Abstract:
An object of the present invention is to provide an interconnect structure in which the current capacity of an interconnect pattern involving a large amount of current is increased without preventing miniaturization of signal lines and increasing film thickness. To accomplish this object, the present invention is configured as an interconnect structure including a resin layer; and interconnects formed on the resin layer, wherein the resin layer has a plurality of parallel grooves in an area in which the interconnects are formed, and the interconnects are formed of a plating film created on a resin layer front surface in the area, in which the interconnects are formed, and on inner wall surfaces of the plurality of grooves.
Abstract:
A manufacturing method of a semiconductor package which improves productivity and can manufacture high-quality semiconductor packages is provided. The manufacturing method of a semiconductor package includes arranging a plurality of semiconductor devices at intervals on a first surface side of a support substrate, forming a first insulating resin layer forming wiring connected to each of the plurality of semiconductor devices and embeds the plurality of semiconductor devices, cutting from the first surface side in areas between the plurality of semiconductor devices, forming a first groove portion penetrating the first insulating resin layer and exposing the support substrate, and dividing individual semiconductor packages by forming a resist pattern having openings arranged corresponding to the first groove portion on a second surface on the opposite side of the first surface, etching the openings from the second surface side, and forming a second groove portion on the second surface side
Abstract:
Provided is a bonding method to construct a bonding with high thermal reliability between electrodes formed on both chip surfaces of a semiconductor device and wiring. The bonding method includes: bonding a semiconductor chip over a first substrate with a bonding film interposed therebetween; forming a first insulating film over the semiconductor chip; forming a first via in the first insulating film; forming a first wiring over the first insulating film so as to be electrically connected to the semiconductor chip through the first via; forming a second via in the bonding film; and forming a second wiring under the semiconductor chip so as to be electrically connected to the semiconductor chip through the second via.
Abstract:
A semiconductor device including: a support plate 1; a semiconductor chip 2 mounted on one principal surface of the support plate 1 via an adhesive layer, with the element circuit surface of the chip being directed upward; an insulation material layer 4 that seals the semiconductor chip 2 and the periphery of the semiconductor chip; openings formed on an electrode arranged on the element circuit surface of the semiconductor chip 2 in the insulation material layer 4; conductive portions 6 formed in the openings so as to be connected to the electrode of the semiconductor chip; a wiring layer 5 formed on the insulation material layer 4 so as to be connected to the conductive portions 6 and partially extending to the peripheral region of the semiconductor chip 2; and external electrodes 7 formed on the wiring layer 5.
Abstract:
Provided is a bonding method to construct a bonding with high thermal reliability between electrodes formed on both chip surfaces of a semiconductor device and wiring. The bonding method includes: bonding a semiconductor chip over a first substrate with a bonding film interposed therebetween; forming a first insulating film over the semiconductor chip; forming a first via in the first insulating film; forming a first wiring over the first insulating film so as to be electrically connected to the semiconductor chip through the first via; forming a second via in the bonding film; and forming a second wiring under the semiconductor chip so as to be electrically connected to the semiconductor chip through the second via.
Abstract:
A press fitting head comprising an elastic member in a part where the press fitting head contacts a semiconductor device, and an alignment mark recognition area capable of detecting an optically readable marker provided on a surface to be contacted to the semiconductor device is provided. Additionally, a semiconductor manufacturing apparatus in which the press fitting head is applied is provided.
Abstract:
A semiconductor device is provided including a package substrate, and a plurality of semiconductor chips stacked above the package substrate, at least one of the plurality of semiconductor chips including a step part in a periphery edge part of a rear surface,
Abstract:
A semiconductor package includes a first semiconductor device provided on a support substrate; a first encapsulation material covering the first semiconductor device; a first line provided on the first encapsulation material, the first line being connected with the first semiconductor device; an intermediate buffer layer covering the first line, and a second encapsulation material provided on the intermediate buffer layer. The first encapsulation material and the second encapsulation material are each formed of an insulating material different from an insulating material used to form the intermediate buffer layer. A second semiconductor device covered with the second encapsulation material may be provided on the intermediate buffer layer.
Abstract:
A stacked semiconductor package includes a first semiconductor package including a first circuit board and a first semiconductor device mounted on the first circuit board; a second semiconductor package including a second circuit board and a second semiconductor device mounted on the second circuit board, the second semiconductor package being stacked on the first semiconductor package; and a heat transfer member provided on the first semiconductor device and a part of the first circuit board, the part being around the first semiconductor device.
Abstract:
The invention provides a semiconductor device low in height and having low heat resistance, and a method of manufacturing the semiconductor device. Disclosed is a semiconductor device including: a support plate 1; a semiconductor chip 2 mounted on one principal surface of the support plate 1 via an adhesive layer, with the element circuit surface of the chip being directed upward; an insulation material layer 4 that seals the semiconductor chip 2 and the periphery of the semiconductor chip; openings formed on an electrode arranged on the element circuit surface of the semiconductor chip 2 in the insulation material layer 4; conductive portions 6 formed in the openings so as to be connected to the electrode of the semiconductor chip; a wiring layer 5 formed on the insulation material layer 4 so as to be connected to the conductive portions 6 and partially extending to the peripheral region of the semiconductor chip 2; and external electrodes 7 formed on the wiring layer 5, wherein the support plate 1 is a flat plate that constitutes the outermost layer of a combined support plate and is separated from the combined support plate in which a plurality of flat plates used in the process of manufacturing the semiconductor device is laminated to each other.