METHOD OF MANUFACTURING SEMICONDUCTOR PACKAGE AND SEMICONDUCTOR PACKAGE

    公开(公告)号:US20170256453A1

    公开(公告)日:2017-09-07

    申请号:US15409631

    申请日:2017-01-19

    Abstract: A manufacturing method of a semiconductor package which improves productivity and can manufacture high-quality semiconductor packages is provided. The manufacturing method of a semiconductor package includes arranging a plurality of semiconductor devices at intervals on a first surface side of a support substrate, forming a first insulating resin layer forming wiring connected to each of the plurality of semiconductor devices and embeds the plurality of semiconductor devices, cutting from the first surface side in areas between the plurality of semiconductor devices, forming a first groove portion penetrating the first insulating resin layer and exposing the support substrate, and dividing individual semiconductor packages by forming a resist pattern having openings arranged corresponding to the first groove portion on a second surface on the opposite side of the first surface, etching the openings from the second surface side, and forming a second groove portion on the second surface side

    SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    100.
    发明申请
    SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE 有权
    半导体器件及制造半导体器件的方法

    公开(公告)号:US20160027695A1

    公开(公告)日:2016-01-28

    申请号:US14801437

    申请日:2015-07-16

    Abstract: The invention provides a semiconductor device low in height and having low heat resistance, and a method of manufacturing the semiconductor device. Disclosed is a semiconductor device including: a support plate 1; a semiconductor chip 2 mounted on one principal surface of the support plate 1 via an adhesive layer, with the element circuit surface of the chip being directed upward; an insulation material layer 4 that seals the semiconductor chip 2 and the periphery of the semiconductor chip; openings formed on an electrode arranged on the element circuit surface of the semiconductor chip 2 in the insulation material layer 4; conductive portions 6 formed in the openings so as to be connected to the electrode of the semiconductor chip; a wiring layer 5 formed on the insulation material layer 4 so as to be connected to the conductive portions 6 and partially extending to the peripheral region of the semiconductor chip 2; and external electrodes 7 formed on the wiring layer 5, wherein the support plate 1 is a flat plate that constitutes the outermost layer of a combined support plate and is separated from the combined support plate in which a plurality of flat plates used in the process of manufacturing the semiconductor device is laminated to each other.

    Abstract translation: 本发明提供了一种半导体器件的高度低,耐热性低的半导体器件,以及半导体器件的制造方法。 公开了一种半导体器件,包括:支撑板1; 半导体芯片2,其经由粘合剂层安装在支撑板1的一个主表面上,芯片的元件电路表面朝向上方; 绝缘材料层4,其密封半导体芯片2和半导体芯片的周围; 形成在绝缘材料层4上的布置在半导体芯片2的元件电路表面上的电极上的开口; 形成在开口中以与半导体芯片的电极连接的导电部分6; 形成在绝缘材料层4上的布线层5,以连接到导电部分6并且部分地延伸到半导体芯片2的周边区域; 以及形成在布线层5上的外部电极7,其中支撑板1是构成组合的支撑板的最外层的平板,并且与组合的支撑板分离,在该组合的支撑板中使用多个平板 制造半导体器件彼此层叠。

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