公开(公告)号：JPH10332715A

公开(公告)日：1998-12-18

申请号：JP14394698

申请日：1998-05-26

Applicant: IBM

Inventor： DON CHEN ,  FLECHA EDWIN ,  HAMMOND JAMES M ,  KENNETH GILBERT LESLER

IPC: G01B7/34 ,  G01B21/30 ,  G01N37/00 ,  G01Q60/34 ,  G01R29/08 ,  G01R31/303 ,  G01R33/10 ,  G01R33/12

Abstract: PROBLEM TO BE SOLVED: To provide a method for determining both of data for describing the magnetic field or electric field extending from the surface of a sample in a single path along the surface by a scanning probe and surface roughness. SOLUTION: A scan probe microscope operates in the same manner as an atomic force microsope operates in the intermission period of scanning motion and scans the surface of a sample so that the scanning lines on the surface passes through a probe tip 14, which vibrates interlocked with the surface. Since the probe tip 14 which is vibrating moves separated from the surface 10 of the sample in the period of the intermission of such scanning motion, the amplitude and phase shift of the probe tip 14 is determined by the gradient of the force field extending outside from the surface of the sample. When the probe tip 14 is attracted by the surface of the sample or near magnetic fields or electric fields or repulsed from it, such force field is established. A system memorizes the data expressing the height of the surface of the sample and force field of each sample point.

公开(公告)号：JPH10332713A

公开(公告)日：1998-12-18

申请号：JP14406698

申请日：1998-05-26

Applicant: IBM

Inventor： DON CHEN ,  FLECHA EDWIN ,  HAMMOND JAMES M ,  KENNETH GILBERT LESLER

IPC: G01B7/34 ,  G01B7/00 ,  G01B21/30 ,  G01N37/00 ,  G01Q20/04 ,  G01Q30/06 ,  G01Q70/00

Abstract: PROBLEM TO BE SOLVED: To provide a piezo-electric actuator with rough segments whose diflection per voltage is relatively large and fine segments whose deflection per voltage is relatively small. SOLUTION: A scanning probe microscope includes a segmental piezo-electric actuator 14 with rough segments 34 and fine segments 36, and its outputs are combined to determine the movement of the remote end of the actuator 14 to which a probe 12 is mechanically connected. The movement of the probe tip 12 or the change in the interlocking level of the probe tip 12 with the surface of a sample is sensed by a laser detector 22, and the detector 22 forms a feedback signal. A compensation signal to move the actuator 14 for holding the interlocking level constant is formed in a comparative circuit 46 for comparing the feedback signal and control signal. This compensation signal is used to drive the fine segments of the actuator 14, and the integration of the compensation signal is used for driving the rough segments 34.

公开(公告)号：CA2107048A1

公开(公告)日：1994-05-10

申请号：CA2107048

申请日：1993-09-27

Applicant: IBM

Inventor： ABRAHAM DAVID W ,  HAMMOND JAMES M ,  KLOS MARTIN A ,  ROESSLER KENNETH G ,  STOWELL ROBERT M ,  WICKRAMASINGHE HEMANTHA K

IPC: G01B7/34 ,  G01B21/30 ,  G01Q70/04 ,  H01J37/20 ,  H01J37/28 ,  G02B21/26

公开(公告)号：CA2098041A1

公开(公告)日：1994-04-21

申请号：CA2098041

申请日：1993-06-09

Applicant: IBM

Inventor： HAMMOND JAMES M ,  KLOS MARTIN A ,  MARTIN YVES ,  ROESSLER KENNETH G ,  STOWELL ROBERT M

IPC: G01B7/34 ,  B23Q1/34 ,  B23Q1/36 ,  B23Q1/56 ,  G01B5/00 ,  G01N37/00 ,  G01Q10/04 ,  G01Q70/04 ,  G02B26/10 ,  G02B7/00 ,  G02B21/00 ,  H04N1/04

Abstract: DUAL QUAD FLEXURE SCANNER A dual quad flexure carriage and assembly, for receiving a sensing probe, is used for scanning the sensing probe across a target surface. The flexure carriage is a unitary structure providing flat motion for the sensing probe during the scanning procedure, while further compensating for thermal creep. The dual quad flexure assembly comprises the dual quad flexure carriage along with piezo actuators and control systems to provide highly linear orthogonal motion.

公开(公告)号：CA2098040A1

公开(公告)日：1993-12-13

申请号：CA2098040

申请日：1993-06-09

Applicant: IBM

Inventor： HAMMOND JAMES M ,  KLOS MARTIN A ,  MARTIN YVES ,  ROESSLER KENNETH G ,  STOWELL ROBERT M

IPC: G01B21/30 ,  G01N37/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q30/18 ,  G01Q70/18 ,  G05D3/12 ,  G01B7/28

Abstract: A non-contact, step-wise method for automatically positioning a sensing probe (12), having a vibrating cantilever (18) and tip (19), above a target surface (20) utilizing acoustic and Van der Waals interactions respectively during an approach method. The sensing probe is lowered to a substantially optimized tip to target surface distance. The system utilizes the interaction of forces between the vibrating cantilever and target surface to automatically position the sensing probe above the target surface.