公开(公告)号：JP2013128147A

公开(公告)日：2013-06-27

申请号：JP2013052556

申请日：2013-03-14

Applicant: Saint-Gobain Ceramics & Plastics Inc ,  サン−ゴバン セラミックス アンド プラスティクス,インコーポレイティド

Inventor： BRAHMANANDAM V TANIKELLA ,  SIMPSON MATTHEW A ,  CHINNAKARPAN PARNIAPAN ,  RIZZUTO ROBERT A ,  VEDANTHAM RAMANUJAM

IPC: H01L21/304 ,  C30B29/20

CPC classification number: B24B7/228 ,  Y10T428/257 ,  Y10T428/26

Abstract: PROBLEM TO BE SOLVED: To provide a larger high quality substrate.SOLUTION: A sapphire substrate comprises a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having an nTTV of about 0.037 μm/cmor less, where the nTTV is total thickness variation normalized for the surface area of the generally planar surface, the substrate having a diameter of about 9.0 cm or greater.

Abstract translation: 要解决的问题：提供更大的高品质基板。 解决方案：蓝宝石衬底包括具有选自由a面，r面，m面和c面取向组成的组的结晶取向的大致平坦的表面，并且具有约0.037μm/ cm 2 或更小，其中nTTV是对于大致平坦的表面的表面积归一化的总厚度变化，基底具有约9.0cm或更大的直径。 版权所有（C）2013，JPO＆INPIT

公开(公告)号：JP2012250344A

公开(公告)日：2012-12-20

申请号：JP2012185056

申请日：2012-08-24

Applicant: Saint-Gobain Ceramics & Plastics Inc ,  サン−ゴバン セラミックス アンド プラスティクス,インコーポレイティド

Inventor： TANIKELLA BRAHMANANDAM V ,  SIMPSON MATTHEW A ,  CHINNAKARUPPAN PALANIAPPAN ,  RIZZUTO ROBERT A ,  CHERIAN ISAAC K ,  VEDANTHAM RAMANUJAM

IPC: B24B1/00 ,  C30B25/18 ,  C30B29/38

CPC classification number: C30B29/20

Abstract: PROBLEM TO BE SOLVED: To provide a sapphire substrate that has a larger size than that of a conventional substrate and is of high quality.SOLUTION: The sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 μm/cm, wherein nTTV is total thickness variation normalized for surface area of the generally planar surface, the substrate having a diameter not less than about 9.0 cm.

Abstract translation: 要解决的问题：提供具有比常规基板大的尺寸的蓝宝石基板，并且具有高质量。 解决方案：蓝宝石衬底包括大致平坦的表面，其具有选自由a面，r面，m面和c面取向组成的组的结晶取向，并且具有不大于约的nTTV 0.037μm/ cm 2，其中nTTV是对于大致平坦的表面的表面积进行标准化的总厚度变化，基底的直径不小于约9.0cm。 版权所有（C）2013，JPO＆INPIT

公开(公告)号：WO2008083081A3

公开(公告)日：2008-11-06

申请号：PCT/US2007088576

申请日：2007-12-21

Applicant: SAINT GOBAIN CERAMICS ,  TANIKELLA BRAHMANANDAM V ,  SIMPSON MATTHEW A ,  CHINNAKARUPPAN PALANIAPPAN ,  RIZZUTO ROBERT A ,  VEDANTHAM RAMANUJAM

Inventor： TANIKELLA BRAHMANANDAM V ,  SIMPSON MATTHEW A ,  CHINNAKARUPPAN PALANIAPPAN ,  RIZZUTO ROBERT A ,  VEDANTHAM RAMANUJAM

IPC: B24B7/22 ,  B24B37/04 ,  H01L21/20

CPC classification number: B24B7/228 ,  Y10T428/257 ,  Y10T428/26

Abstract: A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 µm/cm 2 , wherein nTTV is total thickness variation normalized for surface area of teh generally planar surface, the substrate having a diameter not less than about 9.0 cm.

Abstract translation: 蓝宝石衬底包括具有选自由a面，r面，m面和c面取向组成的组的结晶取向，且具有不大于约0.037μm/ cm 2的nTTV的大致平坦的表面， SUP> 2，其中nTTV是对于大致平坦表面的表面积归一化的总厚度变化，所述基底具有不小于约9.0cm的直径。

公开(公告)号：CA2673523C

公开(公告)日：2012-10-09

申请号：CA2673523

申请日：2007-12-21

Applicant: SAINT GOBAIN CERAMICS

Inventor： TANIKELLA BRAHMANANDAM V ,  CHINNAKARUPPAN PALANIAPPAN ,  RIZZUTO ROBERT A ,  CHERIAN ISAAC K ,  VEDANTHAM RAMANUJAM

IPC: B24B1/00 ,  B24B7/22

Abstract: A method of machining a sapphire substrate comprises grinding a first surface of a sapphire substrate using a first fixed abrasive and grinding said first surface of the sapphire substrate using a second fixed abrasive, wherein the second fixed abrasive has a smaller average grain size than the first fixed abrasive, and wherein the second, fixed abrasive is self -dressing.

公开(公告)号：UA98314C2

公开(公告)日：2012-05-10

申请号：UAA200906859

申请日：2007-12-21

Applicant: SAINT GOBAIN CERAMICS

Inventor： TANIKELLA BRAHMANANDAM V ,  SIMPSON MATTHEW A ,  CHINNAKARUPPAN PALANIAPPAN ,  RIZZUTO ROBERT A ,  VEDANTHAM RAMANUJAM

IPC: B24B7/00 ,  B24B37/005 ,  H01L21/20 ,  H01L21/304

Abstract: Описанасапфирнаяподложка, котораяимеетв целомплоскуюповерхностьс кристаллографическойориентацией, выбраннойизгруппы, состоящейиза-плоскостной, r-плоскостной, m-плоскостнойи с-плоскостнойориентаций, ивеличиной nTTV неболеечемприблизительно 0,037 мкм/см, где nTTV являетсяобщейвариациейтолщины, нормированнойк площадиповерхностиуказаннойв целомплоскойповерхности, гдеуказаннаяподложкаимеетдиаметрнеменеепримерно .

公开(公告)号：CA2673662A1

公开(公告)日：2008-07-10

申请号：CA2673662

申请日：2007-12-21

Applicant: SAINT GOBAIN CERAMICS

Inventor： VEDANTHAM RAMANUJAM ,  RIZZUTO ROBERT A ,  TANIKELLA BRAHMANANDAM V ,  SIMPSON MATTHEW A ,  CHINNAKARUPPAN PALANIAPPAN

IPC: B24B7/22 ,  B24B37/04 ,  H01L21/20

Abstract: A sapphire substrate includes a generally planar surface having a crystal lographic orientation selected from the group consisting of a-plane, r-plane , m-plane, and c-plane orientations, and having a nTTV of not greater than a bout 0.037 µm/cm2, wherein nTTV is total thickness variation normalized for surface area of teh generally planar surface, the substrate having a diamete r not less than about 9.0 cm.

公开(公告)号：CA2673662C

公开(公告)日：2012-07-24

申请号：CA2673662

申请日：2007-12-21

Applicant: SAINT GOBAIN CERAMICS

Inventor： TANIKELLA BRAHMANANDAM V ,  SIMPSON MATTHEW A ,  CHINNAKARUPPAN PALANIAPPAN ,  RIZZUTO ROBERT A ,  VEDANTHAM RAMANUJAM

IPC: B24B7/22 ,  H01L33/00

Abstract: A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 µm/cm2, wherein nTTV is total thickness variation normalized for surface area of teh generally planar surface, the substrate having a diameter not less than about 9.0 cm.

公开(公告)号：UA97969C2

公开(公告)日：2012-04-10

申请号：UAA200906860

申请日：2007-12-21

Applicant: SAINT GOBAIN CERAMICS

Inventor： TANIKELLA BRAHMANANDAM V ,  SIMPSON MATTHEW A ,  CHINNAKARUPPAN PALANIAPPAN ,  RIZZUTO ROBERT A ,  CHERIAN ISAAC K ,  VEDANTHAM RAMANUJAM

IPC: C30B29/20

Abstract: Описанасапфирнаяоснова, котораяимеетв целомплоскуюповерхностьс кристаллографическойориентацией, выбраннойизгруппы, котораясостоитиза-плоскостной, r-плоскостной, m-плоскостнойи с-плоскостнойориентаций, ивеличиной nTTV неболее, чемприблизительно 0,037 мкм/см, где nTTV являетсяобщейвариациейтолщины, нормированнойк площадиповерхностиуказаннойв целомплоскойповерхности, гдеуказанаосноваимеетдиаметрнеменее, чемприблизительно .

公开(公告)号：UA97126C2

公开(公告)日：2012-01-10

申请号：UAA200906861

申请日：2007-12-21

Applicant: SAINT GOBAIN CERAMICS

Inventor： TANIKELLA BRAHMANANDAM V ,  CHINNAKARUPPAN PALANIAPPAN ,  RIZZUTO ROBERT A ,  CHERIAN ISAAC K ,  VEDANTHAM RAMANUJAM

IPC: B24B1/00 ,  B24B7/00

Abstract: Процессмеханическойобработкисапфирнойосновывключает: шлифовкупервойповерхностисапфирнойосновыс помощьюпервогофиксированногоабразиваи шлифованияуказаннойпервойповерхностисапфирнойосновыс помощьювторогофиксированногоабразива, гдевторойфиксированныйабразивимеетменьшийсреднийразмерзерна, чемпервыйфиксированныйабразиви являетсясамозатачивающимся.

公开(公告)号：CA2673660A1

公开(公告)日：2008-07-10

申请号：CA2673660

申请日：2007-12-21

Applicant: SAINT GOBAIN CERAMICS

Inventor： CHERIAN ISAAC K ,  VEDANTHAM RAMANUJAM ,  CHINNAKARUPPAN PALANIAPPAN ,  SIMPSON MATTHEW A ,  TANIKELLA BRAHMANANDAM V ,  RIZZUTO ROBERT A

IPC: C30B29/20

Abstract: A sapphire substrate includes a generally planar surface having a crystal lographic orientation selected from the group consisting of a-plane, r-plane , m-plane, and c-plane orientations, and having a nTTV of not greater than a bout 0.037 µm/cm2, wherein nTTV is total thickness variation normalized for surface area of the generally planar surface, the substrate having a diamete r not less than about 9.0 cm.