公开(公告)号：US20110096337A1

公开(公告)日：2011-04-28

申请号：US12907712

申请日：2010-10-19

Applicant: Futoshi Hirose ,  Kenichi Saito

Inventor： Futoshi Hirose ,  Kenichi Saito

IPC: G01B9/02

CPC classification number: G02B26/06 ,  A61B3/102 ,  A61B3/14 ,  G01N21/21 ,  G01N21/4795 ,  G01N2021/1787 ,  G01N2201/0675 ,  G02F2203/12 ,  G02F2203/18

Abstract: An adaptive optics apparatus includes a light modulation unit configured to modulate each of two polarization components of light at a position that is optically conjugate to an object, the light being emitted by a light source; and an irradiation unit configured to irradiate the object with light that is modulated by the light modulation unit.

Abstract translation: 一种自适应光学装置，包括：光调制单元，被配置为调制与物体光学共轭的位置处的光的两个偏振分量中的每一个，所述光由光源发射; 以及被配置为用由所述光调制单元调制的光照射所述物体的照射单元。

公开(公告)号：US07693324B2

公开(公告)日：2010-04-06

申请号：US11160707

申请日：2005-07-06

Applicant: Gernot Brasen ,  Christian Laue ,  Matthias Loeffler ,  Heiko Theuer

Inventor： Gernot Brasen ,  Christian Laue ,  Matthias Loeffler ,  Heiko Theuer

IPC: G06K9/00

CPC classification number: G01N21/95607 ,  G01N2201/0675 ,  H01L21/67288

Abstract: The present invention provides a method, an optical inspection apparatus as well as a computer program product for optical inspection of a surface. The optical inspection apparatus can be effectively applied for optical inspection of periodic structures on e.g. a semi-conductor wafer for the purpose of quality control. By effectively splitting a light beam into a plurality of spatially separated light beams and by selective usage of these light beams, various surface segments of the surface can be inspected simultaneously by superposition of respective images. A resulting superposition image can then be compared with a reference image for detection of defects of the surface.

Abstract translation: 本发明提供一种光学检查装置以及用于光学检查表面的计算机程序产品的方法。 光学检查装置可以有效地应用于例如周期性结构的光学检查。 半导体晶片，用于质量控制。 通过将光束有效地分割成多个空间分离的光束并且通过选择性地使用这些光束，可以通过叠加各个图像同时检查表面的各种表面段。 然后可以将所得到的叠加图像与用于检测表面缺陷的参考图像进行比较。

公开(公告)号：US20090323052A1

公开(公告)日：2009-12-31

申请号：US12145708

申请日：2008-06-25

Applicant: Shai Silberstein ,  Tsafrir Avni

Inventor： Shai Silberstein ,  Tsafrir Avni

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/9503 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/8825 ,  G01N2201/067 ,  G01N2201/0675 ,  G01N2201/0697 ,  G01N2201/1241

Abstract: An optical inspection system or tool can be configured to inspect objects using dynamic illumination where one or more characteristics of the illumination is/are adjusted to meet the inspection needs of different areas. For example, the illumination intensity may be increased or decreased as the tool inspects areas of memory and periphery features in a wafer die. In some embodiments, the adjustment can be based on data obtained during a pre-inspection setup sequence in which images taken based on illumination with varying characteristics are evaluated for suitability in the remainder of the inspection process.

Abstract translation: 光学检查系统或工具可以被配置为使用动态照明来检查物体，其中调整照明的一个或多个特征以满足不同区域的检查需要。 例如，当工具检查晶片管芯中的存储器区域和外围特征时，可以增加或减小照明强度。 在一些实施例中，调整可以基于在预检查设置顺序期间获得的数据，其中基于具有变化特性的照明拍摄的图像被评估为在检查过程的其余部分中的适用性。

公开(公告)号：US20040206906A1

公开(公告)日：2004-10-21

申请号：US10753614

申请日：2004-01-08

Applicant: Southwest Research Institute

Inventor： Thomas E. Owen

IPC: G01N021/35

CPC classification number: G01N21/3518 ,  G01J3/0232 ,  G01J3/427 ,  G01N21/05 ,  G01N21/314 ,  G01N21/3504 ,  G01N21/61 ,  G01N33/004 ,  G01N33/0054 ,  G01N2021/3125 ,  G01N2021/3137 ,  G01N2201/0675 ,  G01N2201/1211 ,  G01N2201/1218 ,  Y02A50/244 ,  Y02A50/246

Abstract: A gas sensor, whose chamber uses filters and choppers in either a semicircular geometry or annular geometry, and incorporates separate infrared radiation filters and optical choppers. This configuration facilitates the use of a single infrared radiation source and a single detector for infrared measurements at two wavelengths, such that measurement errors may be compensated.

Abstract translation: 气体传感器，其室使用半圆形几何形状或环形几何形状的过滤器和斩波器，并且包含单独的红外辐射滤波器和光学切割器。 这种配置有助于在两个波长处使用单个红外辐射源和单个检测器用于红外测量，从而可以补偿测量误差。

公开(公告)号：US20040188643A1

公开(公告)日：2004-09-30

申请号：US10396760

申请日：2003-03-24

Applicant: Photon Dynamics, Inc.

Inventor： Adam Weiss ,  Afsar Saranli ,  Oleksiy Lopatin ,  Alexandre Obotnine

IPC: G01V008/00

CPC classification number: G01N21/95623 ,  G01N21/21 ,  G01N2021/1772 ,  G01N2021/8477 ,  G01N2201/0612 ,  G01N2201/0675

Abstract: In an inspection system for planar objects having periodic structures, programmable optical Fourier filtering in the focal plane of a telecentric lens system is used to directly identify physical phenomena indicative of non-periodic defects. Lens assemblies and a coherent optical source are used to generate and observe a spatial Fourier transform of a periodic structure in the Fourier plane. Optical Fourier filtering (OFF) is performed in the focal plane using an electrically programmable and electrically alignable spatial light modulator. The spatial light modulator with high signal to noise ratio is electrically reconfigurable according to a feedback-driven, filter construction and alignment algorithm. The OFF enhances any non-periodic components present in the Fourier plane and final image plane of the object. A system having a plurality of inspection channels provides high-throughput inspection of objects with small non-periodic defects while maintaining high detection sensitivity.

Abstract translation: 在具有周期结构的平面物体的检查系统中，使用远心透镜系统的焦平面中的可编程光学傅立叶滤波来直接识别指示非周期性缺陷的物理现象。 透镜组件和相干光源用于产生和观察傅立叶平面中周期性结构的空间傅立叶变换。 光学傅立叶滤波（OFF）在焦平面上使用电可编程且电可对准的空间光调制器执行。 具有高信噪比的空间光调制器根据反馈驱动的滤波器构造和对准算法进行电可重构。 OFF增强存在于对象的傅立叶平面和最终图像平面中的任何非周期性分量。 具有多个检查通道的系统提供具有小的非周期缺陷的物体的高通量检查，同时保持高检测灵敏度。

公开(公告)号：US5504575A

公开(公告)日：1996-04-02

申请号：US79691

申请日：1993-06-17

Applicant: Ronald E. Stafford

Inventor： Ronald E. Stafford

IPC: G01J3/28

CPC classification number: G01J3/28 ,  G01J2003/2866 ,  G01J3/021 ,  G01J3/0229 ,  G01N2201/0675

Abstract: A SLM spectrometer is provided that employs an entrance slit or a collimator to provide parallel rays of radiation to a prism which disperses the incident radiation into an associated wavelength spectrum. The resulting spectrum from the prism is incident upon a spatial light modulator (SLM), such as a deformable mirror device (DMD). By selectively activating (or deactivating) a small portion of the surface of the SLM, i.e. a cell on the SLM, it is possible to selectively reflect or transmit a portion of the spectrum incident upon the SLM onto a focusing device, such as a parabolic focusing mirror. The focusing device in turn focuses the portion of the spectrum reflected by the selected cells on the SLM to a sensor. The wavelength selected is a function of which row of cells are activated (or deactivated) in the SLM. The SLM spectrometer of the present invention may be used to analyze visible light and light that is near visible, such as the near infrared or ultraviolet regions. The output of the sensor or detector may be appropriately amplified and after appropriate calibration employed to determine the amount of energy in a particular wavelength or band of wavelengths.

Abstract translation: 提供SLM光谱仪，其使用入射狭缝或准直器来向棱镜提供平行射线以将入射的辐射分散到相关的波长光谱中。 来自棱镜的所得光谱入射到空间光调制器（SLM），例如可变形反射镜装置（DMD）。 通过选择性地激活（或去激活）SLM的表面的一小部分，即SLM上的单元，可以选择性地将入射到SLM上的光谱的一部分反射或发射到聚焦装置上，例如抛物线 聚焦镜。 聚焦装置又将由SLM上所选单元反射的光谱的一部分聚焦到传感器。 选择的波长是在SLM中激活（或停用）单元格行的功能。 本发明的SLM光谱仪可用于分析近似可见光的可见光和近红外或紫外线区域的光。 传感器或检测器的输出可以被适当地放大，并且在用于确定特定波长或波长带中的能量的量的适当校准之后。

公开(公告)号：WO2013079960A1

公开(公告)日：2013-06-06

申请号：PCT/GB2012/052965

申请日：2012-11-30

Applicant: THE UNIVERSITY OF NOTTINGHAM

Inventor： SHARPLES, Stephen ,  LIGHT, Roger

IPC: G01N21/17 ,  G01H9/00 ,  H01L27/146

CPC classification number: G01N21/1702 ,  G01H9/00 ,  G01N2201/0612 ,  G01N2201/0675 ,  H01L27/14609

Abstract: An optical detector comprises a plurality of pixels, each pixel comprising a photodiode operable to detect light incident on that pixel and to generate a signal indicative of an intensity of that light. The plurality of pixels comprises a plurality of pixel pairs, and for each pixel pair, in a configuration mode, the detector is arranged to compare the signal generated by a first pixel of the pair with the signal generated by a second pixel of the pair. A method of optical detection is also described, as is a system incorporating the described optical detector.

Abstract translation: 光学检测器包括多个像素，每个像素包括可操作以检测入射在该像素上的光并产生指示该光强度的信号的光电二极管。 多个像素包括多个像素对，并且对于每个像素对，在配置模式中，检测器被布置为将由该对的第一像素生成的信号与由该对的第二像素生成的信号进行比较。 还描述了光学检测的方法，并且还包括结合所描述的光学检测器的系统。

公开(公告)号：WO2012080838A3

公开(公告)日：2012-08-16

申请号：PCT/IB2011003239

申请日：2011-12-16

Applicant: CANON KK ,  MASUMURA TAKAHIRO

Inventor： MASUMURA TAKAHIRO

IPC: G01N21/45 ,  A61B5/00 ,  G01N21/47 ,  G01N21/49 ,  G02B21/00 ,  G02B26/08 ,  G03H1/02 ,  G03H1/04 ,  G03H1/22

CPC classification number: G01N21/453 ,  A61B5/0068 ,  A61B5/0073 ,  G01N21/4795 ,  G01N21/6458 ,  G01N21/65 ,  G01N2021/1785 ,  G01N2201/0675 ,  G02B21/0032 ,  G02B21/0072 ,  G02B21/0076 ,  G02B26/06 ,  G03H1/2294 ,  G03H2001/0467

Abstract: An apparatus includes a light source (100) configured to emit an electromagnetic wave; a spatial light modulator (102) configured to modulate a wavefront of the electromagnetic wave to irradiate a sample (105); a plate (107) with an aperture; a lens unit (106) configured to set a focal point in the sample (105); a detector (108) configured to detect light coming from the focal point of the sample (105) through the aperture; and a controller (103) configured to control the spatial light modulator (102) based on the detected light by the detector (108). The lens unit (106) and the aperture in plate (107) form a confocal system.

Abstract translation: 一种装置，包括配置成发射电磁波的光源（100） 空间光调制器（102），被配置为调制所述电磁波的波前以照射样品（105）; 具有孔的板（107）; 被配置为设置所述样品（105）中的焦点的透镜单元（106）; 被配置为通过所述孔检测来自所述样品（105）的焦点的光的检测器（108） 以及控制器（103），被配置为基于由所述检测器（108）检测到的光来控制所述空间光调制器（102）。 透镜单元（106）和板（107）中的孔形成共焦系统。

公开(公告)号：WO2011103600A2

公开(公告)日：2011-08-25

申请号：PCT/US2011/025773

申请日：2011-02-22

Applicant: WILLIAM MARSH RICE UNIVERSITY ,  KELLY, Kevin, F.

Inventor： KELLY, Kevin, F.

IPC: G02B26/08

CPC classification number: G02B26/02 ,  G01N21/3563 ,  G01N21/3581 ,  G01N2201/0675 ,  G02B26/0833

Abstract: A system and method for high-resolution imaging terahertz radiation utilizing a spatial terahertz modulator based on interactions of photons at other energies with an intermediate screen to create very high speed modulation.

Abstract translation: 利用基于其他能量处的光子与中间屏幕的相互作用的空间太赫兹调制器来高分辨率成像太赫兹辐射的系统和方法，以产生非常高的速度调制。

公开(公告)号：WO2010044003A3

公开(公告)日：2010-06-10

申请号：PCT/IB2009054365

申请日：2009-10-06

Applicant: KONINKL PHILIPS ELECTRONICS NV ,  VAN BEEK MICHAEL C ,  RENSEN WOUTER H J ,  HARBERS RIK

Inventor： VAN BEEK MICHAEL C ,  RENSEN WOUTER H J ,  HARBERS RIK

IPC: G01N21/47 ,  A61B5/00 ,  G01N21/49 ,  G01N21/59

CPC classification number: A61B5/0059 ,  A61B5/4528 ,  G01N21/4795 ,  G01N2201/0626 ,  G01N2201/0635 ,  G01N2201/0675 ,  G01N2201/124

Abstract: A device (1; 10; 20; 30; 40) for optically examining the interior of a turbid medium (5) is provided. The device comprises an illumination system (2; 12; 22; 32; 42) adapted for illuminating a turbid medium (5) to be examined and an imaging device (106) adapted for generating images from detected light. The illumination system (2; 12; 22; 32; 42) is adapted to be operable in at least a first mode in which a wide area image is acquired by illuminating the turbid medium (5) and a surrounding area. From this wide area image, the region or regions of interest (110) at which the turbid medium (5) is actually situated can be determined. Then, these regions of interest (110) can be illuminated in a second mode. Thus, no light which has not been coupled to the turbid medium (5) and which might cause overexposure of the detector unit of the imaging device (106) will reach the imaging device (106).

Abstract translation: 提供了用于光学检查混浊介质（5）内部的装置（1; 10; 20; 30; 40）。 该装置包括适于照射被检查的混浊介质（5）的照明系统（2; 12; 22; 32; 42）和适于从检测到的光产生图像的成像装置（106）。 照明系统（2; 12; 22; 32; 42）适于在至少第一模式中可操作，其中通过照亮混浊介质（5）和周围区域来获取广域图像。 可以从该广域图像确定混浊介质（5）实际位于的感兴趣区域（110）。 然后，可以以第二模式照亮这些感兴趣的区域（110）。 因此，没有与浑浊介质（5）耦合并且可能导致成像装置（106）的检测器单元过度曝光的光将不会到达成像装置（106）。