公开(公告)号：DE3168777D1

公开(公告)日：1985-03-21

申请号：DE3168777

申请日：1981-08-10

Applicant: IBM

Inventor： BINNIG GERD DR ,  NIEVERGELT HERMANN ,  ROHRER HEINRICH DR ,  WEIBEL EDMUND

IPC: H01J37/20 ,  G01Q10/04 ,  G12B1/00 ,  H01L21/68 ,  H01L41/09 ,  H02N2/12 ,  H01L41/08

Abstract: The travelling support (1) comprises a piezo-electric plate (2) resting on three legs (6) whose bottom surface is insulated from the bench (8) on which the support is to travel, by a dielectric (7). The piezo-electric plate (2) can be caused to contract by means of an actuating voltage applied via sliders (9, 10) to top and bottom electrodes on the plate (2). By applying a voltage to the legs (6), these may be clamped selectively by electrostatic forces effective across the dielectric (7). Appropriate control of the actuating and clamping voltages causes the support (1) to either move in a linear or rotary fashion. The displacements the support can perform per step are in the nanometer range.

公开(公告)号：DE3561251D1

公开(公告)日：1988-02-04

申请号：DE3561251

申请日：1985-04-30

Applicant: IBM

Inventor： BINNIG GERD KARL ,  GERBER CHRISTOPH EMANUEL ,  ROHRER HEINRICH ,  WEIBEL EDMUND

IPC: C23C14/22 ,  B82B3/00 ,  C23C14/04 ,  C23C14/24 ,  C23C26/00 ,  G11B9/00 ,  G11B9/14 ,  H01J37/317 ,  H01L21/203 ,  H01L21/285 ,  C23C14/14 ,  C23C14/34 ,  G11B5/84

Abstract: This method involves the deposition of free metal atoms (4) from the apex (5) of a pointed tip (1) supported at a distance of 10 to 20 nm from a substrate (2). The atoms (4) are being field-desorbed under the influence of a strong electric field existing between the tip (1) and the substrate (2). With the tip (1) being moved across the substrate (2), a narrow trace (6) of metal atoms will be deposited on the substrate.

公开(公告)号：DE3274009D1

公开(公告)日：1986-12-04

申请号：DE3274009

申请日：1982-08-13

Applicant: IBM

Inventor： BINNIG GERD DR ,  GERBER CHRISTOPH ,  ROHRER HEINRICH DR ,  WEIBEL EDMUND

IPC: F16F15/02 ,  F16F7/10 ,  F16F15/04 ,  G01Q30/18 ,  F16F15/06

Abstract: The vibration filter comprises an inner ring (27) on which vibration-sensitive equipment may be installed, the ring (27) being suspended from a plurality of springs (24, 25, 26) elastically supported by posts (18, 19, 20) in turn mounted on an outer ring (1) which is spring-suspended the same as the inner ring (27) from a rigid bench (8). The springs (12, 13, 14; 24, 25, 26) and other elastic members (9, 10, 11; 15, 16, 17; 21, 22, 23; 28, 29, 30) have differing resonant frequencies. Between the bench (8) and the outer ring (1), and between the outer and inner rings (1, 27) there may be provided eddy current brakes consisting of strong permanent magnets (46, 48) arranged opposite individual copper or aluminum blocks (5, 47).