公开(公告)号：JPH10311841A

公开(公告)日：1998-11-24

申请号：JP10891298

申请日：1998-04-20

Applicant: IBM

Inventor： FLECHA EDWIN ,  KLOS MARTIN ALLEN ,  ROESSLER KENNETH G ,  STOWELL ROBERT MARSHALL

IPC: G01B21/30 ,  G01N37/00 ,  G01Q10/06 ,  G01Q30/06 ,  H01J37/28

Abstract: PROBLEM TO BE SOLVED: To provide a method for improving the accuracy of measurements made by a scanning probe microscope. SOLUTION: A scanning probe microscope 10 has a probe 18 which moves as it is engaged with and separated from a sample surface by the combination of deflection generated in a high-speed actuator 22 having a relatively small range of motion and deflection generated in a low-speed actuator 26 having a relatively large range of motion. If the deflection of the high speed actuator moves out of a predetermined range, the low speed actuator operates in such a way that the next operation of the high speed actuator brings the high speed actuator back to the predetermined range. If the low speed actuator is required to be operated in this way, scanning movement whereby a sample surface is moved to pass through a probe is stopped until the probe is brought to the correct engagement level with the sample surface, so that the high speed actuator is deflected within the predetermined range.

公开(公告)号：CA2107048A1

公开(公告)日：1994-05-10

申请号：CA2107048

申请日：1993-09-27

Applicant: IBM

Inventor： ABRAHAM DAVID W ,  HAMMOND JAMES M ,  KLOS MARTIN A ,  ROESSLER KENNETH G ,  STOWELL ROBERT M ,  WICKRAMASINGHE HEMANTHA K

IPC: G01B7/34 ,  G01B21/30 ,  G01Q70/04 ,  H01J37/20 ,  H01J37/28 ,  G02B21/26

公开(公告)号：CA2098041A1

公开(公告)日：1994-04-21

申请号：CA2098041

申请日：1993-06-09

Applicant: IBM

Inventor： HAMMOND JAMES M ,  KLOS MARTIN A ,  MARTIN YVES ,  ROESSLER KENNETH G ,  STOWELL ROBERT M

IPC: G01B7/34 ,  B23Q1/34 ,  B23Q1/36 ,  B23Q1/56 ,  G01B5/00 ,  G01N37/00 ,  G01Q10/04 ,  G01Q70/04 ,  G02B26/10 ,  G02B7/00 ,  G02B21/00 ,  H04N1/04

Abstract: DUAL QUAD FLEXURE SCANNER A dual quad flexure carriage and assembly, for receiving a sensing probe, is used for scanning the sensing probe across a target surface. The flexure carriage is a unitary structure providing flat motion for the sensing probe during the scanning procedure, while further compensating for thermal creep. The dual quad flexure assembly comprises the dual quad flexure carriage along with piezo actuators and control systems to provide highly linear orthogonal motion.

公开(公告)号：CA2098040A1

公开(公告)日：1993-12-13

申请号：CA2098040

申请日：1993-06-09

Applicant: IBM

Inventor： HAMMOND JAMES M ,  KLOS MARTIN A ,  MARTIN YVES ,  ROESSLER KENNETH G ,  STOWELL ROBERT M

IPC: G01B21/30 ,  G01N37/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q30/18 ,  G01Q70/18 ,  G05D3/12 ,  G01B7/28

Abstract: A non-contact, step-wise method for automatically positioning a sensing probe (12), having a vibrating cantilever (18) and tip (19), above a target surface (20) utilizing acoustic and Van der Waals interactions respectively during an approach method. The sensing probe is lowered to a substantially optimized tip to target surface distance. The system utilizes the interaction of forces between the vibrating cantilever and target surface to automatically position the sensing probe above the target surface.