公开(公告)号：EP3907178A1

公开(公告)日：2021-11-10

申请号：EP21171642.8

申请日：2021-04-30

Applicant: STMicroelectronics S.r.l.

Inventor： GIUSTI, Domenico ,  PRELINI, Carlo Luigi ,  FERRERA, Marco ,  LAZZARI, Carla Maria ,  SEGHIZZI, Luca ,  BONI, Nicolò ,  CARMINATI, Roberto ,  QUAGLIA, Fabio

IPC: B81B7/00

Abstract: The MEMS actuator (150) is formed by a substrate (50'), which surrounds a cavity (100); by a deformable structure (105) suspended on the cavity; by an actuation structure (65) formed by a first piezoelectric region (61) of a first piezoelectric material, supported by the deformable structure and configured to cause a deformation of the deformable structure; and by a detection structure (90) formed by a second piezoelectric region (80) of a second piezoelectric material, supported by the deformable structure and configured to detect the deformation of the deformable structure.

公开(公告)号：EP4148016A1

公开(公告)日：2023-03-15

申请号：EP22192423.6

申请日：2022-08-26

Applicant: STMicroelectronics S.r.l.

Inventor： GIUSTI, Domenico ,  LAZZARI, Carla Maria

IPC: B81B3/00

Abstract: MEMS actuator (10) comprising: a semiconductor body (12) with a first surface (12a), defining a housing cavity (22) facing the first surface (12a) and having a bottom surface (22a), the semiconductor body (12) further defining a fluidic channel (25) in the semiconductor body (12) with a first end (25') across the bottom surface (22a); and a strainable structure (20) which extends into the housing cavity (22), is coupled to the semiconductor body (12) at the bottom surface (22a), and defines an internal space (24) facing the first end (25') of the fluidic channel (25) and comprising at least a first and a second internal subspace (26', 26") connected to each other and to the fluidic channel (25). When a fluid is pumped through the fluidic channel (25) into the internal space (24), the first and second internal subspaces (26', 26") expand straining the strainable structure (20) along the first axis (Z) and generating an actuation force (F att ) exerted by the strainable structure (20) along the first axis (Z), in the opposite direction with respect to the housing cavity (22).

公开(公告)号：EP3742506A1

公开(公告)日：2020-11-25

申请号：EP20176147.5

申请日：2020-05-22

Applicant: STMicroelectronics S.r.l.

Inventor： ASSANELLI, Davide ,  MARTINI, Irene ,  VINCIGUERRA, Lorenzo ,  LAZZARI, Carla Maria ,  FERRARINI, Paolo

IPC: H01L41/29 ,  H01L41/23 ,  H01L41/047 ,  H01L41/053 ,  B41J2/14

Abstract: A method for manufacturing a piezoelectric transducer (100) is disclosed, which comprises forming a bottom electrode (34, 40) on a semiconductor body (32), forming a piezoelectric element (36) on the bottom electrode, forming a protective layer (42) having a first opening (44) through which a portion of the piezoelectric element is exposed and a second opening (45) through which a portion of the bottom electrode is exposed, forming a conductive layer on the protective layer and within the first and second openings, and patterning the conductive layer to contextually form a top electrode (48) in electrical contact with the piezoelectric element at the first opening, a first biasing stripe (51) in electrical contact with the top electrode, and a second biasing stripe (52) in electrical contact with the bottom electrode at the second opening. A passivation layer (56) and metal contacts (61, 62) may be formed thereafter.