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    Forming a cantilever assembly for vertical and lateral movement
    5.
    发明授权
    Forming a cantilever assembly for vertical and lateral movement 有权
    形成垂直和横向运动的悬臂组件

    公开(公告)号：US07687297B2

    公开(公告)日：2010-03-30

    申请号：US11824465

    申请日：2007-06-29

    Applicant: John Heck ,  Tsung-Kuan Allen Chou

    Inventor： John Heck ,  Tsung-Kuan Allen Chou

    IPC: H01L21/00

    CPC classification number: B81C1/00246 ,  B81B2201/07 ,  B81B2201/11 ,  B81B2201/12 ,  B81B2203/0118 ,  B81C2203/0735 ,  B82Y10/00 ,  G11B9/1436

    Abstract: In one embodiment, the present invention includes a method for forming a sacrificial oxide layer on a base layer of a microelectromechanical systems (MEMS) probe, patterning the sacrificial oxide layer to provide a first trench pattern having a substantially rectangular form and a second trench pattern having a substantially rectangular portion and a lateral portion extending from the substantially rectangular portion, and depositing a conductive layer on the patterned sacrificial oxide layer to fill the first and second trench patterns to form a support structure for the MEMS probe and a cantilever portion of the MEMS probe. Other embodiments are described and claimed.

    Abstract translation: 在一个实施例中，本发明包括在微机电系统（MEMS）探针的基底层上形成牺牲氧化物层的方法，图案化牺牲氧化物层以提供具有基本矩形形状的第一沟槽图案和第二沟槽图案 具有基本上矩形的部分和从所述大致矩形部分延伸的横向部分，以及在所述图案化的牺牲氧化物层上沉积导电层以填充所述第一和第二沟槽图案以形成用于所述MEMS探针的支撑结构， MEMS探针。 描述和要求保护其他实施例。

    ABLÖSBARE MIKRO- UND NANOBAUTEILE FÜR PLATZSPARENDEN EINSATZ
    6.
    发明公开
    ABLÖSBARE MIKRO- UND NANOBAUTEILE FÜR PLATZSPARENDEN EINSATZ 审中-公开
    移动微纳米组件节省空间的应用

    公开(公告)号：EP2678265A2

    公开(公告)日：2014-01-01

    申请号：EP12710454.5

    申请日：2012-02-24

    Applicant: Harting KGAA

    Inventor： GATZEN, Hans-Heinrich ,  GRIESBACH, Tim

    IPC: B81B3/00

    CPC classification number: H05K1/0271 ,  B81B3/0072 ,  B81B2201/11 ,  B81C2201/0167 ,  H05K3/303 ,  Y10T29/49133

    Abstract: The invention relates to space-saving micro- and nano-components and to methods for producing same. The components are characterized in that they do not comprise a rigid substrate having a considerable thickness. The mechanical stresses, which result in deformations and/or warpage within a component, are compensated by means of a mechanically stress-compensated design and/or by means of active mechanical stress compensation by depositing suitable stress compensation layers such that there is no need for relatively thick substrates. Thus, the overall thickness of the components is decreased and the integration options thereof in technical systems are improved. In addition, the field of application of such components is expanded.

    Actuator using comb-tooth
    7.
    发明授权
    Actuator using comb-tooth 失效
    执行器使用梳齿

    公开(公告)号：US07982361B2

    公开(公告)日：2011-07-19

    申请号：US12295027

    申请日：2007-03-30

    Applicant: Takanori Maeda ,  Hirokazu Takahashi ,  Masahiro Ishimori

    Inventor： Takanori Maeda ,  Hirokazu Takahashi ,  Masahiro Ishimori

    IPC: H02N1/00

    CPC classification number: H02N1/008 ,  B81B3/0037 ,  B81B2201/033 ,  B81B2201/034 ,  B81B2201/11 ,  B81B2203/051 ,  B82Y10/00 ,  G11B9/1454

    Abstract: An actuator comprises a connection section having one end rotatably connected to a connection point (C1) of a fixed section and the other end rotatably connected to a connection point (C2) of a moving section, a connection section having one end rotatably connected to a connection point (C3) of the fixed section and the other end rotatably connected to a connection point (C4) of the moving sections a comb-teeth electrode having the root section connected to a comb-teeth base point (B1) and the fore-end section extending along the turning path, and a comb-teeth electrode having the root section connected to the fixed section and the other section extending along the curve of the comb-teeth electrode and opposed to the comb-teeth electrode with a predetermined gap.

    Abstract translation: 致动器包括连接部分，其一端可旋转地连接到固定部分的连接点（C1），另一端可旋转地连接到移动部分的连接点（C2），连接部分的一端可旋转地连接到 所述固定部分的连接点（C3）和另一端可旋转地连接到所述移动部分的连接点（C4），所述梳齿电极具有连接到梳齿基点（B1）的根部部分， 所述梳齿电极具有连接到所述固定部分的所述根部部分，而所述另一部分沿着所述梳齿电极的曲线延伸并且与所述梳齿电极以预定间隙相对。

    Mass-balanced actuating mechanism for a micro scanning device
    8.
    发明授权
    Mass-balanced actuating mechanism for a micro scanning device 失效
    用于微扫描装置的质量平衡致动机构

    公开(公告)号：US07440155B1

    公开(公告)日：2008-10-21

    申请号：US11955542

    申请日：2007-12-13

    Applicant: Mark A. Lantz ,  Hugo E. Rothuizen

    Inventor： Mark A. Lantz ,  Hugo E. Rothuizen

    IPC: G02B26/08 ,  H02K5/00

    CPC classification number: G02B26/101 ,  B81B3/0078 ,  B81B2201/11 ,  B81B2203/055 ,  B82Y10/00 ,  G11B9/1409 ,  H02K33/18 ,  H02K2201/18 ,  Y10S359/90

    Abstract: An actuating mechanism includes a scanner chip having a scan table mounting cavity, and a bracket moveably positioned in the scan table mounting cavity. A scan table is moveably positioned in the bracket. The bracket has a first mass and the scan table has a second mass. A first coil and frame collectively define a third mass and a second coil and frame collectively define a fourth mass. A first pivoting element is connected to the first coil and the scan table. The first pivoting element is pivotally supported about a first pivot point and connected though an asymmetrical leverage connection to the first coil and the scan table. A second pivoting element is connected to the second coil and the scan table. The second pivoting element is pivotally supported about a second pivot point and connected through a symmetric leverage connection to the second coil and the scan table.

    Abstract translation: 致动机构包括具有扫描台安装腔的扫描器芯片和可移动地定位在扫描台安装腔中的托架。 扫描台可移动地定位在支架中。 支架具有第一质量，扫描台具有第二质量。 第一线圈和框架共同限定第三质量，第二线圈和框架共同限定第四质量。 第一枢转元件连接到第一线圈和扫描台。 第一枢转元件围绕第一枢转点枢转地支撑并且通过不对称杠杆连接连接到第一线圈和扫描台。 第二枢转元件连接到第二线圈和扫描台。 第二枢转元件围绕第二枢转点枢转地支撑并且通过对称的杠杆连接连接到第二线圈和扫描台。

    Method of fabricating micro actuator having media stage
    9.
    发明申请
    Method of fabricating micro actuator having media stage 失效
    具有介质载物台的微型致动器的制造方法

    公开(公告)号：US20070137780A1

    公开(公告)日：2007-06-21

    申请号：US11595876

    申请日：2006-11-13

    Applicant: Hong-sik Park ,  Seung-bum Hong ,  Jong-youp Shim

    Inventor： Hong-sik Park ,  Seung-bum Hong ,  Jong-youp Shim

    IPC: B32B37/00

    CPC classification number: H02K41/0354 ,  B81B3/0062 ,  B81B2201/038 ,  B81B2201/11 ,  B81B2203/051 ,  B82Y10/00 ,  G11B9/1436 ,  H02K2201/18

    Abstract: A method of fabricating a micro actuator is provided including a media stage having a media loading surface and a coil for driving the media stage, formed on the opposite surface of the media stage to the media loading surface. The method includes forming a groove on a first surface of a first substrate, forming a coil on a first surface of a second substrate, bonding the first surface of the first substrate to the first surface of the second substrate, and forming the media loading surface on a second surface of the second substrate, which is opposite the first surface of the second substrate.

    Abstract translation: 提供了一种制造微型致动器的方法，包括：介质台，其具有介质装载表面和用于驱动介质载物台的线圈，其形成在介质载台的相对表面上至介质装载表面。 该方法包括在第一基板的第一表面上形成凹槽，在第二基板的第一表面上形成线圈，将第一基板的第一表面接合到第二基板的第一表面，并且形成介质装载表面 在第二基板的与第二基板的第一表面相对的第二表面上。

    Forming an actuating mechanism for a micro-scanning device
    10.
    发明授权
    Forming an actuating mechanism for a micro-scanning device 失效
    形成微扫描装置的致动机构

    公开(公告)号：US07532376B1

    公开(公告)日：2009-05-12

    申请号：US12194259

    申请日：2008-08-19

    Applicant: Mark A. Lantz ,  Hugo E. Rothuizen

    Inventor： Mark A. Lantz ,  Hugo E. Rothuizen

    IPC: G02B26/08 ,  H02K5/00

    CPC classification number: G02B26/101 ,  B81B3/0078 ,  B81B2201/11 ,  B81B2203/055 ,  B82Y10/00 ,  G11B9/1409 ,  H02K33/18 ,  H02K2201/18 ,  Y10S359/90

    Abstract: Forming an actuating mechanism for a micro-scanning device includes forming a scanner chip having a scan table mounting cavity, first and second coil mounting cavities and first and second pivoting element mounting cavities, positioning a bracket in the scan table mounting cavity, and positioning a scan table in the bracket. A first frame is mounted in the first coil mounting cavity, and a second frame is mounted in the second coil mounting cavity. A first pivoting element is positioned in the first pivoting element mounting cavity. The first pivoting element includes an asymmetrical leverage connection to the first coil and the scan table. In addition, a second pivoting element is connected to the second coil and the scan table, and positioned in the second pivoting element mounting cavity. The second pivoting element includes a symmetric leverage connection or an asymmetric leverage connection to the second coil and the scan table.

    Abstract translation: 形成用于微扫描装置的致动机构包括形成具有扫描台安装腔的扫描器芯片，第一和第二线圈安装腔以及第一和第二枢转元件安装空腔，将支架定位在扫描台安装腔中，并将 扫描表中的括号。 第一框架安装在第一线圈安装腔中，第二框架安装在第二线圈安装腔中。 第一枢转元件定位在第一枢转元件安装腔中。 第一枢转元件包括与第一线圈和扫描台不对称的杠杆连接。 此外，第二枢转元件连接到第二线圈和扫描台，并且定位在第二枢转元件安装腔中。 第二枢转元件包括对称杠杆连接或者与第二线圈和扫描台的不对称杠杆连接。

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