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    111.
    发明专利
    未知

    公开(公告)号：NO20026151D0

    公开(公告)日：2002-12-20

    申请号：NO20026151

    申请日：2002-12-20

    Applicant: INPUT OUTPUT INC

    Inventor： SELVAKUMAR ARJUN ,  YU DULI ,  YU LIANZHONG ,  JONES BEN W

    IPC: B81B3/00 ,  B81C1/00 ,  G01P15/08 ,  G01P15/125 ,  G01V1/18 ,  G01P

    Abstract: An accelerometer comprising a measuring mass (1405) for detecting acceleration, including a housing having a cavity, one or more spring mass assemblies (1400) positioned within the cavity, wherein each spring mass assembly (1400) includes a support structure (1410), including one or more resilient folded beams (1415a-1415d) coupled to the support structure (1410) and the measuring mass (1405) is coupled to the resilient folded beams (1415a-1415d), wherein one or more electrode patterns are coupled to the spring mass assembly (1400), wherein a top cap wafer, including a top capacitor electrode, is coupled to the measurement mass (1405), and a bottom cap wafer, including a bottom capacitor electrode, is also coupled to measurement mass (1405). The folded beams include circular cutouts so as to provide stress relief at connections between foot and leg positions of each folded beam.

    114.
    发明专利
    未知

    公开(公告)号：NO20020139L

    公开(公告)日：2002-03-12

    申请号：NO20020139

    申请日：2002-01-11

    Applicant: INPUT OUTPUT INC

    Inventor： YU DULI ,  YU LIANZHONG ,  GOLDBERG HOWARD D ,  RIED ROBERT P

    IPC: B81B3/00 ,  G02B26/10 ,  B81C1/00 ,  C23F1/02 ,  G01P9/04 ,  G02B26/08 ,  G03F7/20 ,  G06V30/224 ,  G01P

    Abstract: The present invention provides merged-mask processes for fabricating micromachined devices in general and mirrored assemblies for use in optical scanning devices in particular. A method of fabricating a three dimensional structure, comprising, providing a substrate, applying a layer of a first masking material onto the substrate, applying a layer of a second masking material onto the layer of the first masking material, patterning the layer of the second masking material, applying a layer of a third masking material onto the portions not covered by the patterned layer of the second masking material, the layer of the third masking material is at least as thick as the combined thickness of the layers of the first and second masking materials, patterning the layers of the first and third masking materials, etching the exposed portions of the substrate, etching the exposed portions of the layers of the first and third masking materials and etching the exposed portions of the substrate.

    115.
    发明专利
    未知

    公开(公告)号：NO20020140D0

    公开(公告)日：2002-01-11

    申请号：NO20020140

    申请日：2002-01-11

    Applicant: INPUT OUTPUT INC

    Inventor： YU DULI ,  YU LIANZHONG ,  GOLDBERG HOWARD D ,  SCHMIDT MARTIN A ,  RIED ROBERT P

    IPC: G02B26/10 ,  B81B3/00 ,  G02B7/182 ,  G02B26/08 ,  G06K7/10 ,  G02B

    Abstract: A micro machined mirror assembly is provided that includes a micro machined top cap, mirror, and bottom cap mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges and includes travel stops that limit motion of the mirror in the z-direction. The top and bottom micro machined caps also include travel stops that limit motion of the mirror in the z-direction.

    ACCELEROMETER WITH RE-ENTRANT GROOVES
    116.
    发明专利
    ACCELEROMETER WITH RE-ENTRANT GROOVES 未知

    公开(公告)号：CA2410909A1

    公开(公告)日：2001-12-06

    申请号：CA2410909

    申请日：2001-05-29

    Applicant: INPUT OUTPUT INC

    Inventor： YU LIANZHONG ,  SCHMIDT MARTIN A ,  GOLDBERG HOWARD D ,  RIED ROBERT P ,  SELVAKUMAR ARJUN

    IPC: G01P15/08 ,  G01P15/125 ,  G01V1/18 ,  G01P15/00

    Abstract: An accelerometer (305) which comprises a measurement mass assembly having to p capacitor electrode (705), with one or more re-entrant openings or grooves (1405), a bottom capacitor electrode (805), with one or more re-entrant openings (1410), and/or a mass electrode pattern (910, 915), which also includes one or more re-entrant openings or grooves (1415, 1420). A re-entra nt opening or groove is an opening or groove formed in an element whereby the opening or groove is larger toward the center of the element than at the surface of the element. Re-entrant openings or grooves (1405, 1410, 1415, 1420) reduce fluid damping thereby reducing the amount of thermo-mechanical noise and permit increased sealing pressure of the accelerometer (305) there by lowering manufacturing costs and increasing production yields.

    Depth control device for an underwater cable
    120.
    发明专利
    Depth control device for an underwater cable 未知

    公开(公告)号：AU740881B2

    公开(公告)日：2001-11-15

    申请号：AU6999798

    申请日：1998-06-09

    Applicant: INPUT OUTPUT INC

    Inventor： OLIVIER ANDRE W ,  RAGAN BRYANT G ,  CRONVICH JAMES T

    IPC: B63B21/66 ,  G01V1/38 ,  G05D1/04

    Abstract: A depth control device 100 for an underwater cable 10 includes a rotary actuator 171 having a rotating output shaft connected to a swash plate 190. Rotation of the swash plate 190 by the actuator 171 causes a rocker arm 220 to pivot about an axis transverse to the axis of the output shaft. The rocker arm 220 is drivingly connected to a drive shaft 145 for rotating wings 140 about their pitch axes. The pitch axes of the wings 140 can be perpendicular to and intersecting the axis of the actuator output shaft, enabling the depth control device 100 to be extremely compact.

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