Automated focusing, cleaning, and multiple location sampling spectrometer system
    111.
    发明授权
    Automated focusing, cleaning, and multiple location sampling spectrometer system 有权
    自动对焦,清洗和多位置采样光谱仪系统

    公开(公告)号:US09267842B2

    公开(公告)日:2016-02-23

    申请号:US13746110

    申请日:2013-01-21

    Applicant: SCIAPS, INC.

    Inventor: David Day

    Abstract: An analysis system includes a moveable focusing lens, a laser (typically an eye safe laser) having an output directed at the focusing lens, and a spectrometer outputting intensity data from a sample. A controller system is responsive to the spectrometer and is configured to energize the laser, process the output of the spectrometer, and adjust the position of the focusing lens relative to the sample until the spectrometer output indicates a maximum or near maximum intensity resulting from a laser output focused to a spot on the sample.

    Abstract translation: 分析系统包括可移动聚焦透镜,具有指向聚焦透镜的输出的激光器(通常是眼睛安全激光器)以及从样本输出强度数据的光谱仪。 控制器系统响应于光谱仪并且被配置为激励激光器,处理光谱仪的输出,并且调整聚焦透镜相对于样品的位置,直到光谱仪输出指示由激光产生的最大或接近最大强度 输出集中在样品上的一个点。

    SPECTROMETER FOR ANALYSING THE SPECTRUM OF A LIGHT BEAM
    112.
    发明申请
    SPECTROMETER FOR ANALYSING THE SPECTRUM OF A LIGHT BEAM 有权
    用于分析光束光谱的光谱仪

    公开(公告)号:US20150316476A1

    公开(公告)日:2015-11-05

    申请号:US14649096

    申请日:2013-11-29

    Abstract: A spectrometer (100) for analyzing the spectrum of an upstream light beam (1), includes an entrance slit (101) and collimating elements (110) suitable for generating, from the upstream light beam, a collimated light beam (10), characterized in that it also includes: a polarization-dependent diffraction grating (120) suitable for diffracting, at each wavelength (11, 12) of the spectrum of the upstream light beam, the collimated light beam into a first diffracted light beam (11, 12) and a second diffracted light beam (21, 22); optical recombining elements (130) including a planar optical reflecting surface (130) perpendicular to the grating and suitable for deviating at least the second diffracted light beam; and focussing elements (140) suitable for focussing, at each wavelength, the first diffracted light beam and the second diffracted light beam onto one and the same focussing area (141).

    Abstract translation: 用于分析上游光束(1)的光谱的光谱仪(100)包括入射狭缝(101)和适于从上游光束产生准直光束(10)的准直元件(110),其特征在于 因为它还包括:适用于在上游光束的光谱的每个波长(11,12)衍射的偏振相关衍射光栅(120),准直光束成为第一衍射光束(11,12 )和第二衍射光束(21,22); 光学重组元件(130),包括垂直于光栅的平面光学反射表面(130),并且适于至少偏离第二衍射光束; 以及适于在每个波长处将第一衍射光束和第二衍射光束聚焦到同一聚焦区域(141)上的聚焦元件(140)。

    Automated Focusing, Cleaning, and Multiple Location Sampling Spectrometer System
    113.
    发明申请
    Automated Focusing, Cleaning, and Multiple Location Sampling Spectrometer System 有权
    自动聚焦,清洁和多位置采样光谱仪系统

    公开(公告)号:US20140204378A1

    公开(公告)日:2014-07-24

    申请号:US13746110

    申请日:2013-01-21

    Applicant: SCIAPS, INC.

    Inventor: David Day

    Abstract: An analysis system includes a moveable focusing lens, a laser (typically an eye safe laser) having an output directed at the focusing lens, and a spectrometer outputting intensity data from a sample. A controller system is responsive to the spectrometer and is configured to energize the laser, process the output of the spectrometer, and adjust the position of the focusing lens relative to the sample until the spectrometer output indicates a maximum or near maximum intensity resulting from a laser output focused to a spot on the sample.

    Abstract translation: 分析系统包括可移动聚焦透镜,具有指向聚焦透镜的输出的激光器(通常是眼睛安全激光器)以及从样本输出强度数据的光谱仪。 控制器系统响应于光谱仪并且被配置为激励激光器,处理光谱仪的输出,并且调整聚焦透镜相对于样品的位置,直到光谱仪输出指示由激光产生的最大或接近最大强度 输出集中在样品上的一个点。

    Apparatus for and method of measuring bio-chips using uniform total internal reflection illumination
    114.
    发明授权
    Apparatus for and method of measuring bio-chips using uniform total internal reflection illumination 有权
    使用均匀全内反射照明测量生物芯片的装置和方法

    公开(公告)号:US08192686B2

    公开(公告)日:2012-06-05

    申请号:US13221482

    申请日:2011-08-30

    CPC classification number: G01N21/6452 G01N21/648 G01N2201/063

    Abstract: Disclosed herein is an apparatus for and method of measuring bio-chips, which can implement an illumination method of a novel type that illuminates a bio sample (which may be also referred to as a “bio specimen”) through a side face of a substrate using a diffusion plate to form an evanescent field by the illumination light over the entire surface of a substrate so as to uniformly secure brightness of the illuminated light over a wide area of a substrate, thereby more efficiently measuring fluorescence information of a bio-chip over a wide field of view.

    Abstract translation: 本文公开了一种测量生物芯片的装置和方法,其可以实现通过衬底的侧面照射生物样品(其也可以称为“生物样本”)的新型照明方法 使用扩散板通过在基板的整个表面上的照明光形成消逝场,从而均匀地将照明光的亮度保持在基板的宽阔区域上,从而更有效地测量生物芯片的荧光信息 广泛的视野。

    METHOD FOR 2D/3D INSPECTION OF AN OBJECT SUCH AS A WAFER
    115.
    发明申请
    METHOD FOR 2D/3D INSPECTION OF AN OBJECT SUCH AS A WAFER 审中-公开
    用于2D / 3D检查对象的方法,如晶片

    公开(公告)号:WO2017162456A1

    公开(公告)日:2017-09-28

    申请号:PCT/EP2017/055774

    申请日:2017-03-13

    Abstract: The present invention concerns a method for inspecting the surface of an object (10) such as a wafer comprising tridimensional structures (11), using a confocal chromatic device with a plurality of optical measurement channels (24) and a chromatic lens (13) allowing optical wavelengths of a broadband light source (19) to be focused at different axial distances defining a chromatic measurement range, the method comprising a step of obtaining an intensity information corresponding to the intensity of the light actually focused on an interface of the object (10) within the chromatic measurement range at a plurality of measurement points (15) on the object (10) by measuring a total intensity over the full spectrum of the light collected by at least some of the optical measurement channels (24) in a confocal configuration.

    Abstract translation: 本发明涉及一种使用具有多个光学测量通道(24)的共焦彩色装置来检查诸如包括三维结构(11)的晶片的物体(10)的表面的方法, 以及允许宽带光源(19)的光波长聚焦在限定色度测量范围的不同轴向距离处的彩色透镜(13),所述方法包括获得与实际聚焦的光的强度相对应的强度信息的步骤 在物体(10)上的多个测量点(15)处的色度测量范围内的物体(10)的界面上通过测量由至少一些光学测量 渠道(24)在共焦配置。

    INTEGRATED CHROMATIC CONFOCAL SENSOR
    116.
    发明申请
    INTEGRATED CHROMATIC CONFOCAL SENSOR 审中-公开
    集成的色度共焦传感器

    公开(公告)号:WO2017162454A1

    公开(公告)日:2017-09-28

    申请号:PCT/EP2017/055772

    申请日:2017-03-13

    Abstract: The present invention concerns a confocal chromatic device, comprising : at least one chromatic lens (13) with an extended axial chromatism; at least one broadband light source (19); at least one optical detection means (20, 21); and at least one measurement channel (24) with a planar Y-junction (18) made with a planar waveguide optics technology, and arranged for transferring light from said at least one light source (19) towards said at least one chromatic lens (13) and for transferring light reflected back through said at least one chromatic lens (13) towards said at least one optical detection means (20, 21).

    Abstract translation: 本发明涉及一种共焦彩色装置,其包括:至少一个具有延伸的轴向色差的色差透镜(13) 至少一个宽带光源(19); 至少一个光学检测装置(20,21); 以及至少一个测量通道(24),其具有用平面波导光学技术制造的平面Y形接头(18),并且被布置为将来自所述至少一个光源(19)的光传输到所述至少一个色透镜(13 )并且用于将通过所述至少一个色透镜(13)反射回来的光朝向所述至少一个光学检测装置(20,21)传输。

    APPARATUS AND METHODS FOR ANALYZING THE OUTPUT OF MICROFLUIDIC DEVICES
    117.
    发明申请
    APPARATUS AND METHODS FOR ANALYZING THE OUTPUT OF MICROFLUIDIC DEVICES 审中-公开
    用于分析微流体装置输出的装置和方法

    公开(公告)号:WO2016025809A1

    公开(公告)日:2016-02-18

    申请号:PCT/US2015/045235

    申请日:2015-08-14

    Abstract: Microfluidic devices for analyzing droplets are disclosed. A described microfluidic device includes a substrate and a microfluidic channel formed on the substrate. The microfluidic channel includes passages where each passage has a mask pattern configured to modulate a signal of a droplet passing through that passage, such that droplets passing through the passages produce signals. The microfluidic device also includes a detector configured to detect the signals. Methods of analyzing droplets with a microfluidic device having a microfluidic channel formed on a substrate are disclosed. A described method includes passing droplets through the passages, modulating signals form the droplets using mask patterns formed on the passages; and detecting the signals.

    Abstract translation: 公开了用于分析液滴的微流体装置。 所描述的微流体装置包括基底和形成在基底上的微流体通道。 微流体通道包括通道,其中每个通道具有被配置成调制通过该通道的液滴的信号的掩模图案,使得通过通道的液滴产生信号。 微流体装置还包括被配置为检测信号的检测器。 公开了在具有在基底上形成的微流体通道的微流体装置分析液滴的方法。 所描述的方法包括使液滴通过通道,使用形成在通道上的掩模图案调制信号形成液滴; 并检测信号。

    AUTOMATED FOCUSING, CLEANING, AND SAMPLING SPECTROMETER SYSTEM
    118.
    发明申请
    AUTOMATED FOCUSING, CLEANING, AND SAMPLING SPECTROMETER SYSTEM 审中-公开
    自动聚焦,清洗和采样光谱仪系统

    公开(公告)号:WO2014113574A1

    公开(公告)日:2014-07-24

    申请号:PCT/US2014/011863

    申请日:2014-01-16

    Applicant: SCIAPS, INC.

    Inventor: DAY, David

    Abstract: An analysis system includes a moveable focusing lens, a laser (typically an eye safe laser) having an output directed at the focusing lens, and a spectrometer outputting intensity data from a sample. A controller system is responsive to the spectrometer and is configured to energize the laser, process the output of the spectrometer, and adjust the position of the focusing lens relative to the sample until the spectrometer output indicates a maximum or near maximum intensity resulting from a laser output focused to a spot on the sample.

    Abstract translation: 分析系统包括可移动聚焦透镜,具有指向聚焦透镜的输出的激光器(通常是眼睛安全激光器)以及从样本输出强度数据的光谱仪。 控制器系统响应于光谱仪并且被配置为激励激光器,处理光谱仪的输出,并且调整聚焦透镜相对于样品的位置,直到光谱仪输出指示由激光产生的最大或接近最大强度 输出集中在样品上的一个点。

    OPTOMECHANICAL ACCELEROMETER
    119.
    发明申请
    OPTOMECHANICAL ACCELEROMETER 审中-公开
    机电加速度计

    公开(公告)号:WO2013131067A1

    公开(公告)日:2013-09-06

    申请号:PCT/US2013/028763

    申请日:2013-03-01

    Abstract: Technologies are generally described for operating and manufacturing optomechanical accelerometers. In some examples, an optomechanical accelerometer device is described that uses a cavity resonant displacement sensor based on a zipper photonic crystal nano-eavity to measure the displacement, of an integrated test mass generated by acceleration applied to the chip. The cavity-resonant sensor may he folly integrated on-chip and exhibit an enhanced displacement resolution due to its strong optomechanical, coupling. The accelerometer structure may be fabricated in a silicon nitride thin film and constitute a rectangular test mass flexibly suspended on high aspect ratio inorganic nitride nano-tethers under high tensile stress. By increasing the mechanical Q-factors through adjustment of tether width and tether length, the noise-equivalent acceleration (NBA) may be reduced, while maintaining a large operation bandwidth. The mechanical Q-factor may be improved with thinner (e.g.,

    Abstract translation: 技术通常被描述为操作和制造光机加速度计。 在一些示例中,描述了一种机械加速度计装置,其使用基于拉链光子晶体纳米空腔的空腔谐振位移传感器来测量由施加到芯片的加速度产生的积分测试质量的位移。 空腔谐振传感器可能由于其强大的光机械耦合而愚蠢地集成在芯片上并表现出增强的位移分辨率。 加速度计结构可以制造在氮化硅薄膜中,并且在高拉伸应力下构成柔性地悬挂在高纵横比无机氮化物纳米系绳上的矩形测试质量。 通过调整系绳宽度和系绳长度来增加机械Q因子,可以降低噪声等效加速度(NBA),同时保持较大的运行带宽。 可以通过更薄(例如<1微米)和更长的系链(例如10-560微米)来改善机械Q因子。

    欠陥検出方法及び欠陥検出装置並びにこれを備えた欠陥観察装置
    120.
    发明申请
    欠陥検出方法及び欠陥検出装置並びにこれを備えた欠陥観察装置 审中-公开
    缺陷检测方法和缺陷检测装置和缺陷检测装置

    公开(公告)号:WO2011061911A1

    公开(公告)日:2011-05-26

    申请号:PCT/JP2010/006653

    申请日:2010-11-12

    Abstract:  光学式欠陥検査装置または光学式外観検査装置で検出した欠陥を電子顕微鏡等で詳細に観察する装置において、観察対象の欠陥を確実に電子顕微鏡等の視野内に入れることができ、かつ装置規模を小さくできる装置を提供する。 光学式欠陥検査装置または光学式外観検査装置で検出した欠陥を観察する電子顕微鏡5において、欠陥を再検出する光学顕微鏡14を搭載し、この光学顕微鏡14で暗視野観察する際に瞳面に分布偏光素子及び空間フィルタを挿入する構成とする。光学式欠陥検査装置または光学式外観検査装置で検出した欠陥を観察する電子顕微鏡5において、欠陥を再検出する光学顕微鏡14を搭載し、この光学顕微鏡14で暗視野観察する際に瞳面に分布フィルタを挿入する構成とする。

    Abstract translation: 所公开的使用电子显微镜等精细观察由光学外观检查装置或光学缺陷检查装置检测到的缺陷的装置可以将观察到的缺陷可靠地插入电子显微镜领域或 喜欢,可以是一个规模较小的设备。 观察由光学外观检查装置或光学缺陷检查装置检测到的缺陷的电子显微镜(5)具有其中并入有重新检测缺陷的光学显微镜(14),以及空间滤波器和 当使用该光学显微镜(14)进行暗视场观察时,分布偏振元件插入瞳孔平面。 观察由光学外观检查装置或光学缺陷检查装置检测到的缺陷的电子显微镜(5)具有结合了重新检测缺陷的光学显微镜(14),并且插入分配滤波器 在使用该光学显微镜(14)进行暗视场观察时在瞳孔平面上。

Patent Agency Ranking