公开(公告)号：DE69505448T2

公开(公告)日：1999-04-22

申请号：DE69505448

申请日：1995-02-22

Applicant: CANON KK

Inventor： HARA SHINICHI ,  MIZUSAWA NOBUTOSHI ,  CHIBA YUJI

IPC: G03F1/22 ,  G03F7/20 ,  G03F1/14

公开(公告)号：DE3752179D1

公开(公告)日：1998-04-30

申请号：DE3752179

申请日：1987-12-09

Applicant: CANON KK

Inventor： EBINUMA RYUICHI ,  MIZUSAWA NOBUTOSHI ,  CHIBA YUJI

IPC: B41J2/165 ,  B41J2/175 ,  B41J11/14 ,  B41J29/02 ,  B41J29/377 ,  G03G21/16 ,  H04N1/00

公开(公告)号：DE69030348T2

公开(公告)日：1997-09-04

申请号：DE69030348

申请日：1990-10-03

Applicant: CANON KK

Inventor： WATANABE YUTAKA ,  EBINUMA RYUICHI ,  MIZUSAWA NOBUTOSHI ,  UZAWA SHUNICHI ,  KARIYA TAKAO

IPC: G03F7/20

公开(公告)号：DE68927146T2

公开(公告)日：1997-02-06

申请号：DE68927146

申请日：1989-09-29

Applicant: CANON KK

Inventor： MATSUI SHIN ,  KARIYA TAKAO ,  MIZUSAWA NOBUTOSHI ,  EBINUMA RYUICHI ,  UZAWA SHUNICHI

IPC: G03F7/20 ,  H01L21/677 ,  H01L21/68

公开(公告)号：DE69123279D1

公开(公告)日：1997-01-09

申请号：DE69123279

申请日：1991-04-04

Applicant: CANON KK

Inventor： KUNO MITSUTOSHI ,  FUJIOKA HIDEHIKO ,  MIZUSAWA NOBUTOSHI ,  CHIBA YUJI ,  KARIYA TAKAO ,  UDA KOJI ,  UZAWA SHUNICHI ,  KAWAKAMI EIGO

IPC: G03F7/20 ,  H01L21/687 ,  H01L21/00

Abstract: A method of controlling a conveying device having a gripping hand for gripping an article to be conveyed and a conveying mechanism for conveying the gripping hand, wherein a pressing force applied to the gripping hand through the article being conveyed is detected and the conveying operation of the conveying mechanism is stopped when the pressing force exceeds a predetermined. limit.

公开(公告)号：DE3855083D1

公开(公告)日：1996-04-11

申请号：DE3855083

申请日：1988-11-11

Applicant: CANON KK

Inventor： MIZUSAWA NOBUTOSHI ,  EBINUMA RYUICHI ,  CHIBA YUJI

IPC: B41J2/165 ,  B41J29/17

Abstract: An ink jet recording apparatus comprising: a non-contact print mode in which medium to be recorded and conveyed to a region in which printing can be performed is subjected to be recording by discharging ink in a non-contact manner from a recording head (IJH) confronting the medium to be recorded at a predetermined interval; and a contact cleaning mode in which a cleaning sheet (CP) which has been conveyed into the region in which printing can be performed by using at least a part of a conveyance route for the medium to be recorded is brought into contact with the recording head (IJH) and then the cleaning sheet is discharged from the region in which printing can be performed.

公开(公告)号：DE3851870D1

公开(公告)日：1994-11-24

申请号：DE3851870

申请日：1988-11-11

Applicant: CANON KK

Inventor： MIZUSAWA NOBUTOSHI ,  EBINUMA RYUICHI ,  CHIBA YUJI

IPC: B41J2/165

Abstract: An ink jet recording apparatus comprising: a non-contact print mode in which medium to be recorded and conveyed to a region in which printing can be performed is subjected to be recording by discharging ink in a non-contact manner from a recording head (IJH) confronting the medium to be recorded at a predetermined interval; and a contact cleaning mode in which a cleaning sheet (CP) which has been conveyed into the region in which printing can be performed by using at least a part of a conveyance route for the medium to be recorded is brought into contact with the recording head (IJH) and then the cleaning sheet is discharged from the region in which printing can be performed.

公开(公告)号：DE3750072T2

公开(公告)日：1994-10-27

申请号：DE3750072

申请日：1987-10-26

Applicant: CANON KK

Inventor： MIYAWAKI MAMORU ,  MASUDA YUKIO ,  ARAI RYUICHI ,  MIZUSAWA NOBUTOSHI ,  ISHIWATARI TAKAHIKO ,  OKUNUKI MASAHIKO

IPC: H01J31/06 ,  H04Q3/52 ,  H04B10/00 ,  G08C19/36 ,  H04Q3/00

公开(公告)号：GB2123755B

公开(公告)日：1986-06-04

申请号：GB8312885

申请日：1983-05-11

Applicant: CANON KK

Inventor： MIZUSAWA NOBUTOSHI ,  KOUMURA NOBORU

IPC: B41J2/175 ,  B41J3/04

Abstract: A recording apparatus comprising a first ink tank mounted on a carriage, a second ink tank which remains disconnected from the first tank during recording, means for intermittently forming an ink supply path extending between the first and second ink tanks when ink is to be supplied to the first tank from the second tank, and means for maintaining constant the amount of ink within the first ink tank.

公开(公告)号：DE68929187T2

公开(公告)日：2000-09-28

申请号：DE68929187

申请日：1989-08-31

Applicant: CANON KK

Inventor： KUROSAWA HIROSHI ,  AMEMIYA MITSUAKI ,  TERASHIMA SHIGERU ,  UDA KOJI ,  SHIMODA ISAMU ,  UZAWA SHUNICHI ,  OZAWA KUNITAKA ,  HARA SHINICHI ,  KAWAKAMI EIGO ,  MIZUSAWA NOBUTOSHI ,  MORI MAKIKO ,  EBINUMA RYUICHI

IPC: G03F7/20

Abstract: An exposure apparatus usable with synchrotron radiation source (201) wherein the synchrotron radiation (202,204) is generated by electron injection (210) into a ring (201). The exposure apparatus is to transfer a semiconductor element pattern of a mask (208) onto a semiconductor wafer (209) by the synchrotron radiation. The apparatus includes a shutter (207) for controlling the exposure of the wafer (209). The shutter (207) controls the exposure with the illuminance distribution on the wafer surface taken into account. The illuminance distribution is determined (206,211,216) in response to the electron injection (210), and thereafter, the illuminance distribution is corrected (216,215,213,207) in a predetermined manner. By this, the illuminance distribution data for controlling (213,215) the shutter (207) always correspond to the actual illuminance distribution. The entire shot areas of the semiconductor wafer (209) are exposed with high precision.