Photoresist azide sensitizer composition
    6.
    发明授权
    Photoresist azide sensitizer composition 失效
    光致抗蚀剂叠氮化物敏化剂组合物

    公开(公告)号:US3887379A

    公开(公告)日:1975-06-03

    申请号:US38870673

    申请日:1973-08-15

    Applicant: IBM

    CPC classification number: G03F7/0085 C09B62/78 Y10S430/127 Y10S430/128

    Abstract: The light sensitivity and adhesion of photoresist compositions is improved by incorporating in them a sensitizer which is cyanine dye, said dye having at least one azido group substituted on an aromatic ring.

    Abstract translation: 通过在其中加入作为花青染料的敏化剂,所述染料在芳香环上具有至少一个取代的叠氮基,从而提高了光致抗蚀剂组合物的光敏感性和粘附性。

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