HIGH-PRECISION VACUUM ELECTROSTATIC LENS FOR VACUUM
    3.
    发明申请
    HIGH-PRECISION VACUUM ELECTROSTATIC LENS FOR VACUUM 审中-公开
    真空高精度真空透镜

    公开(公告)号:WO2012153987A3

    公开(公告)日:2013-02-14

    申请号:PCT/KR2012003657

    申请日:2012-05-10

    CPC classification number: H01J37/12

    Abstract: The present invention relates to a structure for an electrostatic lens. The electrostatic lens of the present invention comprises a first electrode, a third electrode, and a second electrode interposed between the first electrode and the third electrode such that a predetermined spacing exists among the three electrodes. The center of each of the three electrodes has a through-hole through which a charged particle beam is to pass. The through-holes of the three electrodes are arranged in a line. Thus, an improved structure for an electrostatic lens may be obtained.

    Abstract translation: 本发明涉及静电透镜的结构。 本发明的静电透镜包括第一电极,第三电极和插在第一电极和第三电极之间的第二电极,使得在三个电极之间存在预定的间隔。 三个电极中的每一个具有通孔,通过该通孔。 三个电极的通孔排列成一行。 因此,可以获得用于静电透镜的改进的结构。

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