2.
    发明专利
    未知

    公开(公告)号:FR2333349A1

    公开(公告)日:1977-06-24

    申请号:FR7629973

    申请日:1976-09-30

    Applicant: IBM

    Abstract: A semiconductor device, such as a transistor, integrated circuit or the like, having a pattern of oxidized and densified porous silicon regions extending onto one of its major surfaces for isolating regions of the semiconductor is manufacturable by a relatively simple process. The process involves forming porous silicon regions in the surface of the semiconductor body such as a silicon wafer, in the areas where dielectric isolation between semiconductor devices is desired. The porous silicon regions are then oxidized at a temperature sufficient to completely oxidize the porous silicon. The oxidiation is such that the oxidized porous silicon extends above the surface of the semiconductor wafer. The oxidized porous silicon regions are then subjected to a temperature higher than the oxidizing temperature utilized in the previous step to cause the densification of the oxidized porous silicon regions. The result of this densification step is the collapse of the porous oxide to a dense structure which is substantially planar with the surface of the semiconductor wafer. This densified silicon dioxide structure has an etch rate which is substantially the same as thermally grown silicon dioxide.

    INTEGRATED CIRCUIT ISOLATION STRUCTURE AND METHOD FOR PRODUCING THE ISOLATION STRUCTURE

    公开(公告)号:CA1066815A

    公开(公告)日:1979-11-20

    申请号:CA266780

    申请日:1976-11-29

    Applicant: IBM

    Abstract: A semiconductor device, such as a transistor, integrated circuit or the like, having a pattern of oxidized and densified porous silicon regions extending onto one of its major surfaces for isolating regions of the semiconductor is manufacturable by a relatively simple process. The process involves forming porous silicon regions in the surface of the semiconductor body such as a silicon wafer, in the areas where dielectric isolation between semiconductor devices is desired. The porous silicon regions are then oxidized at a temperature sufficient to completely oxidize the porous silicon. The oxidation is such that the oxidized porous silicon extends above the surface of the semiconductor wafer. The oxidized porous silicon regions are then subjected to a temperature higher than the oxidizing temperature utilized in the previous step to cause the densification of the oxidized porous silicon regions. The result of this densification step is the collapse of the porous oxide to the dense structure which is substantially planar with the surface of the semiconductor wafer. This densified silicon dioxide structure has an etch rate which is substantially the same as thermally grown silicon dioxide.

    MAGNETIC HEAD WITH ENHANCED POLETIP AND METHOD FOR MAKING

    公开(公告)号:CA2064641A1

    公开(公告)日:1992-11-03

    申请号:CA2064641

    申请日:1992-04-01

    Applicant: IBM

    Abstract: An interleaved bi-directional magnetic tape head for contact recording has a stripe poletip 30 in the form of a thin film of a soft magnetic material deposited onto a magnetic ferrite substrate 22. A second thin film polepiece 40 is deposited over a gap region 26. A closure block 24 of a non-magnetic ceramic encloses the layers together with leveling insulation layers 32, 34 and deposited activating conductor turns 36. The stripe poletip extends for a distance just short of the first conductor turn and provides a balancing of the saturation moment of the pole pieces and provides for better recording capability, especially when operating in a trailing magnetic ferrite mode.

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