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公开(公告)号：KR100442622B1
公开(公告)日：2004-08-02
申请号：KR1020020067446
申请日：2002-11-01
Applicant: 삼성전자주식회사
IPC: G02B6/12
Abstract: PURPOSE: A planar lightwave circuit provided with an optical axis aligning waveguide is provided to reduce the size thereof by reducing the radius of curvature of the optical axis aligning waveguide. CONSTITUTION: A planar lightwave circuit provided with an optical axis aligning waveguide includes a plurality of optical waveguides(580), a plurality of forward direction optical axis aligning waveguides(540,550) and a backward direction optical axis aligning waveguide(530). The plurality of optical waveguides(580) is provided with M x N array structure to multi-branch output the optical signal inputted from the input terminal(510) to the output terminal(520). Each of the forward direction optical axis aligning waveguides(540,550) is provided with a pair of forward direction input channels(541,551) located at the input terminal(510) and a pair of forward direction output channel(542,552) located at the output terminal(520). The backward direction optical axis aligning waveguide(530) includes a backward direction input channel(532), a backward direction branch optical waveguide(531), a pair of backward direction output channels(533,534). The backward direction input channel(532) is positioned at the output terminal(520) to receive the optical axis aligning light. The backward direction branch optical waveguide(531) divides the optical power of the optical axis aligning light. And, the backward direction output channels(533,534) are positioned at the input terminal(510) to output the branched light.
Abstract translation: 目的：提供一种设置有光轴对准波导的平面光波电路，以通过减小光轴对准波导的曲率半径来减小其尺寸。 构成：具备光轴取向波导的平面型光波回路包括多个光波导580，多个正方向光轴取向波导540,550和后向光轴取向波导530。 多个光波导（580）设置有M×N阵列结构以将从输入端（510）输入的光信号多分路输出到输出端（520）。 每个正向光轴对准波导（540,550）设有位于输入端（510）的一对正向输入通道（541,551）和位于输出端（510）的一对正向输出通道（542,552） 520）。 后向光轴对准波导530包括后向输入通道532，后向分支光波导531和反向输出通道533,534。 反向输入通道（532）位于输出端子（520）处以接收光轴对准光。 逆向分支光波导（531）分割光轴对准光的光焦度。 并且，反向输出通道（533,534）位于输入端子（510）处以输出分支的光。
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公开(公告)号：KR1020040038483A
公开(公告)日：2004-05-08
申请号：KR1020020067446
申请日：2002-11-01
Applicant: 삼성전자주식회사
IPC: G02B6/12
Abstract: PURPOSE: A planar lightwave circuit provided with an optical axis aligning waveguide is provided to reduce the size thereof by reducing the radius of curvature of the optical axis aligning waveguide. CONSTITUTION: A planar lightwave circuit provided with an optical axis aligning waveguide includes a plurality of optical waveguides(580), a plurality of forward direction optical axis aligning waveguides(540,550) and a backward direction optical axis aligning waveguide(530). The plurality of optical waveguides(580) is provided with M x N array structure to multi-branch output the optical signal inputted from the input terminal(510) to the output terminal(520). Each of the forward direction optical axis aligning waveguides(540,550) is provided with a pair of forward direction input channels(541,551) located at the input terminal(510) and a pair of forward direction output channel(542,552) located at the output terminal(520). The backward direction optical axis aligning waveguide(530) includes a backward direction input channel(532), a backward direction branch optical waveguide(531), a pair of backward direction output channels(533,534). The backward direction input channel(532) is positioned at the output terminal(520) to receive the optical axis aligning light. The backward direction branch optical waveguide(531) divides the optical power of the optical axis aligning light. And, the backward direction output channels(533,534) are positioned at the input terminal(510) to output the branched light.
Abstract translation: 目的：提供一种设有光轴对准波导的平面光波电路，通过减小光轴对准波导的曲率半径来减小其尺寸。 设置有光轴对准波导的平面光波电路包括多个光波导（580），多个正向光轴对准波导（540,550）和反向光轴对准波导（530）。 多个光波导（580）设置有M×N阵列结构，以将从输入端（510）输入的光信号多分支输出到输出端（520）。 每个正向光轴对准波导（540,550）设置有位于输入端（510）处的一对正向输入通道（541,551）和位于输出端（510）处的一对正向输出通道（542,552） 520）。 反向光轴对准波导（530）包括反向输入通道（532），反向分支光波导（531），一对反向输出通道（533,534）。 反向输入通道（532）位于输出端（520）以接收光轴对准光。 反向分支光波导（531）分割光轴对准光的光功率。 并且，向后方向输出通道（533,534）位于输入端（510）处以输出分支光。
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公开(公告)号：KR1020030093812A
公开(公告)日：2003-12-11
申请号：KR1020020031672
申请日：2002-06-05
Applicant: 삼성전자주식회사
IPC: G02B6/36
Abstract: PURPOSE: A method for fabricating an optical connecting element is provided to connect an optical block and an optical element of the different height and the different width to each other by optimizing structures of an input portion and an output portion of the optical connecting element. CONSTITUTION: A method for fabricating an optical connecting element includes a lower cladding forming process, a core layer forming process, a patterning process, and an annealing process. The lower cladding forming process is to form a lower cladding layer on a substrate. The core layer forming process is to form a core layer on the lower cladding layer. The patterning process is to pattern the core layer. The annealing process is to anneal the patterned core layer and optimize the height and the width of the optical connecting element.
Abstract translation: 目的：提供一种用于制造光学连接元件的方法，通过优化光学连接元件的输入部分和输出部分的结构，将光学块和不同高度和不同宽度的光学元件彼此连接。 构成：用于制造光学连接元件的方法包括下包层形成工艺，芯层形成工艺，图案化工艺和退火工艺。 下包层形成工艺是在衬底上形成下包层。 芯层形成工艺是在下包层上形成芯层。 图案化过程是对芯层进行图案化。 退火过程是退火图案化的芯层并优化光学连接元件的高度和宽度。
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公开(公告)号：KR1020030092675A
公开(公告)日：2003-12-06
申请号：KR1020020030416
申请日：2002-05-30
Applicant: 삼성전자주식회사
IPC: H01L21/304
CPC classification number: H01L21/02065 , B08B7/00
Abstract: PURPOSE: A method for cleaning a semiconductor substrate is provided to prevent a metal layer from being corroded or etched even if the semiconductor substrate includes a tungsten layer by eliminating organic residue as contaminant of the semiconductor substrate while using ozone gas and deionized water vapor. CONSTITUTION: The semiconductor substrate is introduced to the inside of a cleaning chamber(S210). Ozone gas and deionized water vapor are induced to the inside of the cleaning chamber to remove the organic residue(S220). The semiconductor substrate is drawn out from the cleaning chamber(240).
Abstract translation: 目的：提供一种用于清洁半导体衬底的方法，以便即使半导体衬底通过在使用臭氧气体和去离子水蒸汽的同时通过消除作为半导体衬底的污染物的有机残留物而包含钨层来防止金属层被腐蚀或蚀刻。 构成：半导体衬底被引入到清洁室的内部（S210）。 将臭氧气体和去离子水蒸汽引入清洁室内部以除去有机残余物（S220）。 半导体衬底从清洁室240中抽出。
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公开(公告)号：KR1020030000285A
公开(公告)日：2003-01-06
申请号：KR1020010036001
申请日：2001-06-23
Applicant: 삼성전자주식회사
IPC: G02B6/293
CPC classification number: G02B6/29364 , G02B6/29367 , G02B6/2938
Abstract: PURPOSE: A wavelength division multiplexer using a planar waveguide type light wave circuit is provided to simplify a packaging process by using a planar waveguide type light wave circuit and a thin film filter. CONSTITUTION: A planar light wave circuit(200) includes a zigzag optical waveguide(200a). An input optical fiber(202) is adhered at an input portion(P) of the planar light wave circuit(200) in order to receive the light. A thin film filter(201) is adhered to each output port of the zigzag optical waveguide(200a) in order to pass only wavelengths corresponding to central wavelengths and reflect the remaining wavelengths. An output optical fiber(203) is packaged with the thin film filter(201) in order to output only the wavelengths passing through the thin film filter(201). The planar light wave circuit(200) has a waveguide structure formed with a core layer and a cladding layer.
Abstract translation: 目的：提供一种使用平面波导型光波电路的波分复用器，以通过使用平面波导型光波电路和薄膜滤波器来简化封装处理。 构成：平面光波形电路（200）包括锯齿形光波导（200a）。 输入光纤（202）粘附在平面光波电路（200）的输入部分（P）处以便接收光。 为了仅通过对应于中心波长的波长并反射剩余的波长，薄膜滤光片（201）粘附到之字形光波导（200a）的每个输出端口。 输出光纤（203）与薄膜滤光器（201）封装，以仅输出通过薄膜滤光器（201）的波长。 平面光波形电路（200）具有形成有芯层和包覆层的波导结构。
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Patent Agency Ranking
公开(公告)号：KR100293954B1
公开(公告)日：2001-06-15
申请号：KR1019990016784
申请日：1999-05-11
Applicant: 삼성전자주식회사
IPC: G02B6/293
CPC classification number: G02B6/12016
Abstract: 본발명은평탄한주파수응답을가진저손실 AWG 광파장분할기에관한것으로서, 복수의입력광도파로에서입력되는서로다른광신호들의파장을분리또는결합하여다수의출력광도파로로출력하는 AWG 광파장분할/다중화기에있어서, 입력광도파로로부터입력되는입력광신호들의파워를분할하는제1슬라브도파로; 상기제1슬라브도파로로부터입력된광신호들이서로다른위상차를갖도록도파하는광도파로열격자; 상기광도파로열격자로부터출력되는광신호들의파장을분리또는결합하여상기출력도파로들로출력하는제2슬라브도파로; 및상기제2슬라브도파로와출력도파로사이에삽입되어평탄한주파수응답을얻기위한테이퍼도파로로구성된다. 본발명은상기와같은구성에의해평탄한주파수응답을얻고, 손실을최소화한다.
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公开(公告)号：KR1020010011670A
公开(公告)日：2001-02-15
申请号：KR1019990031148
申请日：1999-07-29
Applicant: 삼성전자주식회사
IPC: G02B6/26
Abstract: PURPOSE: A multi/demultiplexer is provided to eliminate an additional device for regularizing a loss by regularizing a minimum loss of an output waveform using an offset. CONSTITUTION: The device is composed of a substrate(51), the first arrayed waveguide(52), the second arrayed waveguide(54), a slab(55), and an optical arrayed waveguide grating(53). The first arrayed waveguide and the second arrayed waveguide comprises a linear arrayed waveguide of an input side, a linear arrayed waveguide of an output side, and a curved arrayed waveguide of an output side respectively. An offset of specific value is provided to a connecting portion between the curved arrayed waveguide and the linear arrayed waveguide. If a signal light of a constant mode progresses along an optical waveguide, the intensity distribution in the curved arrayed waveguide and the intensity distribution in the linear arrayed waveguide are different. The disagreement of the intensity distribution causes the transfer loss of the signal light at the connecting portion between the curved arrayed waveguide and the linear arrayed waveguide. Since the offset of specific value is provided to the connecting portion between the curved arrayed waveguide and the linear arrayed waveguide, it is possible to minimize the transfer loss.
Abstract translation: 目的：提供多/多路分配器以消除用于通过使用偏移来规范输出波形的最小损失来规范损耗的附加装置。 构成：该器件由基片（51），第一阵列波导（52），第二阵列波导（54），平板（55）和光阵列波导光栅（53）组成。 第一阵列波导和第二阵列波导包括输入侧的线性阵列波导，输出侧的线性阵列波导和输出侧的弯曲阵列波导。 在弯曲阵列波导和线性阵列波导之间的连接部分提供具体值的偏移。 如果恒定模式的信号光沿着光波导进行，则弯曲阵列波导中的强度分布和线性阵列波导中的强度分布是不同的。 强度分布的不同意味着在弯曲阵列波导和线性阵列波导之间的连接部分处的信号光的传输损耗。 由于具体值的偏移被提供给弯曲阵列波导和线性阵列波导之间的连接部分，所以可以最小化传输损耗。
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公开(公告)号：KR100277361B1
公开(公告)日：2001-01-15
申请号：KR1019980026832
申请日：1998-07-03
Applicant: 삼성전자주식회사
IPC: G02B6/02
Abstract: 본 발명은 넓은 대역폭을 갖는 광파장 다중화기/분할기에 관한 것으로, 제1광도파로열, 제1광도파로열에 연결되는 제1평면 도파로 영역, 제1평면 도파로 영역에 연결되는 광도파로열 격자, 광도파로열 격자에 연결되는 제2평면 도파로 영역 및 제2평면 도파로 영역에 연결되는 제2광도파로열을 구비하여 입력되는 광파장을 다중화하거나 분할하는 광파장 다중화기/분할기에 있어서, 광도파로열 격자는 광도파로열 격자의 중심파장에서 소정 파장만큼 벗어난 중심파장의 광을 출력하도록 길이가 결정되는 복수의 광도파로 격자로 구성된 복수의 서브 광도파로열 격자를 포함한다.
본 발명에 의하면, 광파장 다중화기/분할기의 AWG를 몇 개의 소그룹으로 나누고 각 그룹을 구성하는 광도파로의 길이를 각각 다르게 함으로써 출력 스펙트럼의 채널당 대역폭을 필요한만큼 늘릴 수 있다.-
公开(公告)号：KR100274804B1
公开(公告)日：2001-01-15
申请号：KR1019980014355
申请日：1998-04-22
Applicant: 삼성전자주식회사
IPC: G02B6/293
CPC classification number: G02B6/12011
Abstract: PURPOSE: Bi-directional optical wavelength multiplexer and demultiplexer are provided to enable lights to be multiplexed and divided by connecting a central waveguide to an interface between a slab waveguide area and a waveguide grating. CONSTITUTION: A waveguide grating has a plurality of waveguides. A slab waveguide area(204) is connected to an arrayed waveguide grating(202). The arrayed waveguide grating further comprises a central waveguide(200) formed at a position, where the lights is projected onto the slab waveguide area from the arrayed waveguide grating at an interface between the waveguide grating and the slab waveguide area is focused, and thus lights which are multiplexed into a plurality of wavelengths are inputted or outputted through the central waveguide. Therefore, it is possible to achieve an optical wavelength multiplexing and demultiplexing from one waveguide grating side to another side and vice versa at the same time, by utilizing, in addition to the plurality of waveguides, the central waveguide enabling the input or output of multiplexed lights at a position not influenced by the output spectrums of the plurality of waveguides.
Abstract translation: 目的：提供双向光波长多路复用器和解复用器，以通过将中央波导连接到平板波导区域和波导光栅之间的接口来使光被复用和分割。 构成：波导光栅具有多个波导。 平板波导区域（204）连接到阵列波导光栅（202）。 阵列波导光栅还包括中心波导（200），该中心波导形成在一个位置处，在波导光栅与平板波导区域之间的界面处，光从阵列波导光栅投射到平板波导区域上，因此点亮 多路复用为多个波长的中央波导输入或输出。 因此，除了多个波导之外，通过利用中央波导使得能够进行多路复用的输入或输出，可以实现从一个波导光栅侧到另一侧的光波长多路复用和解复用，反之亦然 在不受多个波导的输出光谱影响的位置处发光。
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公开(公告)号：KR1020000007469A
公开(公告)日：2000-02-07
申请号：KR1019980026832
申请日：1998-07-03
Applicant: 삼성전자주식회사
IPC: G02B6/02
Abstract: PURPOSE: An optical wavelength multiplexer/demultiplexer having wide band width is provided to increase a band width per channel by dividing an arrayed wave guide grating(AWG) into small groups and by differing a length of an optical wave guide separately. CONSTITUTION: In the optical wavelength multiplexer/demultiplexer having a first arrayed wave guide, a first focusing free space slab region connected with the first arrayed wave guide, an optical AWG connected with the first focusing free space slab region, a second focusing free space slab region connected with the optical AWG, and a second arrayed wave guide connected with the second focusing free space slab region, the AWG includes a plural sub-AWG composed of a plural wave guide grating whose length is decided to output a light of a center wavelength deviated an extent of a predetermined wavelength from the center wavelength.
Abstract translation: 目的：提供具有宽带宽的光学波长多路复用器/解复用器，以通过将阵列波导光栅（AWG）分成小组并分别不同的光波导的长度来增加每通道的带宽。 构成：在具有第一排列波导的光波长多路复用器/多路分解器中，与第一排列波导连接的第一聚焦自由空间板区域，与第一聚焦自由空间板区域连接的光学AWG，第二聚焦自由空间板 与第二聚焦自由空间板区域连接的第二排列波导，AWG包括由多个波导光栅构成的多个子AWG，该多个子AWG的长度决定输出中心波长的光 偏离中心波长的预定波长的程度。
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