公开(公告)号：EP3187825B1

公开(公告)日：2020-08-19

申请号：EP16199423.1

申请日：2016-11-17

Applicant: STMicroelectronics S.r.l. ,  STMicroelectronics, Inc. ,  STMicroelectronics International N.V.

Inventor： VALZASINA, Carlo ,  HUANTONG, Zhang ,  BRUNETTO, Matteo Fabio ,  ANDERSSON, Gert Ingvar ,  SVENSSON, Erik Daniel ,  HEDENSTIERNA, Nils Einar

IPC: G01C19/574

公开(公告)号：EP3187825A1

公开(公告)日：2017-07-05

申请号：EP16199423.1

申请日：2016-11-17

Applicant: STMicroelectronics S.r.l. ,  STMicroelectronics, Inc. ,  STMicroelectronics International N.V.

Inventor： VALZASINA, Carlo ,  HUANTONG, Zhang ,  BRUNETTO, Matteo Fabio ,  ANDERSSON, Gert Ingvar ,  SVENSSON, Erik Daniel ,  HEDENSTIERNA, Nils Einar

IPC: G01C19/574

Abstract: A gyroscope includes: a substrate (2); a first structure (11), a second structure (12) and a third structure (10) elastically coupled to the substrate (2) and movable along a first axis (X), the first and second structure (11; 12) being arranged at opposite sides of the third structure (10) with respect to the first axis (X); a driving system (4, 16a, 16b, 20a, 20b), configured to oscillate the first and second structure (11, 12) along the first axis (X) in phase with one another and in phase opposition with the third structure (10); the first, second and third structure (11, 12, 10) being provided with respective sets of sensing electrodes (17a, 21a), configured to be displaced along a second axis (Y) perpendicular to the first axis (X) in response to rotations of the substrate (2) about a third axis (Z) perpendicular to the first axis (X) and to the second axis (Y).

Abstract translation: 陀螺仪包括：衬底（2）; 第一结构（11），第二结构（12）和第三结构（10），所述第一结构（11），所述第二结构（12）和第三结构（10）弹性地联接到所述基板（2）并且能够沿着第一轴线 在第三结构（10）的相对于第一轴线（X）的相对侧处; 驱动系统（4,16a，16b，20a，20b），所述驱动系统被配置为使所述第一结构（11）和所述第二结构（12）沿着所述第一轴线（X）彼此相位地振荡并且与所述第三结构（10 ）; 所述第一，第二和第三结构（11,12,10）设置有相应的感测电极组（17a，21a），所述感测电极组被配置为响应于所述感测电极沿着垂直于所述第一轴（X）的第二轴（Y） 围绕垂直于第一轴线（X）和第二轴线（Y）的第三轴线（Z）旋转衬底（2）。

公开(公告)号：EP4549372A1

公开(公告)日：2025-05-07

申请号：EP24209213.8

申请日：2024-10-28

Applicant: STMicroelectronics International N.V.

Inventor： CORSO, Lorenzo ,  VERCESI, Federico ,  GATTERE, Gabriele ,  GUERRA, Anna ,  VALZASINA, Carlo ,  ALLEGATO, Giorgio

IPC: B81B7/00

Abstract: MEMS device (50) having a substrate (52) of semiconductor material; a first structural layer (54) of semiconductor material, on the substrate (52); a second structural layer (55) of semiconductor material, on the first structural layer (54); an active portion (83), accommodating active structures (85, 86) formed in the first structural layer (54) and/or in the second structural layer (55); a connection portion (56), accommodating a plurality of connection structures (57) and arranged laterally to the active portion (85, 86); and a plurality of conductive regions (60), arranged on the substrate (52) and extending between the active portion (85, 86) and the connection portion (56). Each connection structure (57) is formed by a first connection portion (57A), in electrical contact with a respective conductive region (60A) and formed in the first structural layer (54), and by a second connection portion (57B), on the first connection portion (57A) and in electrical continuity therewith, the second connection portion (57) formed in the second structural layer (55). The first connection portion (57A) has a greater thickness than the second connection portion (57B).

公开(公告)号：EP4502536A1

公开(公告)日：2025-02-05

申请号：EP24192288.9

申请日：2024-08-01

Applicant: STMicroelectronics International N.V.

Inventor： RIANI, Manuel ,  VALZASINA, Carlo ,  YALLICO SANCHEZ, Gianfranco Javier ,  GUERINONI, Luca

IPC: G01C19/5712 ,  G01C19/5733 ,  B81B3/00 ,  G01P15/097 ,  B81C1/00 ,  H03H9/02 ,  G01P15/08

Abstract: A MEMS (MicroElectroMechanical System) device includes: a supporting body (10); a movable mass (11), constrained to the supporting body (10) by flexures (12; 512) so as to be able to oscillate in a main direction (X); an actuator device (8, 18), configured to apply to the movable mass (11) an electrostatic actuation force (F A ), transverse to the main direction (X); and a control circuit (9) configured to detect stiction conditions, in which the movable mass (11) is stuck to the supporting body (10) by a stiction force (F S ), and for driving the actuator device (8, 18) in response to recognition of the stiction conditions. The actuation force (F A ) is an oscillating variable force with an actuation frequency band (ΔF A ) containing at least one resonance frequency (F R ), in an actuation direction transverse to the main direction (X), of a mechanical system comprising the movable mass (11) stuck to the supporting body (10), so that the actuation force (F A ) will activate at least one natural vibrational mode in a vibration direction transverse to the main direction (X).