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91.
公开(公告)号:JP2012017211A
公开(公告)日:2012-01-26
申请号:JP2011196224
申请日:2011-09-08
Applicant: Masayuki Tsuda , Watanabe Shoko:Kk , 株式会社渡辺商行 , 昌之 都田
Inventor: TSUDA MASAYUKI , UMEDA MASARU
IPC: B65G51/03 , B65G49/06 , H01L21/677
Abstract: PROBLEM TO BE SOLVED: To provide a floating carrying device capable of making an adjusting when a carrying object is dislocated from the carrying passage center.SOLUTION: For attaining the purpose, this floating carrying device includes a carrying passage for forming a carrying passage of the carrying object, a plurality of injection nozzles for floating and carrying the carrying object along the carrying passage, one or more of detecting parts for detecting the carrying direction of the carrying object in the carrying passage, and a control part for independently controlling the plurality of injection nozzles based on a detecting result of the detecting parts. A body of the nozzles can rotate in a horizontal plane by a driving motor unit, and thereby the injection direction of pressure gas injected from the nozzles can be adjusted.
Abstract translation: 要解决的问题:提供一种当携带物体从承载通道中心脱位时能够进行调节的浮动搬运装置。 解决方案:为了达到此目的,这种浮动运送装置包括一个用于形成承载物体的运送通道的运送通道,用于沿运送通道浮动和运送运送物体的多个喷嘴,一个或多个检测 用于检测携带物体在运送通道中的运送方向的部件,以及用于根据检测部件的检测结果独立地控制多个喷嘴的控制部件。 喷嘴体可以通过驱动马达单元在水平面上旋转,从而可以调节从喷嘴喷射的压力气体的喷射方向。 版权所有(C)2012,JPO&INPIT
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公开(公告)号:JP4406178B2
公开(公告)日:2010-01-27
申请号:JP2001203688
申请日:2001-07-04
IPC: C23C16/38 , H01L21/318 , C23C16/36 , C23C16/452 , C23C16/509 , H01L21/31 , H01L21/314 , H01L21/768 , H01L23/522
CPC classification number: H01L21/318 , C23C16/36 , C23C16/452 , C23C16/509
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公开(公告)号:JP4391413B2
公开(公告)日:2009-12-24
申请号:JP2004508397
申请日:2003-05-29
IPC: H01L21/31 , C23C16/40 , C23C16/448 , H01L21/00
CPC classification number: C23C16/40 , C23C16/4481 , C23C16/4486 , H01L21/6708
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97.
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公开(公告)号:JP2008290816A
公开(公告)日:2008-12-04
申请号:JP2007135982
申请日:2007-05-22
Applicant: Watanabe Shoko:Kk , 株式会社渡辺商行
Inventor: UEHARA AKIRA , TSUDA MASAYUKI , UMEDA MASARU
IPC: B65G51/03
CPC classification number: B65G51/03 , B65G2201/022
Abstract: PROBLEM TO BE SOLVED: To provide a floating conveying device capable of reducing the weight of a device body and ensuring the strength thereof.
SOLUTION: A plate workpiece to be conveyed is conveyed in the predetermined direction in a floating state with compressed gas jetted from each fore end of each nozzle 22d formed on a plurality of nozzle members 22 arranged on a device body, and each nozzle member 22 opposite to a top plate 31 in a honeycomb shape is constituted of a columnar body turnable in the horizontal plane.
COPYRIGHT: (C)2009,JPO&INPITAbstract translation: 要解决的问题:提供一种能够减轻装置本体的重量并确保其强度的浮动输送装置。 解决方案:在浮动状态下,将被输送的板状工件以规定的方向输送,在形成于设置于装置主体上的多个喷嘴构件22上的每个喷嘴22d的每个前端喷射的压缩气体,每个喷嘴 与蜂窝状的顶板31相对的构件22由在水平面上可转动的柱状体构成。 版权所有(C)2009,JPO&INPIT
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