公开(公告)号：US20090134018A1

公开(公告)日：2009-05-28

申请号：US12230968

申请日：2008-09-09

Applicant: Fumio Watanabe

Inventor： Fumio Watanabe

IPC: C23C14/54

CPC classification number: C23C16/4412 ,  C23C14/564 ,  H01J7/24 ,  H01J41/06

Abstract: An ionization vacuum device measures a pressure in a vacuum vessel, and has: an anode provided inside the vacuum vessel; a cathode provided inside the vacuum vessel; a power source for discharge that supplies electric power for discharge between the anode and the cathode; a power source for cathode-heating that supplies power for heating to the cathode, means for forming a magnetic field in a space between the anode and the cathode; control means for controlling so as to heat said cathode by said power source for cathode-heating while discharge of gas inside said vacuum vessel is caused, and so as to maintain the temperature of said cathode within a temperature range where thermonic electrons are not emitted from said cathode.

Abstract translation: 电离真空装置测量真空容器内的压力，并具有设置在真空容器内的阳极; 设置在真空容器内的阴极; 用于在阳极和阴极之间放电的电力的放电用电源; 用于向阴极供应电力的阴极加热用电源，用于在阳极和阴极之间的空间中形成磁场的装置; 控制装置，用于通过所述用于阴极加热的电源加热所述阴极，同时引起所述真空容器内部的气体排放，并且将所述阴极的温度保持在不发射热电子的温度范围内 所说阴极。

公开(公告)号：US20050028602A1

公开(公告)日：2005-02-10

申请号：US10910104

申请日：2004-08-03

Applicant: Raffaele Correale

Inventor： Raffaele Correale

IPC: G01L21/34 ,  H01J41/06 ,  H01J41/10 ,  H01J1/62

CPC classification number: B82Y10/00 ,  H01J41/06

Abstract: An ionisation vacuum gauge for measuring the residual pressure of a gaseous material remaining in a container (10), more particularly after operation of a vacuum pump comprises an electron-emitting cathode (31) made by exploiting the nanotube technology, a grid (13; 33; 133; 133′) for accelerating the electrons emitted by the cathode, and a plate (15; 35) collecting the ions and/or the ionised positive molecules of the gas. Measuring the plate current by a galvanometer allows for determining the value of the residual pressure inside the container.

Abstract translation: 用于测量残留在容器（10）中的气态材料的残余压力的电离真空计更具体地在真空泵的操作之后包括通过利用纳米管技术制成的电子发射阴极（31），栅格（13; 33; 133; 133'），用于加速由阴极发射的电子;以及板（15; 35），其收集气体的离子和/或电离的正分子。 用电流计测量板电流可以确定容器内残余压力的值。

公开(公告)号：US06737657B2

公开(公告)日：2004-05-18

申请号：US10608339

申请日：2003-06-30

Applicant: Sang-Kee Kim

Inventor： Sang-Kee Kim

IPC: G21K510

CPC classification number: H01J37/09 ,  H01J37/3171 ,  H01J41/06 ,  H01J2237/0264 ,  H01J2237/18

Abstract: An ion implanting apparatus includes an analyzer unit for analyzing ions to be implanted into a wafer from among those ions in a beam produced by an ionization, a vacuum unit for producing a vacuum in the analyzer unit, a vacuum gauge for measuring the pressure inside the analyzer unit, and a shield for preventing a magnetic field employed by the analyzer unit from affecting the vacuum gauge. The shield has a plurality of magnetic field shielding plates encircling the vacuum gauge and dielectric material inserted between the magnetic shielding plates. The shield prevents the vacuum gauge from being influenced by the magnetic field generated by the analyzer unit. Therefore, the vacuum level inside the analyzer unit can be precisely measured.

Abstract translation: 离子注入装置包括：分析器单元，用于分析从通过电离产生的光束中的那些离子中注入到晶片中的离子;分析器单元中产生真空的真空单元;用于测量内部的压力的真空计 分析器单元和用于防止分析器单元使用的磁场影响真空计的屏蔽。 屏蔽件具有环绕真空计的多个磁场屏蔽板和插在磁屏蔽板之间的电介质材料。 屏蔽层可防止真空计受到分析仪单元产生的磁场的影响。 因此，可以精确地测量分析器单元内的真空度。

公开(公告)号：US5198772A

公开(公告)日：1993-03-30

申请号：US843197

申请日：1992-02-28

Applicant: Roy N. Peacock ,  Neil T. Peacock

Inventor： Roy N. Peacock ,  Neil T. Peacock

IPC: G01L21/34 ,  H01J41/06

CPC classification number: H01J41/06

Abstract: A cold cathode gauge including a glow lamp or the like disposed within the vacuum space of the gauge for initiating the gauge discharge, the lamp emitting UV or blue light directly at at least the cathode of the gauge where the energy of the light is sufficient to release photoelectrons from the cathode to thus initiate the discharge. A member is also provided for removably positioning the glow lamp within the vacuum space whereby the lamp can be removed during bake out and then subsequent thereto, be inserted within the vacuum space to thus enhance longevity of the lamp.

Abstract translation: 一种冷阴极测量仪，包括设置在量规的真空空间内的辉光灯等，用于启动量规放电，该灯直接在光能的阴极处至少发射出紫外线或蓝光，其中光的能量足以 从阴极释放光电子，从而开始放电。 还提供一种用于将真空灯可拆卸地定位在真空空间内的构件，由此在烘烤期间随后可以将灯除去，然后将其插入真空空间内，从而提高灯的寿命。

公开(公告)号：US3665245A

公开(公告)日：1972-05-23

申请号：US3665245D

申请日：1969-10-27

Applicant: RESEARCH CORP

Inventor： SCHWARZ HELMUT J

IPC: H01J41/06 ,  H01J41/14 ,  G01N27/62

CPC classification number: H01J41/14 ,  H01J41/06

Abstract: A non-magnetic ionization gauge or ion pump comprising a tube containing spaced cathodes at the same potential, with an intermediately positioned ring anode for setting up an oscillating stream of electrons that is focused or constrained within an axial path by an electric quadrupole lens arrangement which may be excited by the RF force. The quadrupole lenses create a field which is tuned firstly to lengthen and stabilize the path of the electrons thus causing greater ionization of the gas atoms in the tube, and also to expel the ions produced thereby, which ions are then collected by a cylindrical collector screen at a slightly negative potential surrounding the whole electrode structure. The collector current produced with this arrangement has been found to be approximately inversely proportional to the pressure within the range from 10 5 to 10 10 torr, so that collector currents of the order of microamperes can be obtained at very low pressure levels.

公开(公告)号：US3614512A

公开(公告)日：1971-10-19

申请号：US3614512D

申请日：1969-04-14

Applicant: PHILIPS CORP

Inventor： EVRARD ROBERT

IPC: H01J41/06 ,  H01J27/00

CPC classification number: H01J41/06

Abstract: Ion source for use in an ion pump or other apparatus, comprising a secondary-emissive cylinder accommodating a grid. A highfrequency voltage is applied between these two electrodes so that the transit time of the diametrically moving electrons is one whole period or a multiple thereof.

公开(公告)号：US3399341A

公开(公告)日：1968-08-27

申请号：US45802865

申请日：1965-05-24

Applicant: UNITED AIRCRAFT CORP

Inventor： BANAS CONRAD M ,  CHURCHILL THOMAS L ,  POWERS DONALD E

IPC: H01J41/06

CPC classification number: H01J41/06

公开(公告)号：US3239771A

公开(公告)日：1966-03-08

申请号：US25669363

申请日：1963-02-06

Applicant: WESTINGHOUSE ELECTRIC CORP

Inventor： ANDREATTA JAMES H

IPC: H01J41/06 ,  H03F3/217

CPC classification number: H01J41/06 ,  H03F3/217

公开(公告)号：US3171028A

公开(公告)日：1965-02-23

申请号：US13714161

申请日：1961-09-11

Applicant: NAT RES DEV

Inventor： EPHRAIM LOVELOCK JAMES

IPC: G01N27/62 ,  G01N27/66 ,  G01N30/70 ,  H01J41/02 ,  H01J41/06

CPC classification number: G01N27/66 ,  G01N27/62 ,  G01N30/70 ,  H01J41/02 ,  H01J41/06

公开(公告)号：US3124744A

公开(公告)日：1964-03-10

申请号：US69332357

申请日：1957-10-30

IPC: G01N27/66 ,  H01J41/06 ,  H01J41/08

CPC classification number: G01N27/66 ,  H01J41/06 ,  H01J41/08