公开(公告)号：EP1813988A2

公开(公告)日：2007-08-01

申请号：EP07001652.2

申请日：2007-01-25

Applicant: CANON KABUSHIKI KAISHA

Inventor： Shiode, Yoshihiro

IPC: G03F7/20 ,  G01M11/02

CPC classification number: G03F7/706 ,  G01J4/00 ,  G01J2009/0261 ,  G03F7/70566

Abstract: A method for irradiating onto a target optical system plural linearly polarized rays having different polarization directions, and for measuring a polarization characteristic of the target optical system including a birefringence amount R and a fast axis Φ includes the steps of irradiating linearly polarized ray having a polarization direction θ onto the target optical system and obtaining a centroid amount P of the ray that has transmitted through the target optical system, and obtaining the birefringence amount R and the fast axis Φ from P=-R•cos(2θ-Φ) or P=R•cos(2θ-Φ).

Abstract translation: 向目标光学系统照射具有不同偏振方向的多个线偏振光并且测量包括双折射量R和快轴Φ的目标光学系统的偏振特性的方法包括以下步骤：照射具有偏振方向的线性偏振光 并且获得透射通过目标光学系统的射线的质心量P，并且从P = -R·cos（2θ-Φ）或者P获得双折射量R和快轴Φ = R•COS（2θ-Φ）。

公开(公告)号：EP1733180A1

公开(公告)日：2006-12-20

申请号：EP05717892.3

申请日：2005-03-04

Applicant: Renishaw plc

Inventor： MCMURTRY, David Roberts ,  HENSHAW, James Reynolds ,  HOMER, Michael ,  CHAPMAN, Mark Adrian Vincent ,  CHANEY, Raymond John ,  LEE, William Ernest ,  SLACK, Jason Kempton

IPC: G01B9/02

CPC classification number: G01B9/02081 ,  G01B9/02041 ,  G01B9/02084 ,  G01B2290/70 ,  G01J9/02 ,  G01J2009/0234 ,  G01J2009/0261

Abstract: Interferometry apparatus which comprises a measurement light beam (2a, 2b) and a reference light beam (2c, 2d) which interact with each other to cause a spatial fringe pattern (24). An optical device (12) is provided which interacts with the spatial fringe pattern (24), such that light is spatially separated into different directions (30, 32, 34, 36). The intensity modulation in two or more directions of the spatially separated light is phase shifted. The optical device may comprise, for example, a diffractive device, a refractive device or a diffractive optical element.

公开(公告)号：EP1554538A1

公开(公告)日：2005-07-20

申请号：EP02779478.3

申请日：2002-10-11

Applicant: Agilent Technologies Inc

Inventor： KALLMANN, Ulrich ,  STEFFENS, Wolf ,  HAEUSSLER, Ralf ,  NEBENDAHL, Bernd ,  MUELLER, Emmerich ,  CERULLIES, Jens

IPC: G01B9/02

CPC classification number: G01J9/0246 ,  G01B9/02004 ,  G01B9/02007 ,  G01B9/0207 ,  G01B2290/45 ,  G01B2290/60 ,  G01B2290/70 ,  G01J2009/0261

Abstract: The present invention relates to an apparatus and to a method of monitoring an interferometer (2), comprising the steps of: coupling a first optical signal (62) into the interferometer (2) and into a wavelength reference element (18), detecting a first resulting interference signal (68) being a result of interference of parts of the first optical signal (62) in the interferometer (2), detecting a resulting reference signal (70) of the wavelength reference element (18), the resulting reference signal (70) being a result of interaction of the first optical signal (62) with the wavelength reference element (18), and comparing the first resulting interference signal (68) with the resulting reference signal (70) to detect a drift of the interferometer (2), if any.

Abstract translation: 本发明涉及一种监测干涉仪（2）的设备和方法，包括以下步骤：将第一光信号（62）耦合到干涉仪（2）和波长参考元件（18）中，检测 第一结果干涉信号（68）是干涉仪（2）中第一光信号（62）的部分干涉，检测波长基准元件（18）的结果基准信号（70），结果基准信号 （70）作为第一光信号（62）与波长参考元件（18）相互作用的结果，并且将第一所得干涉信号（68）与所得到的参考信号（70）进行比较以检测干涉仪 （2），如果有的话。

公开(公告)号：EP0779719A2

公开(公告)日：1997-06-18

申请号：EP96308939.6

申请日：1996-12-10

Applicant: LITTON SYSTEMS, INC.

Inventor： Hall, David B.

IPC: H04B10/148

CPC classification number: H04B10/61 ,  G01J2009/0261 ,  H04B10/614 ,  H04B10/64

Abstract: A polarization diversity receiver system for yielding multiple heterodyne optical output signals from an incident optical beam having a p-polarized component and an s-polarized component comprises first and second sequentially-arrayed polarizing beamsplitters (42, 54), and three photodetectors (48, 58, 64), each of which receives a heterodyne optical signal. The polarization diversity receiver system tracks the largest of these three signals, and uses only this largest one for subsequent signal processing. There is a minimum for this largest signal that is dependent on the input polarizations of two optical fields whose beat note is the heterodyne signal, so that one can maximize the minimum of this largest of the three heterodyne signals. The first polarizing beamsplitter (42) ideally splits the incident beam into a transmitted beam portion (T), including approximately 100% of the p-polarized component and approximately 33% of the s-polarized component, and a reflected beam portion (R) including approximately 0% of the p-polarized component and approximately 67% of the s-polarized component. The reflected beam portion (R) exits from the first polarizing beamsplitter (42) as a first heterodyne optical output signal, and impinges on a first photodetector (48). The transmitted beam portion (T) exits from the first beamsplitter (42), and then undergoes an effective 45 o rotation of its polarization eigenstates around its axis of propagation, either prior to or during its passage through the second polarizing beamsplitter (54). The second beamsplitter (54) splits the rotated transmitted beam portion into second and third heterodyne optical output signals which respectively impinge upon second and third photodetectors (58, 64).

Abstract translation: 用于从具有p偏振分量和s偏振分量的入射光束产生多个外差光输出信号的偏振分集接收机系统包括第一和第二顺序排列的偏振分束器（42,54）以及三个光电检测器（48,54） 58,64），它们中的每一个都接收外差光信号。 极化分集接收机系统跟踪这三个信号中最大的一个，并且仅使用这个最大的一个用于随后的信号处理。 这个最大信号的最小值取决于两个光场的输入偏振，其中拍音是外差信号，所以可以使三个外差信号中最大的最小值最大。 理想地，第一偏振分束器（42）将入射光束分成包括大约100％的p偏振分量和大约33％的s偏振分量的透射光束部分（T），以及反射光束部分（R） 包括大约0％的p偏振分量和大约67％的s偏振分量。 反射光束部分（R）作为第一外差光学输出信号从第一偏振分束器（42）出射，并撞击在第一光电检测器（48）上。 透射光束部分（T）从第一分束器（42）出射，然后在其穿过第二偏振分束器（54）之前或期间经过其偏振本征态围绕其传播轴的有效45°旋转。 第二分束器（54）将旋转的透射光束部分分成分别照射在第二和第三光电探测器（58,64）上的第二和第三外差光输出信号。

公开(公告)号：EP0342885B1

公开(公告)日：1995-04-12

申请号：EP89304859.5

申请日：1989-05-12

Applicant: Hewlett-Packard Company

Inventor： Parker, David R. ,  Glievef, John H.

IPC: G02B5/28 ,  G01B9/02

CPC classification number: G01J9/02 ,  G01J2009/0261 ,  G02B27/28

公开(公告)号：EP0427797B1

公开(公告)日：1994-09-14

申请号：EP90901537.2

申请日：1990-01-15

Applicant: BÜHLER AG ,  Bran + Lübbe GmbH

Inventor： WAGNER, Heinz ,  LABHART, Martin ,  GLAUS, Ulrich

IPC: G01B9/02 ,  G01J3/45

CPC classification number: G01J3/447 ,  G01B2290/70 ,  G01J3/4537 ,  G01J2009/0261

Abstract: A polarization interferometer comprises a light source (1), a collimator (2), a first polarization element (3), a system of double-refracting elements (4, 5, 6) and a second polarizing element (7) which polarizes the light emerging from the double-refracting element (4, 5, 6) and directs it to a photon detector (8). The double-refractive element (4, 5, 6) consists of two optical wedges (5, 6) which together constitute a right parallepiped and which are arranged so as to slide relative to each other along opposed side surfaces, and a double-refracting plate (4) with parallel faces which acts as a compensator. The optical axis of the compensator (4) makes a finite angle with those of the two wedges (5, 6) in the plane perpendicular to the light beam, the optical axes of both wedges (5, 6) being coincident. The optical axes of the two polarizers (3, 7) are mutually perpendicular or parallel and are not aligned parallel to the axes of the two wedges (5, 6) of the double-refractive element (4, 5, 6).

公开(公告)号：EP0605391A3

公开(公告)日：1994-07-27

申请号：EP94101353.4

申请日：1990-01-15

Applicant: BÜHLER AG ,  Bran + Lübbe GmbH

Inventor： Wagner, Heinz ,  Labhart, Martin ,  Glaus, Ulrich

IPC: G01J3/453 ,  G01J3/447

CPC classification number: G01J3/447 ,  G01B2290/70 ,  G01J3/4537 ,  G01J2009/0261

Abstract: Das Polarisationsinterferometer weist eine Lichtquelle (1), einen Kollimator (2), ein erstes polarisierendes Element (3), ein System von doppelbrechenden Elementen (4,5,6) und ein zweites polarisierendes Element (7) auf, welches das aus dem doppelbrechenden Element (4,5,6) austretende Licht polarisiert und einem Photonendetektor (8) zuführt. Das doppelbrechende Element (4,5,6) besteht dabei aus zwei, längs entgegengesetzter Seitenflächen gegeneinander verschiebbar angeordneten, sich zu einem Quader ergänzenden, optischen Keile (5,6) und einer als Kompensator dienenden doppelbrechenden planparallelen Platte (4). Die optische Achse des Kompensators (4) ist gegenüber derjenigen der beiden Keile (5,6) in der Ebene senkrecht zum Lichtstrahl um einen endlichen Winkel verdreht, wobei die optischen Achsen der beiden Keile (5,6) übereinstimmen. Die optischen Achsen der beiden Polarisatoren (3,7) stehen senkrecht oder parallel zueinander und sind nicht parallel zu den Achsen der beiden Keile (5,6) des doppelbrechenden Elementes (4,5,6) ausgerichtet. Ein monochromatischer Lichtstrahl (9) wird in den von der Lichtquelle (1) erzeugten parallen Lichtstrahl eingekoppelt und nach Durchquerung mindestens des doppelbrechenden Elementes (4,5,6) wieder ausgekoppelt und auf einen Photonendetektor (13) geführt.

公开(公告)号：EP0464337A2

公开(公告)日：1992-01-08

申请号：EP91107213.0

申请日：1991-05-03

Applicant: International Business Machines Corporation

Inventor： Batchelder, John Samuel ,  Taubenblatt, Marc Alan

IPC: G01N15/02 ,  G01N21/49

CPC classification number: G01N15/0205 ,  G01J2009/0261 ,  G01N15/1434 ,  G01N21/45 ,  G01N2015/0238

Abstract: An apparatus is described for classifying particles (30) and includes an optical system for transmitting to a focal plane which includes at least one particle (30), two substantially parallel optical beams (22, 24), the beams (22, 24) being initially mutually coherent but of different polarizations. The beams (22, 24) are displaced and focused in the focal plane. A further optical system is positioned in the path which the beam takes after departing from the focal plane and combines the beams so that a particle-induced phase shift in one beam is manifest by a change in elliptical polarization of the combined beams. A first detector (52) is responsive to the beam's intensity along a first polarization axis to produce a first output and a second detector (54) is responsive to the beams intensity along a second polarization axis to produce a second output. The first and second outputs are added (56) to provide an extinction signal and, in a separate device (218), are subtracted to provide a phase shift signal. The extinction signal and phase shift signal are both fed to a processor (60) which classifies a particle in accordance therewith.

Abstract translation: 描述了一种装置用于分类的粒子（30），并且包括在光学系统，用于向一个焦点，它包括至少一个粒子（30），两个基本上是平面的平行光束（22，24），所述梁（22，24）是 INITIALLY相互连贯的不同极化的，但是。 梁（22，24）被移位，并聚焦在焦平面上。 的进一步的光学系统是其中光束需要从焦平面偏离后并组合梁所以没有在一个光束的粒子引起的相移是通过在组合光束的椭圆偏振的变化清单中的路径定位。 第一检测器（52）响应于沿着第一偏振轴以产生第一输出和第二检测器（54）的光束的强度是响应于强度沿第二偏振轴梁以产生第二输出。 第一和第二输出被相加（56），以提供消光信号，并在一个单独的设备（218）被减去，以提供一个相移信号。 消光信号和相移信号被馈送到一个处理器两者（60），其与存在于分类雅舞蹈的颗粒。

公开(公告)号：EP0427797A1

公开(公告)日：1991-05-22

申请号：EP90901537.0

申请日：1990-01-15

Applicant: BÜHLER AG ,  Bran + Lübbe GmbH

Inventor： WAGNER, Heinz ,  LABHART, Martin ,  GLAUS, Ulrich

IPC: G01B9 ,  G01J3 ,  G01J9

CPC classification number: G01J3/447 ,  G01B2290/70 ,  G01J3/4537 ,  G01J2009/0261

Abstract: Un interféromètre polarisant comprend une source de lumière (1), un collimateur (2), un premier élément polarisant (3), un système d'éléments biréfringents (4, 5, 6) et un deuxième élément polarisant (7) qui polarise la lumière qui sort de l'élément biréfringent (4, 5, 6) et la transmet à un détecteur (8) de photons. L'élément biréfringent (4, 5, 6) comprend deux coins optiques (5, 6) mobiles l'un par rapport à l'autre le long de faces latérales opposées et qui forment ensemble un carré, ainsi qu'une plaque (4) biréfringente à faces planes et parallèles qui sert de compensateur. L'axe optique du compensateur (4) est décalé d'un angle fini par rapport à l'axe des deux coins (5, 6) sur le plan perpendiculaire au rayon de lumière, les axes optiques des deux coins (5, 6) coïncidant. Les axes optiques des deux polariseurs (3, 7) sont perpendiculaires ou parallèles l'un à l'autre et ne sont pas parallèles aux axes des deux coins (5, 6) de l'élément biréfringent (4, 5, 6).

公开(公告)号：TW200741814A

公开(公告)日：2007-11-01

申请号：TW096103023

申请日：2007-01-26

Applicant: 佳能股份有限公司 CANON KABUSHIKI KAISHA

Inventor： 鹽出吉宏 SHIODE, YOSHIHIRO

IPC: H01L ,  G01J

CPC classification number: G03F7/706 ,  G01J4/00 ,  G01J2009/0261 ,  G03F7/70566

Abstract: 一種用於將具有不同偏振方向之複數線性偏振光束照射在一目標光學系統上、及用於測量一包含雙折射量R及快軸���的目標光學系統之偏振特性的方法,該方法包含該等步驟:將具有偏振方向���之線性偏振光束照射在該目標光學系統上,且獲得一已通過該目標光學系統的光束之質心量P;及由P=-R‧cos(2���-���)或P=R‧cos(2���-���)獲得該雙折射量R與該快軸���。

Abstract in simplified Chinese: 一种用于将具有不同偏振方向之复数线性偏振光束照射在一目标光学系统上、及用于测量一包含双折射量R及快轴���的目标光学系统之偏振特性的方法,该方法包含该等步骤:将具有偏振方向���之线性偏振光束照射在该目标光学系统上,且获得一已通过该目标光学系统的光束之质心量P;及由P=-R‧cos(2���-���)或P=R‧cos(2���-���)获得该双折射量R与该快轴���。