电容板（24）的固定电极（20A）和具有中心孔（13）的旋转惯性质量块（12） 并且基本上悬挂在空腔（34）上并且包括多个可移动电容板（14），其布置成提供与第一多个固定电容板（24）的电容耦合。 加速度计（10）具有中心构件（15）和固定到基底（60）的外部构件（18）。 根据一个实施例，多个内支撑臂（16A-16D）在中心构件（15）和惯性块（12）之间延伸，并且多个外支撑臂（40A-40D）在惯性块 ）和外部构件（18）以将质量块（12）支撑在空腔（34）上方。

公开(公告)号：EP1659383A3

公开(公告)日：2012-01-25

申请号：EP05077587.3

申请日：2005-11-11

Applicant: Delphi Technologies, Inc.

Inventor： Johnson, Jack D. ,  Zarabadi, Seyed R. ,  Jay, Ian D.

IPC: G01L1/14

CPC classification number: G01L1/142 ,  G01L1/144

Abstract: A strain gauge (10) for sensing strain is provided and includes a support substrate (40), and first and second electrodes (20A and 12) supported on the substrate (40). The first and second electrodes (20A and 12) include first and second capacitive plates (24 and 14), respectively. The first capacitive plates (24) are movable relative to the second capacitive plates (14) responsive to strain. The strain gauge (10) further has an input (26) electrically coupled to one of the first and second electrodes (20A and 12) for receiving an input signal (CLK), and an output (30) electrically coupled to the other of the first and second electrodes (20A and 12) for providing an output signal (V oi ) which varies as a function of the capacitive coupling and is indicative of sensed strain.

公开(公告)号：EP1722408A1

公开(公告)日：2006-11-15

申请号：EP06075882.8

申请日：2006-04-13

Applicant: Delphi Technologies, Inc.

Inventor： Chavan, Abhijeet V. ,  Mars, Jeffrey A. ,  Jay, Ian D. ,  Wyant, Johnna L. ,  Ihms, David W. ,  Isenberg, John K. ,  Worl, Roger E.

IPC: H01L21/56 ,  H01L21/60 ,  G01L9/00

CPC classification number: H01L24/81 ,  G01L9/0073 ,  H01L21/563 ,  H01L24/28 ,  H01L2224/05001 ,  H01L2224/05023 ,  H01L2224/05568 ,  H01L2224/1132 ,  H01L2224/16 ,  H01L2224/73203 ,  H01L2224/81801 ,  H01L2224/83102 ,  H01L2224/92125 ,  H01L2924/00014 ,  H01L2924/01033 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/0105 ,  H01L2924/01051 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/14 ,  H01L2924/15787 ,  H01L2924/30105 ,  H01L2924/3011 ,  H01L2924/351 ,  H01L2924/00 ,  H01L2224/05599

Abstract: A method of flip-chip mounting a circuit device (12) to a substrate (10) in a manner that avoids damage and impairment of a fragile or otherwise sensitive element (30) on the device (12) facing the substrate (10), and a circuit assembly (60) produced thereby. The assembly (60) includes a substrate (10) having at least two sets of bonding sites (16) spaced apart from each other to define an intermediate surface region (18) therebetween. The device (12) is attached to the bonding sites (16) with solder connections (56,58), with the solder connections (56,58) being present on a surface of the device (12) that faces the substrate (10) and on which the element (30) is present so that the element (30) overlies the intermediate surface region (18) of the substrate (10). An underfill material (62) is present between the device (12) and the substrate (10) and encapsulates the solder connections (56,58). The underfill material (62) is separated from the intermediate surface region (18) of the substrate (10) so that the underfill material (62) does not contact the element (30).

Abstract translation: 一种以避免在面向衬底（10）的器件（12）上的脆弱或其他敏感元件（30）的损坏和损坏的方式将电路器件（12）倒装安装到衬底（10）的方法， 和由此产生的电路组件（60）。 组件（60）包括具有彼此间隔开的至少两组结合位置（16）的衬底（10），以在它们之间限定中间表面区域（18）。 设备（12）通过焊接连接（56,58）附接到焊接点（16），焊料连接（56,58）存在于与衬底（10）相对的器件（12）的表面上， 并且其上存在元件（30），使得元件（30）覆盖在基板（10）的中间表面区域（18）上。 在装置（12）和衬底（10）之间存在底部填充材料（62）并封装焊料连接（56,58）。 底部填充材料（62）与衬底（10）的中间表面区域（18）分离，使得底部填充材料（62）不与元件（30）接触。

公开(公告)号：EP1340984B1

公开(公告)日：2009-06-17

申请号：EP03075310.7

申请日：2003-02-03

Applicant: Delphi Technologies, Inc.

Inventor： Zarabadi, Seyed R. ,  Jay, Ian D. ,  Johnson, Jack D. ,  Christenson, John C. ,  Noll, Tracy A.

IPC: G01P15/08 ,  G01P15/125

CPC classification number: G01P15/0888 ,  G01P15/125

公开(公告)号：EP1659383A2

公开(公告)日：2006-05-24

申请号：EP05077587.3

申请日：2005-11-11

Applicant: Delphi Technologies, Inc.

Inventor： Johnson, Jack D. ,  Zarabadi, Seyed R. ,  Jay, Ian D.

IPC: G01L1/14

CPC classification number: G01L1/142 ,  G01L1/144

Abstract: A strain gauge (10) for sensing strain is provided and includes a support substrate (40), and first and second electrodes (20A and 12) supported on the substrate (40). The first and second electrodes (20A and 12) include first and second capacitive plates (24 and 14), respectively. The first capacitive plates (24) are movable relative to the second capacitive plates (14) responsive to strain. The strain gauge (10) further has an input (26) electrically coupled to one of the first and second electrodes (20A and 12) for receiving an input signal (CLK), and an output (30) electrically coupled to the other of the first and second electrodes (20A and 12) for providing an output signal (V oi ) which varies as a function of the capacitive coupling and is indicative of sensed strain.

Abstract translation: 提供了用于感测应变的应变仪（10），并包括支撑衬底（40）以及支撑在衬底（40）上的第一和第二电极（20A和12）。 第一和第二电极（20A和12）分别包括第一和第二电容板（24和14）。 响应于应变，第一电容板（24）可相对于第二电容板（14）移动。 应变仪（10）还具有电耦合到第一和第二电极（20A和12）中的一个用于接收输入信号（CLK）的输入端（26），以及输出端（30），电连接到另一个 第一和第二电极（20A和12），用于提供作为电容耦合的函数而变化的输出信号（V oi），并且指示感测的应变。

公开(公告)号：EP1340984A3

公开(公告)日：2005-12-28

申请号：EP03075310.7

申请日：2003-02-03

Applicant: Delphi Technologies, Inc.

Inventor： Zarabadi, Seyed R. ,  Jay, Ian D. ,  Johnson, Jack D. ,  Christenson, John C. ,  Noll, Tracy A.

IPC: G01P15/08 ,  G01P15/125

CPC classification number: G01P15/0888 ,  G01P15/125

Abstract: A balanced angular accelerometer (10 or 110) is provided having a substrate (60), a fixed electrode (20A) with a plurality of fixed capacitive plates (24), and a rotational inertia mass (12) with a central opening (13) and substantially suspended over a cavity (34) and including a plurality of movable capacitive plates (14) arranged to provide a capacitive coupling with the first plurality of fixed capacitive plates (24). The accelerometer (10) has a central member (15) and an outer member (18) fixed to the substrate (60). According to one embodiment, a plurality of inner support arms (16A-16D) extend between the central member (15) and the inertia mass (12) and a plurality of outer support arms (40A-40D) extend between the inertia mass (12) and the outer member (18) to support the mass (12) over the cavity (34). According to another embodiment, one or more cut out apertures (150) are formed in the inertia mass (112) to compensate for a channel (141) and signal line (140) so as to balance the inertia mass (112) about the center of the inertia mass (112).

公开(公告)号：EP1340984A2

公开(公告)日：2003-09-03

申请号：EP03075310.7

申请日：2003-02-03

Applicant: Delphi Technologies, Inc.

Inventor： Zarabadi, Seyed R. ,  Jay, Ian D. ,  Johnson, Jack D. ,  Christenson, John C. ,  Noll, Tracy A.

IPC: G01P15/08 ,  G01P15/125

CPC classification number: G01P15/0888 ,  G01P15/125

Abstract: A balanced angular accelerometer (10 or 110) is provided having a substrate (60), a fixed electrode (20A) with a plurality of fixed capacitive plates (24), and a rotational inertia mass (12) with a central opening (13) and substantially suspended over a cavity (34) and including a plurality of movable capacitive plates (14) arranged to provide a capacitive coupling with the first plurality of fixed capacitive plates (24). The accelerometer (10) has a central member (15) and an outer member (18) fixed to the substrate (60). According to one embodiment, a plurality of inner support arms (16A-16D) extend between the central member (15) and the inertia mass (12) and a plurality of outer support arms (40A-40D) extend between the inertia mass (12) and the outer member (18) to support the mass (12) over the cavity (34). According to another embodiment, one or more cut out apertures (150) are formed in the inertia mass (112) to compensate for a channel (141) and signal line (140) so as to balance the inertia mass (112) about the center of the inertia mass (112).

Abstract translation: 提供了具有基板（60），具有多个固定电容板（24）的固定电极（20A）和具有中心开口（13）的旋转惯性质量块（12）的平衡角加速度计（10或110） 并且基本上悬挂在空腔（34）上并且包括多个可移动电容板（14），其布置成提供与第一多个固定电容板（24）的电容耦合。 加速度计（10）具有中心构件（15）和固定到基底（60）的外部构件（18）。 根据一个实施例，多个内支撑臂（16A-16D）在中心构件（15）和惯性块（12）之间延伸，并且多个外支撑臂（40A-40D）在惯性块 ）和外部构件（18）以将质量块（12）支撑在空腔（34）上方。 根据另一实施例，一个或多个切口孔（150）形成在惯性质量块（112）中以补偿通道（141）和信号线（140），以平衡围绕中心的惯性质量（112） 的惯性质量（112）。