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    MICROMECHANICAL DEVICE WITH ELASTIC ASSEMBLY HAVING VARIABLE ELASTIC CONSTANT
    1.
    发明公开
    MICROMECHANICAL DEVICE WITH ELASTIC ASSEMBLY HAVING VARIABLE ELASTIC CONSTANT 审中-公开

    公开(公告)号：EP3839520A1

    公开(公告)日：2021-06-23

    申请号：EP20212118.2

    申请日：2020-12-07

    Applicant: STMicroelectronics S.r.l.

    Inventor： DARMANIN, Jean Marie ,  VALZASINA, Carlo ,  TOCCHIO, Alessandro ,  GATTERE, Gabriele

    IPC: G01P15/125 ,  B81B3/00 ,  B81B5/00 ,  G01L1/14 ,  G01P15/08

    Abstract: A micromechanical device (50) comprising: a semiconductor body (51); a first mobile structure (53; 253); an elastic assembly (57, 59; 259), coupled to the first mobile structure and to the semiconductor body (51) and adapted to undergo deformation in a direction (X) ; and at least one abutment element (66b; 66a). The elastic assembly (57, 59; 259) is configured to enable an oscillation of the first mobile structure (53; 253) as a function of a force applied thereto. The first mobile structure (53; 253), the abutment element (66b; 66a) and the elastic assembly (57, 59; 259) are arranged with respect to one another in such a way that: when said force is lower than a force threshold, the elastic assembly (57, 59; 259) operates with a first elastic constant (K 1 ; K 4 ); and when said force is greater than the threshold force, then the first mobile structure is in contact with the abutment element, and a deformation of the elastic assembly is generated, which operates with a second elastic constant (K 1 + K 2 ; K 5 ) different from the first elastic constant.
    Main figure: Figure 2

    MEMS TRIAXIAL MAGNETIC SENSOR WITH IMPROVED CONFIGURATION
    3.
    发明公开
    MEMS TRIAXIAL MAGNETIC SENSOR WITH IMPROVED CONFIGURATION 审中-公开

    公开(公告)号：EP3346281A1

    公开(公告)日：2018-07-11

    申请号：EP17172105.3

    申请日：2017-05-20

    Applicant: STMicroelectronics S.r.l.

    Inventor： LAGHI, Giacomo ,  LANGFELDER, Giacomo ,  GATTERE, Gabriele ,  TOCCHIO, Alessandro ,  PACI, Dario

    IPC: G01R33/00

    CPC classification number: G01R33/0206 ,  G01R33/0023 ,  G01R33/0286 ,  G01R33/038

    Abstract: A MEMS triaxial magnetic sensor device (51) is provided with a sensing structure (2) having: a substrate (6); an outer frame (4), which internally defines a window (5) and is elastically coupled to first anchorages (7) fixed with respect to the substrate by means of first elastic elements (8); a mobile structure (10) arranged in the window, suspended above the substrate, which is elastically coupled to the outer frame by second elastic elements (12) and carries a conductive path (P) for flow of an electric current (I); and an elastic arrangement (22, 24) operatively coupled to the mobile structure. The mobile structure performs, due to the first and second elastic elements and of the arrangement of elastic elements, a first sensing movement in response to Lorentz forces originating from a first magnetic-field component (B x ), a second sensing movement in response to Lorentz forces originating from a second magnetic-field component (B y ), and a third sensing movement in response to Lorentz forces originating from a third magnetic-field component (B z ); the first, second, and third sensing movements are distinct and decoupled from one another.

    MEMS TRI-AXIAL ACCELEROMETER WITH IMPROVED CONFIGURATION
    6.
    发明公开
    MEMS TRI-AXIAL ACCELEROMETER WITH IMPROVED CONFIGURATION 审中-公开
    具有改进配置的MEMS三轴加速度计

    公开(公告)号：EP3318882A1

    公开(公告)日：2018-05-09

    申请号：EP17177420.1

    申请日：2017-06-22

    Applicant: STMicroelectronics S.r.l.

    Inventor： TOCCHIO, Alessandro ,  RIZZINI, Francesco

    IPC: G01P15/125 ,  G01P15/18

    CPC classification number: G01P15/18 ,  G01P15/097 ,  G01P15/125 ,  G01P2015/0845 ,  G01P2015/0848

    Abstract: A MEMS tri-axial accelerometer (32) is provided with a sensing structure (1) having: a single inertial mass (2), with a main extension in a horizontal plane (xy) defined by a first horizontal axis (x) and a second horizontal axis (y) and internally defining a first window (4) that traverses it throughout a thickness thereof along a vertical axis (z) orthogonal to the horizontal plane (xy); and a suspension structure (29), arranged within the window for elastically coupling the inertial mass to a single anchorage element (8), which is fixed with respect to a substrate and arranged within the window, so that the inertial mass (2) is suspended above the substrate and is able to carry out, by the inertial effect, a first sensing movement, a second sensing movement, and a third sensing movement in respective sensing directions parallel to the first, second, and third horizontal axes following upon detection of a respective acceleration component (a x ). In particular, the suspension structure has at least one first decoupling element (6) for decoupling at least one of the first, second, and third sensing movements from the remaining sensing movements.

    Abstract translation: MEMS三轴加速度计（32）设置有感测结构（1），该感测结构具有：单个惯性质量块（2），其具有在由第一水平轴（x）限定的水平面（xy）中的主延伸部和 第二水平轴线（y）并且在内部限定第一窗口（4），所述第一窗口沿着垂直于所述水平面（xy）的垂直轴线（z）遍及其整个厚度穿过所述第一窗口; 和悬挂结构（29），布置在窗内用于将惯性质量块弹性地耦合到相对于基板固定并布置在窗内的单个锚固元件（8），从而惯性质量块（2）是 悬挂在衬底上方并且能够通过惯性效应在与第一，第二和第三水平轴平行的相应感测方向上执行第一感测运动，第二感测运动和第三感测运动， 相应的加速度分量（ax）。 特别地，悬架结构具有至少一个第一解耦元件（6），用于将第一，第二和第三感测运动中的至少一个与剩余的感测运动解耦。

    A MEMS ACCELEROMETER HAVING HIGH ACCURACY AND LOW SENSITIVITY TO TEMPERATURE AND AGEING
    7.
    发明公开
    A MEMS ACCELEROMETER HAVING HIGH ACCURACY AND LOW SENSITIVITY TO TEMPERATURE AND AGEING 审中-公开
    具有高精度和低灵敏度的温度和时效的MEMS加速度计

    公开(公告)号：EP3226007A1

    公开(公告)日：2017-10-04

    申请号：EP16194689.2

    申请日：2016-10-19

    Applicant: STMicroelectronics S.r.l.

    Inventor： TOCCHIO, Alessandro ,  GATTERE, Gabriele

    IPC: G01P15/125 ,  G01P15/08

    CPC classification number: G01P15/125 ,  B81B3/0021 ,  B81B2201/0235 ,  B81B2203/0181 ,  B81B2203/04 ,  G01P2015/0814 ,  G01P2015/0831

    Abstract: A MEMS accelerometer, including: a support structure (3); a suspended region (2; 62; 92) made of semiconductor material, mobile with respect to the support structure; at least one modulation electrode (20; 68; 114), which is fixed to the support structure and is biased with an electrical modulation signal including at least one periodic component having a first frequency; at least one variable capacitor (30; 80; 130), formed by the suspended region and by the modulation electrode, in such a way that the suspended region is subjected to an electrostatic force that depends upon the electrical modulation signal; and a sensing assembly (12, 14, 16, 18, 5a; 12, 14, 16, 18, 65a; 102, 104, 95a), which generates, when the accelerometer is subjected to an acceleration, an electrical sensing signal, which indicates the position of the suspended region with respect to the support structure and includes a frequency-modulated component, which is a function of the acceleration and of the first frequency.

    Abstract translation: 一种MEMS加速度计，包括：支撑结构（3）; 由半导体材料制成的悬置区域（2; 62; 92），所述悬置区域相对于所述支撑结构可移动; 至少一个调制电极（20; 68; 114），所述调制电极固定到所述支撑结构并且利用包括具有第一频率的至少一个周期性分量的电调制信号进行偏置; 至少一个由所述悬置区域和所述调制电极形成的可变电容器（30; 80; 130），使得所述悬置区域经受取决于所述电调制信号的静电力; 和感测组件（12,14,16,18,5a; 12,14,16,18,65a; 102,104,95a），当所述加速度计受到加速度时，所述感测组件产生电感测信号，所述电感测信号 指示悬置区域相对于支撑结构的位置并且包括作为加速度和第一频率的函数的频率调制分量。

    A MEMS ACCELEROMETRIC SENSOR HAVING HIGH ACCURACY AND LOW SENSITIVITY TO TEMPERATURE AND AGEING
    8.
    发明公开
    A MEMS ACCELEROMETRIC SENSOR HAVING HIGH ACCURACY AND LOW SENSITIVITY TO TEMPERATURE AND AGEING 审中-公开

    公开(公告)号：EP3524984A1

    公开(公告)日：2019-08-14

    申请号：EP19160151.7

    申请日：2016-10-19

    Applicant: STMicroelectronics S.r.l.

    Inventor： TOCCHIO, Alessandro ,  GATTERE, Gabriele

    IPC: G01P15/125 ,  G01P15/08

    Abstract: An out-of-plane MEMS accelerometric sensor, including: a supporting structure (3); a suspended region (92) of semiconductor material, mobile with respect to the supporting structure; at least one first modulation electrode (114), which is fixed to the supporting structure and is biased, in use, with an electrical modulation signal including at least one periodic component having a first frequency; and at least one first variable capacitor (130), formed by the suspended region and by the first modulation electrode, in such a way that the suspended region is subjected to a first electrostatic force that depends upon the electrical modulation signal. The accelerometric sensor further includes a sensing assembly (102, 104, 95a) which generates, when the accelerometric sensor is subjected to an acceleration, an electrical sensing signal, which indicates the position of the suspended region with respect to the supporting structure and includes a frequency-modulated component, which is a function of the acceleration and of the first frequency. The suspended region overlies the first modulation electrode and is anchored to the supporting structure by means of elastic suspension elements (98, 99), which enable rotation of the suspended region about an axis of rotation, which is parallel to a surface of main extension of the suspended region.

    FM INERTIAL SENSOR AND METHOD FOR OPERATING THE FM INERTIAL SENSOR
    9.
    发明公开
    FM INERTIAL SENSOR AND METHOD FOR OPERATING THE FM INERTIAL SENSOR 审中-公开

    公开(公告)号：EP3450992A1

    公开(公告)日：2019-03-06

    申请号：EP18188857.9

    申请日：2018-08-14

    Applicant: STMicroelectronics S.r.l.

    Inventor： TOCCHIO, Alessandro ,  RIZZINI, Francesco ,  VALZASINA, Carlo ,  LANGFELDER, Giacomo ,  MARRA, Cristiano Rocco

    IPC: G01P15/097 ,  G01P15/18

    Abstract: An inertial sensor (1) for sensing an external acceleration, comprising: a first and a second proof mass (6, 8); a first and a second capacitor formed between first and second fixed electrodes and the first proof mass; a third and a fourth capacitor formed between third and fourth fixed electrodes and the second proof mass; a driving assembly (14a, 14b, 18a, 18b) configured to cause an antiphase oscillation of the first and second proof masses; a biasing circuit (49, 51) configured to bias the first and third capacitors, thus generating first variation of the oscillation frequency in a first time interval, and to bias the second and fourth capacitors, thus generating first variation of the oscillation frequency in a second time interval; a sensing assembly (16a, 16b, 20a, 20b, 40), configured to generate an differential output signal which is a function of a difference between a value of the oscillating frequency during the first time interval and a value of the oscillating frequency during the second time interval. Such differential output signal can be correlated to the value and direction of the external acceleration.

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