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公开(公告)号：KR1020090036742A
公开(公告)日：2009-04-15
申请号：KR1020070101956
申请日：2007-10-10
IPC: H03M1/12
Abstract: An A/D converter and a voltage measuring device thereof are provided to reduce voltage consumption and obtain high resolution by using a resonator of an MEMS(Micro Electro-Mechanical System) structure. An A/D converter includes at least one voltage measuring device and a digital signal generator. The voltage measuring device outputs the signal of the frequency determined according to the size of an input voltage. A digital signal generator determines the digital output value according to the output signal outputted from the voltage measuring device. The voltage measuring device includes a membrane(110), a resonator(130), and a detector(150). The input voltage is applied to the membrane. The resonant frequency of the resonator is changed according to the size of the input voltage applied to the membrane. The detector outputs the signal of the same frequency as the resonant frequency.
Abstract translation: 提供A / D转换器及其电压测量装置，以通过使用MEMS（微机电系统）结构的谐振器来降低电压消耗并获得高分辨率。 A / D转换器包括至少一个电压测量装置和数字信号发生器。 电压测量装置输出根据输入电压的大小确定的频率的信号。 数字信号发生器根据从电压测量装置输出的输出信号来确定数字输出值。 电压测量装置包括膜（110），谐振器（130）和检测器（150）。 输入电压施加到膜上。 谐振器的谐振频率根据施加到膜的输入电压的大小而改变。 检测器输出与谐振频率相同频率的信号。
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公开(公告)号：KR100806847B1
公开(公告)日：2008-02-22
申请号：KR1020060088216
申请日：2006-09-12
Applicant: 삼성전자주식회사
CPC classification number: H01Q1/2283 , H01F17/0033 , H01F41/041 , H01Q1/362 , Y10T29/49016 , Y10T29/49018 , Y10T29/49126 , Y10T29/49165
Abstract: A micro antenna and a method for manufacturing the same are provided to realize performance managing a wide-range frequency just by a design change to adjust the number of turns of coil. A micro antenna(200) includes a second substrate(290), an electrode unit(234), vertical electric wire units(230,232), and horizontal electric wire units(240,250). The vertical electric wire units are vertically formed with respect to the second substrate. The horizontal electric wire units are horizontally formed with respect to the second substrate and are electrically connected to the vertical electric wire units. The vertical electric wire units are formed by plating or deposition. The vertical electric wire units are connected by the horizontal electric wire units to form a three-dimension coil structure.
Abstract translation: 提供了一种微型天线及其制造方法，以通过设计变更来实现管理宽频率的性能，以调节线圈的匝数。 微型天线（200）包括第二基板（290），电极单元（234），垂直电线单元（230,232）和水平电线单元（240,250）。 垂直电线单元相对于第二基板垂直地形成。 水平电线单元相对于第二基板水平地形成并且电连接到垂直电线单元。 垂直电线单元通过电镀或沉积形成。 垂直电线单元通过水平电线单元连接以形成三维线圈结构。
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公开(公告)号：KR100713154B1
公开(公告)日：2007-05-02
申请号：KR1020050124170
申请日：2005-12-15
Applicant: 삼성전자주식회사
Abstract: 공압식 RF MEMS 스위치 및 그 제조 방법이 제공된다. 공압식 RF MEMS 스위치는 기판; 기판 위에 배치되고, 적어도 하나가 압축될 때 나머지가 팽창하도록 서로 연통하는 복수의 가변 공기캐비티를 구비하는 공압작동부; 각각 복수의 가변 공기캐비티 중 하나를 통과하도록 배치되고, 각각의 가변 공기캐비티 내에서 서로 일정간격을 두고 떨어진 제1 및 제2스위칭단자를 구비하는 복수의 스위칭선을 포함하는 신호선; 공압작동부와 함께 이동되도록 공압작동부에 설치되고, 가변 공기캐비티가 압축되거나 팽창될 때 압축 또는 팽창된 가변 공기캐비티에 대응하는 스위칭선의 제1 및 제2스위칭단자를 서로 연결하거나 단락시키는 스위칭부; 및 복수의 가변 공기캐비티를 선택적으로 압축시키도록 공압작동부를 작동하는 구동부를 포함하는 것을 특징으로 한다. 본 발명에 따르면, 작은 힘으로 압축될 수 있을 뿐 아니라 하나가 압축될 때 나머지가 팽창하도록 서로 연통하는 복수의 가변 공기캐비티를 구비하는 공압작동부를 통해, 스위칭부가 스위칭선의 스위칭단자를 서로 연결하거나 단락시키도록 동작함으로써, 스위치가 낮은 구동전압으로 구동될 수 있고, 작동 신뢰성이 현저하게 개선될 수 있다.
RF, MEMS, 스위치, 공기, 캐비티, 멤브레인Abstract translation: 提供了一种气动RF MEMS开关及其制造方法。 气动RF MEMS开关包括衬底; 气动致动部分，设置在基底上并具有多个彼此连通的可变气腔，以在至少一个被压缩时扩展剩余部分; 信号线，其包括布置成分别穿过多个可变空气腔中的一个并且具有在每个可变空气腔内彼此间隔开的第一和第二开关端子的多个开关线; 设置气动操作到与气动操作单元，用于改变空气腔的切换单元移动单元上是第一和第二互连的切换线的切换端子，或对应于该压缩或膨胀可变空气腔短路压缩或扩张时 。 以及用于操作气动致动部分以选择性地压缩多个可变气腔的驱动单元。 根据本发明，通过不仅能以较小的力进行压缩气动操作具有多个可变空气腔彼此连通到膨胀的其余部分时，一个压缩单元，连接到开关终端对应的线路的切换彼此开关部分，或短路 该开关可以用低驱动电压驱动，并且操作可靠性可以显着提高。
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公开(公告)号：KR1020070014589A
公开(公告)日：2007-02-01
申请号：KR1020050069374
申请日：2005-07-29
Applicant: 삼성전자주식회사
IPC: H01H59/00
CPC classification number: H01H59/0009
Abstract: A radio frequency MEMS switch is provided to prevent an actuator from sticking to a substrate by generating an electrostatic force between a fixing portion and the actuator. A radio frequency MEMS(Micro-Electro-Mechanical System) switch includes a substrate, a first signal line(320a) and a second signal line(330) spaced apart from each other and deposited on an upper surface of the substrate, an actuator(320) positioned above the first signal line and the second signal line, and a fixing portion(340) positioned above the actuator. The fixing portion makes the actuator in contact with the first signal line and the second signal line when a predetermined driving voltage is applied.
Abstract translation: 提供射频MEMS开关以通过在固定部分和致动器之间产生静电力来防止致动器粘附到基板。 射频MEMS（微电子机械系统）开关包括基板，彼此间隔开并沉积在基板的上表面上的第一信号线（320a）和第二信号线（330），致动器 320），位于所述第一信号线和所述第二信号线之上，以及固定部分（340），位于所述致动器上方。 当施加预定的驱动电压时，固定部分使致动器与第一信号线和第二信号线接触。
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公开(公告)号：KR100620958B1
公开(公告)日：2006-09-08
申请号：KR1020050064337
申请日：2005-07-15
Applicant: 삼성전자주식회사
IPC: H01L29/00
Abstract: 개시된 MEMS 스위치는 기판; 기판 상면에 마련된 고정신호라인; 고정신호라인의 상면으로부터 소정간격 떨어지게 형성되며 상,하 유동 가능한 가동신호라인; 기판상에 형성된 고정전극; 및 고정전극의 상부에 설치됨과 아울러서 가동신호라인과 연결된 가동전극;을 포함한다.
Abstract translation: 所公开的MEMS开关包括衬底; 固定信号线，设置在基板的上表面上; 可移动信号线，形成在距固定信号线的上表面预定距离处并能够上下流动; 形成在基板上的固定电极; 以及设置在固定电极上并连接到可移动信号线的可动电极。
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Patent Agency Ranking
公开(公告)号：KR100620516B1
公开(公告)日：2006-09-06
申请号：KR1020050064798
申请日：2005-07-18
Applicant: 삼성전자주식회사
IPC: H01L29/00
Abstract: 개시된 MEMS 스위치는 그 상면에 신호 라인이 형성된 하부기판; 하부 기판의 상면에 소정의 간격을 두고 설치되며, 그 하면에 멤브레인층이 형성되고, 그 내부에 캐비티가 형성된 상부기판; 캐비티의 내부로 하여 멤브레인 층의 상면에 설치된 바이메탈층; 멤브레인층의 하면에 설치된 발열층; 발열층의 하면에 형성되며, 신호라인과 접촉 또는 이탈되는 컨택 부재;를 포함한다.
Abstract translation: 所公开的MEMS开关包括：其上形成有信号线的下基板; 上基板，其在下基板的上表面上设置有预定空间;膜层，其形成在其下表面上，以及形成在其中的空腔; 设置在膜层的上表面上作为腔体内部的双金属层; 设置在膜层的下表面上的发热层; 接触构件形成在加热层的下表面上并接触或离开信号线。
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公开(公告)号：KR100465233B1
公开(公告)日：2005-01-13
申请号：KR1020020011535
申请日：2002-03-05
Applicant: 삼성전자주식회사
IPC: H01F27/25
Abstract: PURPOSE: A low loss inductor device is provided to achieve a high quality factor value by minimizing substrate loss caused at the inductor device. CONSTITUTION: A support layer(120) is formed on a substrate(100), and the first inductor(110) and the second inductor(130) are formed on bottom and top surfaces of the support layer. The first inductor and the second inductor are formed to have a symmetric structure with respect to the support layer. The support layer is formed of a low dielectric material, and is supported by the substrate so that the first inductor is exposed in air. A connection part is formed to penetrate the support layer and connects the first inductor to the second inductor.
Abstract translation: 目的：提供一种低损耗电感器件，通过最小化在电感器件处引起的衬底损耗来实现高品质因数值。 构成：支撑层（120）形成在衬底（100）上，并且第一电感器（110）和第二电感器（130）形成在支撑层的底部和顶部表面上。 第一电感器和第二电感器形成为相对于支撑层具有对称结构。 支撑层由低介电材料形成，并由衬底支撑，使得第一电感器暴露在空气中。 连接部分形成为穿透支撑层并将第一电感器连接至第二电感器。
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公开(公告)号：KR1020030082045A
公开(公告)日：2003-10-22
申请号：KR1020020020554
申请日：2002-04-16
Applicant: 삼성전자주식회사
IPC: G01R23/00
CPC classification number: G01R21/00 , G01R1/06772
Abstract: PURPOSE: An RF power sensor for measuring the power for RF signal by the capacitance is provided to measure the displacement amount of capacitance generated through the electrostatic force between the signal line formed on the substrate and the bridge. CONSTITUTION: An RF power sensor for measuring the power for RF signal by the capacitance includes a substrate(100), a fixing member(110) fixed by the substrate(100) for forming a signal line(110a) and a ground line(112a) to transmit the RF signals, a bridge(120) connected to the ground line(112a) lifted above the signal line(110a). In the RF power sensor, the bridge(120) is driven by the external driving force and the capacitance is generated between the bridge(120) and the signal line(110a) by the external driving force.
Abstract translation: 目的：提供一种用于通过电容测量RF信号功率的RF功率传感器，以测量通过形成在基板和桥之间的信号线之间的静电力产生的电容的位移量。 构成：用于通过电容测量RF信号的功率的RF功率传感器包括基板（100），由基板（100）固定以形成信号线（110a）的固定部件（110）和接地线（112a） ）传送RF信号，连接到在信号线（110a）上方提升的接地线（112a）的桥（120）。 在RF功率传感器中，桥（120）由外部驱动力驱动，并且通过外部驱动力在桥（120）和信号线（110a）之间产生电容。
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公开(公告)号：KR1020030072015A
公开(公告)日：2003-09-13
申请号：KR1020020011535
申请日：2002-03-05
Applicant: 삼성전자주식회사
IPC: H01F27/25
Abstract: PURPOSE: A low loss inductor device is provided to achieve a high quality factor value by minimizing substrate loss caused at the inductor device. CONSTITUTION: A support layer(120) is formed on a substrate(100), and the first inductor(110) and the second inductor(130) are formed on bottom and top surfaces of the support layer. The first inductor and the second inductor are formed to have a symmetric structure with respect to the support layer. The support layer is formed of a low dielectric material, and is supported by the substrate so that the first inductor is exposed in air. A connection part is formed to penetrate the support layer and connects the first inductor to the second inductor.
Abstract translation: 目的：提供一种低损耗电感器件，通过最小化电感器件引起的衬底损耗来实现高品质因数值。 构成：在基板（100）上形成支撑层（120），并且第一电感器（110）和第二电感器（130）形成在支撑层的底表面和顶表面上。 第一电感器和第二电感器形成为具有相对于支撑层的对称结构。 支撑层由低介电材料形成，并被基板支撑，使得第一电感器暴露在空气中。 连接部分形成为穿透支撑层并将第一电感器连接到第二电感器。
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公开(公告)号：KR1020030039103A
公开(公告)日：2003-05-17
申请号：KR1020010070029
申请日：2001-11-12
Applicant: 삼성전자주식회사
IPC: H01H9/00
Abstract: PURPOSE: A MEMS(Micro Electro Mechanical System) switching device for switching an RF(Radio Frequency) signal by capacitance is provided to improve the efficiency of an RF signal transmission by generating and eliminating the capacitance according to a driving state of a switching contact point. CONSTITUTION: A pair of metal contacts(33) are formed at separate positions on a substrate(31) and transmit an RF signal. A dielectric film(39) is formed between the metal contacts(33) on the substrate(31) and contacts to the metal contacts(33). A switching contact(35) is provided on an upper portion of the dielectric film(39). The switching contact(35) is driven so as to contact to and divide the dielectric film(39) by a driving force from an external to generate capacitance between the metal contacts(33) through the dielectric film(39) when contacting to the dielectric film(39).
Abstract translation: 目的：提供用于通过电容切换RF（射频）信号的MEMS（微机电系统）开关装置，以通过根据开关触点的驱动状态产生和消除电容来提高RF信号传输的效率 。 构成：一对金属触点（33）形成在基板（31）上的分开的位置，并传输RF信号。 介电膜（39）形成在基板（31）上的金属触点（33）之间并与金属触头（33）接触。 在电介质膜（39）的上部设置开关触点（35）。 开关触点（35）被驱动以便通过来自外部的驱动力与电介质膜（39）接触并分开，以在接触电介质时通过电介质膜（39）在金属触点（33）之间产生电容 膜（39）。
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