公开(公告)号：US09673035B2

公开(公告)日：2017-06-06

申请号：US14442283

申请日：2013-08-20

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Chang Joon Park ,  Jong Rok Ahn ,  Cheolsu Han ,  Sang Jung Ahn

IPC: H01J49/14 ,  H01J49/06 ,  H01J49/16

CPC classification number: H01J49/147 ,  H01J49/067 ,  H01J49/16

Abstract: According to one embodiment of the present invention, an ion source includes: an anode tube in which gas flowing in through one side is ionized and discharged to the other side and in which a slit is formed on the outer circumference thereof; a filament which emits thermal electrons toward the slit so as to ionize the gas; and a diffusion-preventing body arranged between the filament and the slit and having at least one hole through which the thermal electrons can pass so as to reduce the diffusion of the thermal electrons flowing into the anode tube.

公开(公告)号：US10283339B2

公开(公告)日：2019-05-07

申请号：US15518408

申请日：2015-10-07

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Chang Joon Park ,  Sang Jung Ahn ,  Cheolsu Han ,  Keu Chan Lee ,  Seok Rae Yoon

IPC: H01J49/14 ,  G01N27/62 ,  H01J49/26 ,  H01J49/00 ,  H01J49/06 ,  H01J49/42

Abstract: The present invention relates to a particle beam mass spectrometer and particle measurement method by means of same. More particularly, the present invention relates to a particle beam mass spectrometer including: a particle focusing unit focusing a particle beam induced by gas flow; an electron gun forming a charged particle beam by accelerating thermal electrons to ionize the particle beam focused by the particle focusing unit; a deflector deflecting the charged particle beam according to kinetic energy to charge ratio; and a sensing unit measuring a current induced by the deflected charged particle beam, wherein the deflector includes at least one particle beam separation electrode provided at each of opposite sides with respect to a progress axis of the charged particle beam before being deflected.

公开(公告)号：US20180286655A1

公开(公告)日：2018-10-04

申请号：US15518408

申请日：2015-10-07

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Chang Joon Park ,  Sang Jung AHN ,  Cheolsu HAN ,  Keu Chan LEE ,  Seok Rae YOON

IPC: H01J49/14 ,  H01J49/06 ,  H01J49/42 ,  H01J49/00

CPC classification number: H01J49/147 ,  G01N27/62 ,  H01J49/0031 ,  H01J49/009 ,  H01J49/0095 ,  H01J49/061 ,  H01J49/4225

Abstract: The present invention relates to a particle beam mass spectrometer and particle measurement method by means of same. More particularly, the present invention relates to a particle beam mass spectrometer including: a particle focusing unit focusing a particle beam induced by gas flow; an electron gun forming a charged particle beam by accelerating thermal electrons to ionize the particle beam focused by the particle focusing unit; a deflector deflecting the charged particle beam according to kinetic energy to charge ratio; and a sensing unit measuring a current induced by the deflected charged particle beam, wherein the deflector includes at least one particle beam separation electrode provided at each of opposite sides with respect to a progress axis of the charged particle beam before being deflected.