Abstract:
PROBLEM TO BE SOLVED: To provide a platinum resistor thermometer whose electric characteristics are not deteriorated at a high temperature, and its manufacturing method. SOLUTION: A thin film platinum resistor temperature detecting element 14 is coated with a high quality dielectric layer 24 which is covered with a partition layer 26. This partition layer 26 covers the upper part of the dielectric layer 24, and prevents contaminant from diffusion toward the detecting element 14. The partition layer 26 allows diffusion of oxygen, so that the platinum layer is surrounded by an abundant oxygen atmosphere. The high quality dielectric layer 24 is, e.g. a silicon dioxide layer, and the partition layer 26 is composed of titanium dioxide. By this constitution, the temperature detecting element 14 is not contaminated and the temperature coefficient of the resistor is not deteriorated at a high temperature.
Abstract:
A thin film platinum resistance thermometer capable of operation at elevated temperatures includes a benign dielectric layer covering the thin film platinum resistance temperature sensing element and a barrier layer overlying the dielectric layer. The barrier layer, which is preferrably titanium dioxide, resists diffusion of contaminants which would alter the electrical characteristics of the sensing element, while permitting diffusion of oxygen through the barrier layer.
Abstract:
A wireless field device is disclosed. The field device includes a wireless communications module and an energy conversion module. The wireless communications module is configured to wirelessly communicate process-related information with another device. The energy conversion module is coupled to the wireless communications module. The energy conversion module is configured to couple to a thermal source, and to generate electricity from thermal potential energy in the thermal source.
Abstract:
A thin film platinum resistance thermometer capable of operation at elevated temperatures includes a benign dielectric layer covering the thin film platinum resistance temperature sensing element and a barrier layer overlying the dielectric layer. The barrier layer, which is preferrably titanium dioxide, resists diffusion of contaminants which would alter the electrical characteristics of the sensing element, while permitting diffusion of oxygen through the barrier layer.
Abstract:
A wireless field device (34, 50, 70, 80, 91, 100) is disclosed. The field device (34, 50, 70, 80, 91, 100) includes a wireless communications module (32) and an energy conversion module (38) . The wireless communications module (32) is configured to wirelessly communicate process-related information with another device. The energy conversion module (38) is coupled to the wireless communications module (32) . The energy conversion module (38) is configured to couple to a thermal source, and to generate electricity from thermal potential energy in the thermal source.
Abstract:
A pressure sensor (100, 222) integrally formed in the shape of a beam (102) around a central channel. The beam (102) has an integral blind end (104) that is pressurized by the fluid. The beam has an opposite end (106) that is shaped to provide a stepped corner (107) with a gap (108) opening at the base of the stepped corner (107), where the gap (108) and isolated from the fluid. A sensing film (112) in the channel adjacent the blind end (104) has an electrical parameter that varies with pressure and electrical leads (110) that extend from the channel and out the gap. A seal (115) fills the gap (108) around the leads (110) and the seal (115) fills a portion of the stepped corner (107). The sensor (100) is preferably formed by direct bonding of single crystal alumina layers (114, 116). Applications include industrial pressure transmitters, aerospace and turbine engine pressure sensing.
Abstract:
A wireless field device (34, 50, 70, 80, 91, 100) is disclosed. The field device (34, 50, 70, 80, 91, 100) includes a wireless communications module (32) and an energy conversion module (38) . The wireless communications module (32) is configured to wirelessly communicate process-related information with another device. The energy conversion module (38) is coupled to the wireless communications module (32) . The energy conversion module (38) is configured to couple to a thermal source, and to generate electricity from thermal potential energy in the thermal source.
Abstract:
A pressure sensor integrally formed in the shape of a beam around a central channel. The beam has an integral blind end that is pressurized by the fluid. The beam has an opposite end that is shaped to provide a stepped corner with a gap opening at the base of the stepped corner, where the gap and isolated from the fluid. A sensing film in the channel adjacent the blind end has an electrical parameter that varies with pressure and electrical leads that extend from the channel and out the gap. A seal fills the gap around the leads and the seal fills a portion of the stepped corner. The sensor is preferably formed by direct bonding of single crystal alumina layers. Applications include industrial pressure transmitters, aerospace and turbine engine pressure sensing.
Abstract:
A pH sensor has an electrode assembly with an electrode with a core of an electrochemically inert insulating or semiconductive material, and is coated with an electrically conductive, electrochemically sensitive coating. The preferred core is insulating and made of alumina, with a thin coating of iridium oxide deposited over at least a portion of the outer surface of the core. The coating is carried to a region remote from the sensing surface and is used for making electrically conductive connections that lead to remote circuitry. The core is made in a form that can be supported and held in an insulating, electrochemically inert, deformable material that is sealed around the outer surface of the coating on the core to prevent leakage of chemicals being sensed. An outer housing also permits sealing quite easily into access ports on which the sensor housing is mounted.