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    ARC CONTROLLER OF CATHODE ARC COATER
    1.
    发明专利
    ARC CONTROLLER OF CATHODE ARC COATER 失效

    公开(公告)号：JPH11140631A

    公开(公告)日：1999-05-25

    申请号：JP24546198

    申请日：1998-08-31

    Applicant: UNITED TECHNOLOGIES CORP

    Inventor： BEERS RUSSELL A ,  ROYAL TYRUS E

    IPC: C23C14/24 ,  H01J37/32

    Abstract: PROBLEM TO BE SOLVED: To provide a cathode arc vapor deposition device good in the cost effectiveness and capable of executing uniform coating with high quality on a substrate. SOLUTION: A device 10 for coating the surface of a substrate 12 with a material by a cathode arc vapor deposition method has a vessel 14, a device for keeping this vessel vacuum, a disk-shaped cathode 18, a means 22 for selectively maintaining the electric energy of an arc between the cathode 18 and an anode 24 and a means for moving the arc to the cathode. The electric energy of the arc stretching between the cathode 18 and the anode 24 evaporates the cathode part to be continuously deposited on a substrate arranged on the inside of the vessel.

    CATHODE ARC VAPOR DEPOSITION DEVICE
    2.
    发明专利
    CATHODE ARC VAPOR DEPOSITION DEVICE 失效

    公开(公告)号：JPH11140629A

    公开(公告)日：1999-05-25

    申请号：JP24545898

    申请日：1998-08-31

    Applicant: UNITED TECHNOLOGIES CORP

    Inventor： BEERS RUSSELL A ,  HENDRICKS ROBERT E ,  MARSZAL DEAN N ,  NOETZEL ALLAN A ,  WRIGHT ROBERT J ,  ROYAL TYRUS E

    IPC: C23C14/24 ,  H01J37/32

    Abstract: PROBLEM TO BE SOLVED: To provide a cathode vapor deposition device good in the cost effectiveness and capable of executing uniform coating with high quality on a substrate. SOLUTION: A device 10 for coating the surface of a substrate 12 with a material by a cathode arc vapor deposition method has a vessel 14, a device 16 for keeping this vessel vacuum, a cathode 18, a contactor 20, a means 24 for selectively maintaining the electric energy of an arc between the cathode 18 and an anode 26 and an actuator 22. The cathode 18 and the contactor 20 are arranged on the inside of the vessel, and the contactor 20 is electrically connected to the means 24 for selectively keeping the electric energy of the arc. The actuator 22 electrically connects the contactor 20 to the cathode 18 selectively and connects the cathode 18 to the means 24 for keeping the electric energy of the arc.

    5.
    发明专利
    未知

    公开(公告)号：DE69840142D1

    公开(公告)日：2008-12-04

    申请号：DE69840142

    申请日：1998-08-28

    Applicant: UNITED TECHNOLOGIES CORP

    Inventor： BEERS RUSSELL A ,  HENDRICKS ROBERT E ,  MARSZAL DEAN N ,  WRIGHT ROBERT J ,  NOETZEL ALLAN A ,  ROYAL TYRUS E

    IPC: C23C14/24 ,  H01J37/32

    Abstract: An apparatus (10) for applying material by cathodic arc deposition to a substrate (12) is provided which includes a vessel (14), means (16) for maintaining a vacuum in the vessel, a cathode (18), a contactor (20), means (24) for selectively sustaining an arc of electrical energy between the cathode and an anode (26), and an actuator (22). The cathode and contactor are positioned inside the vessel, and the contactor is electrically connected to the means for selectively sustaining an arc of electrical energy. The actuator selectively actuates the contactor into electrical contact with the cathode, and thereby electrically connects the cathode to the means for sustaining an arc of electrical energy.

    Apparatus for steering the arc in a cathodic arc coater
    8.
    发明专利
    Apparatus for steering the arc in a cathodic arc coater 未知

    公开(公告)号：SG67547A1

    公开(公告)日：1999-09-21

    申请号：SG1998003318

    申请日：1998-08-27

    Applicant: UNITED TECHNOLOGIES CORP

    Inventor： BEERS RUSSELL A ,  ROYAL TYRUS E

    IPC: C23C14/24 ,  H01J37/32 ,  C23C14/32

    Abstract: An apparatus for applying material by cathodic arc vapor deposition to a substrate is provided which includes a vessel, a disk-shaped cathode, a platter for supporting the substrate, apparatus for maintaining a vacuum in the vessel, and apparatus for selectively sustaining an arc of electrical energy between the cathode and an anode. The disk-shaped cathode has a first end surface, a second end surface, and an evaporative surface extending between the first and second end surfaces, and the cathode is mounted on a pedestal positioned inside the vessel. The platter has a slot for receiving the pedestal, thereby enabling the platter to be movable into and out of the vessel.

    Cathodic arc vapor deposition apparatus
    10.
    发明专利
    Cathodic arc vapor deposition apparatus 未知

    公开(公告)号：SG67546A1

    公开(公告)日：1999-09-21

    申请号：SG1998003308

    申请日：1998-08-27

    Applicant: UNITED TECHNOLOGIES CORP

    Inventor： BEERS RUSSELL A ,  HENDRICKS ROBERT E ,  MARSZAL DEAN N ,  NOETZEL ALLAN A ,  WRIGHT ROBERT J ,  ROYAL TYRUS E

    IPC: C23C14/24 ,  H01J37/32 ,  C23C14/32

    Abstract: An apparatus (10) for applying material by cathodic arc deposition to a substrate (12) is provided which includes a vessel (14), means (16) for maintaining a vacuum in the vessel, a cathode (18), a contactor (20), means (24) for selectively sustaining an arc of electrical energy between the cathode and an anode (26), and an actuator (22). The cathode and contactor are positioned inside the vessel, and the contactor is electrically connected to the means for selectively sustaining an arc of electrical energy. The actuator selectively actuates the contactor into electrical contact with the cathode, and thereby electrically connects the cathode to the means for sustaining an arc of electrical energy.

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