公开(公告)号：CA2107048A1

公开(公告)日：1994-05-10

申请号：CA2107048

申请日：1993-09-27

Applicant: IBM

Inventor： ABRAHAM DAVID W ,  HAMMOND JAMES M ,  KLOS MARTIN A ,  ROESSLER KENNETH G ,  STOWELL ROBERT M ,  WICKRAMASINGHE HEMANTHA K

IPC: G01B7/34 ,  G01B21/30 ,  G01Q70/04 ,  H01J37/20 ,  H01J37/28 ,  G02B21/26

公开(公告)号：CA2098041A1

公开(公告)日：1994-04-21

申请号：CA2098041

申请日：1993-06-09

Applicant: IBM

Inventor： HAMMOND JAMES M ,  KLOS MARTIN A ,  MARTIN YVES ,  ROESSLER KENNETH G ,  STOWELL ROBERT M

IPC: G01B7/34 ,  B23Q1/34 ,  B23Q1/36 ,  B23Q1/56 ,  G01B5/00 ,  G01N37/00 ,  G01Q10/04 ,  G01Q70/04 ,  G02B26/10 ,  G02B7/00 ,  G02B21/00 ,  H04N1/04

Abstract: DUAL QUAD FLEXURE SCANNER A dual quad flexure carriage and assembly, for receiving a sensing probe, is used for scanning the sensing probe across a target surface. The flexure carriage is a unitary structure providing flat motion for the sensing probe during the scanning procedure, while further compensating for thermal creep. The dual quad flexure assembly comprises the dual quad flexure carriage along with piezo actuators and control systems to provide highly linear orthogonal motion.

公开(公告)号：CA2098040A1

公开(公告)日：1993-12-13

申请号：CA2098040

申请日：1993-06-09

Applicant: IBM

Inventor： HAMMOND JAMES M ,  KLOS MARTIN A ,  MARTIN YVES ,  ROESSLER KENNETH G ,  STOWELL ROBERT M

IPC: G01B21/30 ,  G01N37/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q30/18 ,  G01Q70/18 ,  G05D3/12 ,  G01B7/28

Abstract: A non-contact, step-wise method for automatically positioning a sensing probe (12), having a vibrating cantilever (18) and tip (19), above a target surface (20) utilizing acoustic and Van der Waals interactions respectively during an approach method. The sensing probe is lowered to a substantially optimized tip to target surface distance. The system utilizes the interaction of forces between the vibrating cantilever and target surface to automatically position the sensing probe above the target surface.