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    MEMS DIGITAL VARIABLE CAPACITOR DESIGN WITH HIGH LINEARITY
    122.
    发明公开
    MEMS DIGITAL VARIABLE CAPACITOR DESIGN WITH HIGH LINEARITY 审中-公开
    数字变压器MEMS-KONDENSATOR MIT HOHERLINEARITÄT

    公开(公告)号：EP2981981A1

    公开(公告)日：2016-02-10

    申请号：EP14724902.3

    申请日：2014-04-02

    Applicant: Cavendish Kinetics Inc.

    Inventor： KNIPE, Richard, L. ,  VAN KAMPEN, Robertus, Petrus

    IPC: H01G5/16 ,  H01H59/00 ,  H01G5/18

    CPC classification number: H01G5/18 ,  B81B3/0051 ,  B81B3/007 ,  B81B2201/0221 ,  H01G5/011 ,  H01G5/0136 ,  H01G5/16 ,  H01H59/0009 ,  H01H2059/0072

    Abstract: The present invention generally relates to a MEMS DVC and a method for fabrication thereof. The MEMS DVC comprises a plate movable from a position spaced a first distance from an RF electrode and a second position spaced a second distance from the RF electrode that is less than the first distance. When in the second position, the plate is spaced from the RF electrode by a dielectric layer that has an RF plateau over the RF electrode. One or more secondary landing contacts and one or more plate bend contacts may be present as well to ensure that the plate obtains a good contact with the RF plateau and a consistent Cmax value can be obtained. On the figure PB contact is the plate bend contact, SL contact is the Second Landing contact and the PD electrode is the Pull Down electrode.

    Abstract translation: 本发明一般涉及一种MEMS DVC及其制造方法。 MEMS DVC包括可从距离RF电极间隔第一距离的位置移动的板和距离RF电极间隔第二距离的第二位置小于第一距离的板。 当处于第二位置时，板通过在RF电极上具有RF平台的电介质层与RF电极间隔开。 也可以存在一个或多个次级着陆触点和一个或多个板弯曲触点，以确保板获得与RF平台的良好接触，并且可以获得一致的C max值。 在图中，PB接触是板弯接触，SL接触是第二着陆接触，PD电极是下拉电极。

    VARIABLE CAPACITANCE CAPACITOR
    125.
    发明公开
    VARIABLE CAPACITANCE CAPACITOR 审中-公开
    KONDENSATOR MIT VARIABLERKAPAZITÄT

    公开(公告)号：EP2717282A1

    公开(公告)日：2014-04-09

    申请号：EP12793702.7

    申请日：2012-02-13

    Applicant: Alps Electric Co., Ltd.

    Inventor： MURATA, Shinji

    IPC: H01G5/16

    CPC classification number: H01G5/16 ,  B81B3/0056 ,  B81B2201/0221 ,  H01G5/18 ,  H01G5/38

    Abstract: To provide a variable capacitor capable of being driven at a low voltage and yielding a stable capacitance while reducing ripple.
    The variable capacitor includes a plurality of variable capacitor elements connected in parallel with one another, the variable capacitor elements each including a fixed electrode and a movable electrode facing each other, a beam supporting the movable electrode displaceably, and a drive electrode supplied with a drive voltage to change spacing between the fixed electrode and the movable electrode. The variable capacitor further includes drive control means for sequentially applying an AC drive voltage to the drive electrodes of the variable capacitor elements with a predetermined phase difference for each element. The sum of capacitances of the variable capacitor elements is an output capacitance.

    Abstract translation: 提供能够在低电压下驱动并产生稳定电容同时减少纹波的可变电容器。 可变电容器包括彼此并联连接的多个可变电容器元件，每个包括固定电极和彼此面对的可动电极的可变电容器元件，可移动地支撑可移动电极的梁和提供有驱动器的驱动电极 电压以改变固定电极和可动电极之间的间隔。 可变电容器还包括驱动控制装置，用于以每个元件具有预定的相位差顺序地将AC驱动电压施加到可变电容器元件的驱动电极。 可变电容器元件的电容之和是输出电容。

    NON-SYMMETRIC ARRAYS OF MEMS DIGITAL VARIABLE CAPACITOR WITH UNIFORM OPERATING CHARACTERISTICS
    127.
    发明申请
    NON-SYMMETRIC ARRAYS OF MEMS DIGITAL VARIABLE CAPACITOR WITH UNIFORM OPERATING CHARACTERISTICS 审中-公开
    具有均匀运算特性的MEMS数字可变电容器的非对称阵列

    公开(公告)号：WO2015009360A1

    公开(公告)日：2015-01-22

    申请号：PCT/US2014/040235

    申请日：2014-05-30

    Applicant: CAVENDISH KINETICS, INC

    Inventor： VAN KAMPEN, Robertus Petrus

    IPC: B81B3/00 ,  H01G5/16 ,  H01G5/38 ,  H01H59/00

    CPC classification number: B81B3/0086 ,  B81B2201/0221 ,  B81B2203/04 ,  H01G5/16 ,  H01G5/18 ,  H01G5/38 ,  H01H59/0009

    Abstract: The present invention generally relates to a MEMS DVC. The MEMS DVC has an RF electrode and is formed above a CMOS substrate. To reduce noise in the RF signal, a poly-resistor that is connected between a waveform controller and the electrodes of the MEMS element, may be surrounded by an isolated p-well or an isolated n-well. The isolated well is coupled to an RF ground shield that is disposed between the poly-resistor and the MEMS element. Due to the presence of the isolated well that surrounds the poly-resistor, the substrate resistance does not influence the dynamic behavior of each MEMS element in the MEMS DVC and noise in the RF signal is reduced.

    Abstract translation: 本发明一般涉及一种MEMS DVC。 MEMS DVC具有RF电极并且形成在CMOS衬底之上。 为了降低RF信号中的噪声，连接在波形控制器和MEMS元件的电极之间的多电阻器可以被隔离的p阱或隔离的n阱包围。 隔离的阱耦合到设置在多电阻器和MEMS元件之间的RF接地屏蔽。 由于存在围绕多电阻器的隔离阱，衬底电阻不影响MEMS DVC中每个MEMS元件的动态特性，并且降低了RF信号中的噪声。

    MEMS DIGITAL VARIABLE CAPACITOR DESIGN WITH HIGH LINEARITY
    129.
    发明申请
    MEMS DIGITAL VARIABLE CAPACITOR DESIGN WITH HIGH LINEARITY 审中-公开
    MEMS数字可变电容器高线性设计

    公开(公告)号：WO2014165624A1

    公开(公告)日：2014-10-09

    申请号：PCT/US2014/032723

    申请日：2014-04-02

    Applicant: CAVENDISH KINETICS, INC

    Inventor： KNIPE, Richard, L. ,  VAN KAMPEN, Robertus, Petrus

    IPC: H01G5/16 ,  H01H59/00 ,  H01G5/18

    CPC classification number: H01G5/18 ,  B81B3/0051 ,  B81B3/007 ,  B81B2201/0221 ,  H01G5/011 ,  H01G5/0136 ,  H01G5/16 ,  H01H59/0009 ,  H01H2059/0072

    Abstract: The present invention generally relates to a MEMS DVC and a method for fabrication thereof. The MEMS DVC comprises a plate movable from a position spaced a first distance from an RF electrode and a second position spaced a second distance from the RF electrode that is less than the first distance. When in the second position, the plate is spaced from the RF electrode by a dielectric layer that has an RF plateau over the RF electrode. One or more secondary landing contacts and one or more plate bend contacts may be present as well to ensure that the plate obtains a good contact with the RF plateau and a consistent C max value can be obtained. On the figure PB contact is the plate bend contact, SL contact is the Second Landing contact and the PD electrode is the Pull Down electrode.

    Abstract translation: 本发明一般涉及一种MEMS DVC及其制造方法。 MEMS DVC包括可从距离RF电极间隔第一距离的位置移动的板和距离RF电极间隔第二距离的第二位置小于第一距离的板。 当处于第二位置时，板通过在RF电极上具有RF平台的电介质层与RF电极间隔开。 还可以存在一个或多个次级着陆触点和一个或多个板弯曲触点，以确保该板获得与RF平台的良好接触，并且可以获得一致的C max值。 在图中，PB接触是板弯接触，SL接触是第二着陆接触，PD电极是下拉电极。

    ACTUATOR PLATE PARTITIONING AND CONTROL DEVICES AND METHODS
    130.
    发明申请
    ACTUATOR PLATE PARTITIONING AND CONTROL DEVICES AND METHODS 审中-公开
    执行器板分离和控制装置和方法

    公开(公告)号：WO2014145646A1

    公开(公告)日：2014-09-18

    申请号：PCT/US2014/030448

    申请日：2014-03-17

    Applicant: WISPRY, INC.

    Inventor： DEREUS, Dana ,  CUNNINGHAM, Shawn, J. ,  MORRIS, Arthur, S.

    IPC: B81B7/02 ,  H01G5/14

    CPC classification number: B81B3/001 ,  B81B3/0051 ,  B81B3/0056 ,  B81B2201/0221 ,  B81B2203/04 ,  B81B2203/053 ,  H01G4/1227 ,  H01G5/18

    Abstract: Devices and methods of operating partitioned actuator plates to obtain a desirable shape of a movable component of a micro-electro¬ mechanical system (MEMS) device. The subject matter described herein can in some embodiments include a micro-electro-mechanical system (MEMS) device including a plurality of actuation electrodes attached to a first surface, where each of the one or more actuation electrode being independently controllable, and a movable component spaced apart from the first surface and movable with respect to the first surface. Where the movable component further includes one or more movable actuation electrodes spaced apart from the plurality of fixed actuation electrodes.

    Abstract translation: 操作分隔的致动器板以获得微机电系统（MEMS）装置的可移动部件的期望形状的装置和方法。 本文描述的主题可以在一些实施例中包括微电子机械系统（MEMS）装置，其包括附接到第一表面的多个致动电极，其中所述一个或多个致动电极中的每一个可独立控制，以及可移动部件 与第一表面间隔开并可相对于第一表面移动。 在可移动部件还包括与多个固定致动电极间隔开的一个或多个可动致动电极的地方。

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