公开(公告)号：JPS54112173A

公开(公告)日：1979-09-01

申请号：JP78479

申请日：1979-01-10

Applicant: IBM

Inventor： ALBRECHT DREW EDWARD ,  DORAN SAMUEL KAY ,  MICHAIL MICHEL SALIB ,  YOURKE HANNON STANLEY

IPC: H01L21/027 ,  H01J37/21 ,  H01J37/304

公开(公告)号：DE2962859D1

公开(公告)日：1982-07-08

申请号：DE2962859

申请日：1979-01-24

Applicant: IBM

Inventor： ALBRECHT DREW EDWARD ,  DORAN SAMUEL KAY ,  MICHAIL MICHEL SALIB ,  YOURKE HANNON STANLEY

IPC: H01L21/027 ,  H01J37/21 ,  H01J37/304

Abstract: A method and apparatus for applying focus correction to an E-beam or charged particle system to compensate for wafer warp and mask tilt. In an electron beam system including a registration system which measures the position of four registration marks with the beam and calculates the apparent magnification error of a given chip, means are also provided for using magnification and rotation error information to calculate a height error factor and to apply a compensating current to a dynamic focusing coil of the electron beam to move the effective beam focal plane to a position which matches the wafer or mask plane at each chip site.

公开(公告)号：DE1149051B

公开(公告)日：1963-05-22

申请号：DEI0016746

申请日：1959-07-17

Applicant: IBM DEUTSCHLAND

Inventor： YOURKE HANNON STANLEY

IPC: H03K5/01

公开(公告)号：DE1142632B

公开(公告)日：1963-01-24

申请号：DEI0016350

申请日：1959-04-28

Applicant: IBM DEUTSCHLAND

Inventor： YOURKE HANNON STANLEY ,  STROHM WILLIAM GEORGE

IPC: H03K3/284

公开(公告)号：DE2731142A1

公开(公告)日：1978-01-19

申请号：DE2731142

申请日：1977-07-09

Applicant: IBM

Inventor： DAVIS DONALD EUGENE ,  HABEGGER MILLARD ALVIN ,  YOURKE HANNON STANLEY

IPC: H01J37/304 ,  H01L21/68

Abstract: A square shaped beam of charged particles is passed over a registration mark in the surface of a semiconductor wafer. A signal produced by a diode detector that is responsive to backscattered electrons will peak when the beam passes over each of the edges of the registration mark. The signal is differentiated; and the resultant signal is filtered and amplified to provide information regarding the position of the beam with respect to the wafer. If more than one diode detector is used, the signals are added just before or just after the differentiation.

公开(公告)号：DE1255133B

公开(公告)日：1967-11-30

申请号：DEJ0029358

申请日：1965-11-10

Applicant: IBM

Inventor： YOURKE HANNON STANLEY ,  CALLAHAN EDWARD JOSEPH

IPC: H04L25/08

Abstract: 1,106,217. Telegraphy; transistor pulse circuits. INTERNATIONAL BUSINESS MACHINES CORPORATION. 8 Oct., 1965 [13 Nov., 1964], No. 42743/65. Headings H3T and H4P. A line transmission system includes, at both the transmitter and the receiver, a transistor blocking oscillator which provides keyed A.C. signals. At the transmitter binary data is applied to the oscillator 22 and the keyed signals are rectified at 28 and filtered at 34 before being passed to the twisted pair line. At the receiver the line signals key the oscillator 36, which is powered by the received signals, the resulting signals being rectified and amplified at 42 and adjusted in level at 44 to provide the D.C. output. Since the receiver oscillator responds to the voltage difference on the line pair, noise affecting both lines has no effect on the oscillator. Resistors across the lines prevent static charges and reduce the effects of unsymmetrical earth capacities.

公开(公告)号：DE1234796B

公开(公告)日：1967-02-23

申请号：DEJ0019358

申请日：1961-02-02

Applicant: IBM

Inventor： NEFF GORDON WILLIAM ,  YOURKE HANNON STANLEY

IPC: G11C19/28 ,  H03K3/315 ,  H03K17/58