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    CIRCUIT AND METHOD FOR DRIVING A MICRO-ELECTRO-MECHANICAL RESONATOR OF A GYROSCOPE WITH A REDUCED EXCITATION OF SPURIOUS HARMONICS
    1.
    发明公开
    CIRCUIT AND METHOD FOR DRIVING A MICRO-ELECTRO-MECHANICAL RESONATOR OF A GYROSCOPE WITH A REDUCED EXCITATION OF SPURIOUS HARMONICS 审中-公开

    公开(公告)号：EP4400808A1

    公开(公告)日：2024-07-17

    申请号：EP24150665.8

    申请日：2024-01-08

    Applicant: STMicroelectronics S.r.l.

    Inventor： GATTERE, Gabriele ,  GARBARINO, Marco

    IPC: G01C19/5726 ,  G01C19/5776

    CPC classification number: G01C19/5726 ,  G01C19/5776

    Abstract: Driving circuit for a driving resonator stage (4) of a MEMS gyroscope (1) including at least a first and a second electrode (31,32) and a movable mass (20), the driving circuit (3A,3B) including: a synchronization stage (16) which receives an electrical position signal (sPOS1) indicative of the position of the movable mass (20) and generates a reference signal (sLOCK') phase- and frequency-locked with the electrical position signal (sPOSl); a driving stage (2) which generates, on the basis of the reference signal (sLOCK'), a first and a second driving signal (D1,D2), which are applied to the first and, respectively, the second electrodes (31,32), so that the movable mass (20) is subject to a first and a second electrostatic force which cause the movable mass (20) to oscillate. Each of the first and the second driving signals (Dl,D2) comprises, for each period of the reference signal (sLOCK'), a corresponding pulse, the pulses of the first and the second driving signals (Dl,D2) being temporally alternated and having a same duration (α*T0), the ratio (α) between the duration and the period (T0) of the reference signal (sLOCK') falling in the range [0.3-0.37] or in the range [0.63-0.7].

    MICROMECHANICAL DEVICE FOR ENHANCED ACCELERATION MEASUREMENT
    2.
    发明公开
    MICROMECHANICAL DEVICE FOR ENHANCED ACCELERATION MEASUREMENT 审中-公开

    公开(公告)号：EP4235190A1

    公开(公告)日：2023-08-30

    申请号：EP23157012.8

    申请日：2023-02-16

    Applicant: STMicroelectronics S.r.l.

    Inventor： GATTERE, Gabriele ,  RIZZINI, Francesco ,  MANCA, Nicolo'

    IPC: G01P15/125 ,  G01P15/13 ,  G01P15/08

    Abstract: Micromechanical device (50) comprising: a semiconductor body (51); a movable structure (53) configured to oscillate relative to the semiconductor body (51) along an oscillation direction (61); and an elastic assembly (57) with an elastic constant (K eq ), coupled to the movable structure (53) and to the semiconductor body (51) and configured to deform along the oscillation direction (61) to allow the oscillation of the movable structure (53) as a function of an acceleration applied to the micromechanical device (50). The movable structure (53) and the semiconductor body (51) comprise a control structure (72) for the capacitive control of the oscillation of the movable structure (53): when the control structure (72) is electrically controlled in a first state the micromechanical device (50) is in a first operating mode wherein a total elastic constant (K t ) of the micromechanical device (50) has a first value, and when it is electrically controlled in a second state the micromechanical device (50) is in a second operating mode wherein the total elastic constant (K t ) has a second value lower than, or equal to, the first value.

    MEMS ACTUATOR FOR IN-PLANE MOVEMENT OF A MOBILE MASS AND OPTICAL MODULE COMPRISING THE MEMS ACTUATOR
    3.
    发明公开
    MEMS ACTUATOR FOR IN-PLANE MOVEMENT OF A MOBILE MASS AND OPTICAL MODULE COMPRISING THE MEMS ACTUATOR 审中-公开

    公开(公告)号：EP4105167A1

    公开(公告)日：2022-12-21

    申请号：EP22176138.0

    申请日：2022-05-30

    Applicant: STMicroelectronics S.r.l.

    Inventor： BONI, Nicolo' ,  GATTERE, Gabriele ,  RIANI, Manuel ,  CARMINATI, Roberto

    IPC: B81B3/00 ,  G01B11/02 ,  G01S17/88

    Abstract: The MEMS actuator (100) is formed by: a substrate (105); a mobile mass (120) that is suspended over the substrate in a first direction (Z) and extends mainly in a plane that defines a second direction (Y) and a third direction (X) perpendicular to the first direction; elastic elements (123A, 123B) arranged between the substrate and the mobile mass and having a first compliance, in a direction parallel to the first direction, lower than a second compliance, in a direction parallel to the second direction; and piezoelectric actuation structures (130A-130D, 135) having a portion fixed with respect to the substrate and a portion configured to deform in the first direction in the presence of an actuation voltage. The MEMS actuator is further formed by movement-transformation structures (126A-126D) coupled to the piezoelectric actuation structures and having an elastic movement-conversion structure (160) arranged between a piezoelectric actuation structure and the mobile mass. The elastic movement-conversion structure is compliant in a plane (YZ) formed by the first and the second directions and has a first principal axis of inertia (Ii) and a second principal axis of inertia (I 2 ) transverse to the first and the second directions.

    A MEMS ACCELEROMETRIC SENSOR HAVING HIGH ACCURACY AND LOW SENSITIVITY TO TEMPERATURE AND AGEING
    4.
    发明公开
    A MEMS ACCELEROMETRIC SENSOR HAVING HIGH ACCURACY AND LOW SENSITIVITY TO TEMPERATURE AND AGEING 审中-公开

    公开(公告)号：EP3524984A1

    公开(公告)日：2019-08-14

    申请号：EP19160151.7

    申请日：2016-10-19

    Applicant: STMicroelectronics S.r.l.

    Inventor： TOCCHIO, Alessandro ,  GATTERE, Gabriele

    IPC: G01P15/125 ,  G01P15/08

    Abstract: An out-of-plane MEMS accelerometric sensor, including: a supporting structure (3); a suspended region (92) of semiconductor material, mobile with respect to the supporting structure; at least one first modulation electrode (114), which is fixed to the supporting structure and is biased, in use, with an electrical modulation signal including at least one periodic component having a first frequency; and at least one first variable capacitor (130), formed by the suspended region and by the first modulation electrode, in such a way that the suspended region is subjected to a first electrostatic force that depends upon the electrical modulation signal. The accelerometric sensor further includes a sensing assembly (102, 104, 95a) which generates, when the accelerometric sensor is subjected to an acceleration, an electrical sensing signal, which indicates the position of the suspended region with respect to the supporting structure and includes a frequency-modulated component, which is a function of the acceleration and of the first frequency. The suspended region overlies the first modulation electrode and is anchored to the supporting structure by means of elastic suspension elements (98, 99), which enable rotation of the suspended region about an axis of rotation, which is parallel to a surface of main extension of the suspended region.

    MICROELECTROMECHANICAL RESONATOR WITH IMPROVED ELECTRICAL FEATURES
    5.
    发明公开
    MICROELECTROMECHANICAL RESONATOR WITH IMPROVED ELECTRICAL FEATURES 审中-公开

    公开(公告)号：EP3407492A1

    公开(公告)日：2018-11-28

    申请号：EP18172940.1

    申请日：2018-05-17

    Applicant: STMicroelectronics S.r.l.

    Inventor： GATTERE, Gabriele ,  TOCCHIO, Alessandro ,  VALZASINA, Carlo

    IPC: H03H9/24 ,  H03H9/02

    Abstract: A MEMS resonator (10) is equipped with a substrate (13); a moving structure (12) suspended above the substrate in a horizontal plane (xy) formed by a first (x) and a second (y) axis, having a first (12a) and a second (12b) arm, parallel to one another and extending along the second axis, coupled at their respective ends by a first (14a) and a second (14b) transverse joining element, forming an internal window (15); a first electrode structure (20), positioned outside the window, capacitively coupled to the moving structure; a second electrode structure (21), positioned inside the window, one of the first and second electrode structures causing an oscillatory movement of the flexing arms in opposite directions along the first horizontal axis at a resonance frequency, and the other of the first and second electrode structures having a function of detecting the oscillation; a suspension structure (16) having a suspension arm (17) in the window; and an attachment arrangement (18), coupled to the suspension element centrally in the window, near the second electrode structure.

    MEMS DEVICE HAVING IMPROVED DETECTION PERFORMANCES
    6.
    发明公开
    MEMS DEVICE HAVING IMPROVED DETECTION PERFORMANCES 审中-公开

    公开(公告)号：EP4365603A1

    公开(公告)日：2024-05-08

    申请号：EP23204864.5

    申请日：2023-10-20

    Applicant: STMicroelectronics S.r.l.

    Inventor： RIANI, Manuel ,  GATTERE, Gabriele ,  RIZZINI, Francesco

    IPC: G01P15/125 ,  G01P15/097 ,  G01P15/08

    CPC classification number: G01P15/125 ,  G01P2015/081420130101 ,  G01P2015/087120130101 ,  G01P2015/085720130101

    Abstract: The MEMS device (20) is formed by a substrate (21) and a movable structure (22) suspended on the substrate. The movable structure has a first mass (28), a second mass (29A) and a first elastic group (30A) mechanically coupled between the first and the second masses. The first elastic group is compliant along a first direction (Y). The first mass is configured to move with respect to the substrate along the first direction. The MEMS device also has a second elastic group (23) mechanically coupled between the substrate and the movable structure and compliant along the first direction; and an anchoring control structure (33A, 40A) fixed to the substrate, capacitively coupled to the second mass and configured to exert an electrostatic force on the second mass along the first direction. The anchoring control structure controls the MEMS device in a first operating state, wherein the second mass is free to move with respect to the substrate along the first direction, and in a second operating state, wherein the anchoring control structure applies a pull-in force on the second mass which anchors the second mass to the anchoring control structure.

    LONG STROKE MEMS ACTUATOR RESILIENT TO THE PULL-IN AND ELECTRONIC SYSTEM INCLUDING THE SAME
    7.
    发明公开
    LONG STROKE MEMS ACTUATOR RESILIENT TO THE PULL-IN AND ELECTRONIC SYSTEM INCLUDING THE SAME 审中-公开

    公开(公告)号：EP4223691A1

    公开(公告)日：2023-08-09

    申请号：EP23153332.4

    申请日：2023-01-25

    Applicant: STMicroelectronics S.r.l.

    Inventor： OPRENI, Andrea ,  ZEGA, Valentina ,  FRANGI, Attilio ,  GATTERE, Gabriele ,  RIANI, Manuel

    IPC: B81B3/00

    Abstract: MEMS actuator (20) including: a substrate (21); a first and a second semiconductive layer (31,32); a frame (27) including transverse regions (62) formed by the second semiconductive layer (32), elongated parallel to a first direction (X) and offset along a second direction (Y), the frame (27) being movable parallel to the second direction (Y). The MEMS actuator (20) includes, for each transverse region (62): corresponding front rotor regions (65), which are fixed to the transverse region (62) and are suspended above the substrate (21); a first and a second stator region (70,72), which are formed by the first semiconductive layer (31) in such a way that, when the frame (27) is in rest position, the transverse region (62) is laterally offset with respect to the first and the second stator regions (70,72) and a first front rotor region (65') partially faces the first stator region (70), and in such a way that, during a translation of the frame (27) along the second direction (Y), the first and/or a second front rotor region (65', 65") at least partially face the second stator region (72), when the transverse region (62) begins to superimpose on the first stator region (70).

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