公开(公告)号：DE69223202D1

公开(公告)日：1998-01-02

申请号：DE69223202

申请日：1992-08-28

Applicant: CANON KK

Inventor： MORI MAKIKO ,  OZAWA KUNITAKA ,  AMEMIYA MITSUAKI

IPC: G03F7/20 ,  H01L21/027

Abstract: In an SOR exposure system for transferring patterns on masks to semiconductor wafers by using SOR light (4) reflected by an X-ray reflecting mirror (9A,9B), a first shutter device (5A,5B) for shielding at least gamma rays and a second shutter device (8A,8B) for shielding X-rays are provided between the SOR ring and the mirror inside a beam port, and an exposure adjustment device (11A,11B) for adjusting the amount of exposure when a circuit pattern on a mask (12A,12B) is transferred to a wafer (13A,13B) is provided between the mirror and the wafer. As a result, the human body can be protected against radiation rays, such as gamma rays, generated from the SOR ring when electrons are injected or when the SOR ring is stopped. Damage to the X-ray reflecting mirror caused by radiation rays is reduced, and stable reflectance of the mirror can be obtained. Maintenance of the SOR exposure system is also made easier.

公开(公告)号：DE69023186T2

公开(公告)日：1996-03-28

申请号：DE69023186

申请日：1990-08-06

Applicant: CANON KK

Inventor： KUROSAWA HIROSHI ,  UDA KOJI ,  OZAWA KUNITAKA ,  UZAWA SHUNICHI ,  MIZUSAWA NOBUTOSHI ,  SUDA SHIEGEYUKI ,  NOSE NORIYUKI ,  KARIYA TAKAO

IPC: G03F7/20 ,  G03F9/00

Abstract: An exposure apparatus for printing a pattern of a mask (2) onto a wafer (3) includes a mask moving mechanism (4) for moving the mask; a wafer moving mechanism (10,11) for moving the wafer along a predetermined movement coordinate; a measuring system for measuring an error with respect to the movement coordinate, resulting from the movement of the mask by the mask moving mechanism; and a memorizing device for memorizing a data table prepared on the basis of the error measured by the measuring system; wherein the wafer moving mechanism uses the data in the data table when it moves the wafer for positioning of the wafer with respect to the mask.

公开(公告)号：DE68925605D1

公开(公告)日：1996-03-21

申请号：DE68925605

申请日：1989-09-06

Applicant: CANON KK

Inventor： KAWAKAMI EIGO ,  OZAWA KUNITAKA ,  UDA KOJI ,  SHIMODA ISAMU ,  UZAWA SHUNICHI

IPC: G03F7/20 ,  H01L21/027 ,  H01L21/30 ,  G03F9/00 ,  H01L21/00

公开(公告)号：DE3434797C2

公开(公告)日：1995-11-23

申请号：DE3434797

申请日：1984-09-21

Applicant: CANON KK

Inventor： ARAI RYUICHI ,  TOGANOH SHIGEO ,  OZAWA KUNITAKA

IPC: B41J2/205 ,  B41J2/005 ,  B41J2/485 ,  B41M1/30 ,  B41M1/42

Abstract: A process for recording an image by depositing droplets of a recording liquid onto a light-transmitting recording material is provided which comprises depositing at least two droplets of a recording liquid of the same color per image element onto the recording material. An apparatus for the process is also provided which comprises an image-forming means or a recording means useful for a reflective recording material and a light transmitting material.

公开(公告)号：DE69110698D1

公开(公告)日：1995-08-03

申请号：DE69110698

申请日：1991-02-08

Applicant: CANON KK

Inventor： TANAKA YUTAKA ,  OZAWA KUNITAKA ,  KARIYA TAKAO ,  UZAWA SHUNICHI

IPC: F16K3/18 ,  H01L21/027

Abstract: A gate valve device including a partition wall (41) having an opening (13); a valve member (14) movable along the partition wall to openably close the opening; a driving system means for moving the valve member (14); and a pressing mechanism (26) for pressing the valve member toward the partition wall, the pressing mechanism having a pressing member (33) projectable toward and retractable from the valve member, wherein the pressing mechanism presses the valve member against the partition wall when the valve member is in a position closing the opening.

公开(公告)号：DE3215276C2

公开(公告)日：1994-11-24

申请号：DE3215276

申请日：1982-04-23

Applicant: CANON KK

Inventor： AYATA NAOKI ,  SAITO SEIJI ,  SUZUKI HIDETOSHI ,  OZAWA KUNITAKA ,  KOUMURA NOBORU ,  KAZUMA KOJI

IPC: H04N1/032 ,  H04N1/393 ,  H04N1/50 ,  B41J2/515 ,  B41J2/045

Abstract: A printing apparatus has at least one first recording head and at least one second recording head. These recording heads allow recording in binary mode, halftone mode, normal mode, and fine mode. A printing system has at least two recording units. One recording unit has a plurality of recording heads for recording in yellow, cyan and magenta, and the other recording unit has a recording head for recording in black. Upon a signal scanning operation, the printing system is capable of printing a plurality of copies at high speed and with good quality. A change in size of the original does not result in a problem since the apparatus is capable of feeding a recording paper sheet of corresponding size or printing only for a desired length.

公开(公告)号：CA2077237A1

公开(公告)日：1993-03-04

申请号：CA2077237

申请日：1992-08-31

Applicant: CANON KK

Inventor： MORI MAKIKO ,  OZAWA KUNITAKA ,  AMEMIYA MITSUAKI

IPC: G03F7/20 ,  H01L21/027 ,  G03F7/207

Abstract: In an SOR exposure system for transferring patterns on masks to semiconductor wafers by using SOR light (4) reflected by an X-ray reflecting mirror (9A,9B), a first shutter device (5A,5B) for shielding at least gamma rays and a second shutter device (8A,8B) for shielding X-rays are provided between the SOR ring and the mirror inside a beam port, and an exposure adjustment device (11A,11B) for adjusting the amount of exposure when a circuit pattern on a mask (12A,12B) is transferred to a wafer (13A,13B) is provided between the mirror and the wafer. As a result, the human body can be protected against radiation rays, such as gamma rays, generated from the SOR ring when electrons are injected or when the SOR ring is stopped. Damage to the X-ray reflecting mirror caused by radiation rays is reduced, and stable reflectance of the mirror can be obtained. Maintenance of the SOR exposure system is also made easier.

公开(公告)号：HK72991A

公开(公告)日：1991-09-13

申请号：HK72991

申请日：1991-09-05

Applicant: CANON KK

Inventor： OZAWA KUNITAKA ,  HARUTA MASAHIRO ,  EIDA TSUYOSHI ,  HAMAMOTO TAKASHI

IPC: B01D15/08 ,  C09B67/54 ,  C09D11/00 ,  C09D11/02 ,  C09D11/16

公开(公告)号：HK72091A

公开(公告)日：1991-09-13

申请号：HK72091

申请日：1991-09-05

Applicant: CANON KK

Inventor： HARUTO MASAHIRO ,  OZAWA KUNITAKA ,  HAMAMOTO TAKASHI

IPC: C09B67/54 ,  C09D11/02 ,  C09D11/16

公开(公告)号：FR2507037B1

公开(公告)日：1989-06-09

申请号：FR8209360

申请日：1982-05-28

Applicant: CANON KK

Inventor： OZAWA KUNITAKA ,  AYATA NAOKI ,  SUZUKI HIDETOSHI ,  SAITO SEIJI ,  KOUMURA NOBORU

IPC: H04N1/46 ,  H04N1/48 ,  H04N1/04

Abstract: A multi-color image reading device is described in which plural photoelectric converting means convert the light beam from an original color image into electrical color separation signals, a color identification means produces plural color signals corresponding to colors of the multi-color image according to the plural color separation signals, and correcting means utilizes a particular color signal for correcting other color signals.