SPECTROPHOTOMETER USING MEDIUM ENERGY ION
    3.
    发明申请
    SPECTROPHOTOMETER USING MEDIUM ENERGY ION 审中-公开
    分光光度计使用中等能量离子

    公开(公告)号:WO2010013921A3

    公开(公告)日:2010-05-06

    申请号:PCT/KR2009004177

    申请日:2009-07-28

    CPC classification number: G21K1/02 G21K1/08 G21K5/04 G21K5/10

    Abstract: The present invention relates to a spectrophotometer using medium energy ion beam scattering and comprises: an ion source (10) that generates ions, a collimator (20) that generates the ions in a parallel beam, an accelerator (30) that accelerates the parallel beam, a pulsed ion-beam generator (40) that pulses the accelerated ion beam, a condenser-object lens (50) that focuses the pulsed ion beam onto a sample (1), a detector (60) that detects a spectroscopic signal for the pulse of the focused ion beam scattered from the sample, and a data analyzer (70) that analyzes the spectroscopic signal detected by the detector (60).

    Abstract translation: 本发明涉及一种使用中能离子束散射的分光光度计,其包括:产生离子的离子源(10),以平行束产生离子的准直器(20),加速平行束的加速器(30) ,脉冲加速离子束的脉冲离子束发生器(40),将脉冲离子束聚焦到样品(1)上的聚光器物镜(50),检测器(60),用于检测 从样本中散射的聚焦离子束的脉冲以及分析由检测器(60)检测到的分光信号的数据分析器(70)。

    HIGH-PRECISION VACUUM ELECTROSTATIC LENS FOR VACUUM
    4.
    发明申请
    HIGH-PRECISION VACUUM ELECTROSTATIC LENS FOR VACUUM 审中-公开
    真空高精度真空透镜

    公开(公告)号:WO2012153987A3

    公开(公告)日:2013-02-14

    申请号:PCT/KR2012003657

    申请日:2012-05-10

    CPC classification number: H01J37/12

    Abstract: The present invention relates to a structure for an electrostatic lens. The electrostatic lens of the present invention comprises a first electrode, a third electrode, and a second electrode interposed between the first electrode and the third electrode such that a predetermined spacing exists among the three electrodes. The center of each of the three electrodes has a through-hole through which a charged particle beam is to pass. The through-holes of the three electrodes are arranged in a line. Thus, an improved structure for an electrostatic lens may be obtained.

    Abstract translation: 本发明涉及静电透镜的结构。 本发明的静电透镜包括第一电极,第三电极和插在第一电极和第三电极之间的第二电极,使得在三个电极之间存在预定的间隔。 三个电极中的每一个具有通孔,通过该通孔。 三个电极的通孔排列成一行。 因此,可以获得用于静电透镜的改进的结构。

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