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1.发明公开METHOD OF CONTROLLING ELECTRON BEAM FOCUSING OF PIERCE TYPE ELECTRON GUN AND CONTROL DEVICE THEREFOR 有权一种用于控制电子皮尔斯电子枪和对焦控制装置THEREFOR
公开(公告)号：EP2077574A4
公开(公告)日：2014-04-30
申请号：EP07830086
申请日：2007-10-18
Applicant: ULVAC INC
Inventor： IIJIMA EIICHI , SHEN GUO HUA , SATAKE TOHRU
IPC: H01J37/06 , H01J3/02 , H01J37/04 , H01J37/07 , H01J37/304
CPC classification number: H01J37/07 , H01J3/026 , H01J37/06 , H01J37/304 , H01J2237/004 , H01J2237/182
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