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公开(公告)号：DE102004054835A1
公开(公告)日：2006-05-24
申请号：DE102004054835
申请日：2004-11-12
Applicant: VACUTEC HOCHVAKUUM & PRAEZ STE
Inventor： LASER BERND
Abstract: The method involves fixing multiple rod-shaped electrode blanks to one or more carrier members (4). The end portions (6) of the carrier members are processed simultaneously with the electrode banks to form respective electrodes (2) whose cross-section has a circular portion and a non-circular, hyperbolic portion, and carrier elements with two differently shaped, matched end portions. An independent claim is included for a multipolar electrode arrangement.
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公开(公告)号：AU2743000A
公开(公告)日：2000-09-28
申请号：AU2743000
申请日：2000-01-31
Applicant: DATATRONIC DISTRIB INC
Inventor： RUND LARRY D , HEWITT RICHARD P , SIGAFOOS STUART O
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公开(公告)号：DE69030978T2
公开(公告)日：1997-12-11
申请号：DE69030978
申请日：1990-03-23
Applicant: CANON KK
Inventor： NOMURA ICHIRO , TAKEDA TOSHIHIKO , BANNO YOSHIKAZU , KANEKO TETSUYA , ONO HARUHITO , SUZUKI HIDETOSHI
IPC: H01J9/02 , G09F9/30 , H01J1/316 , H01J3/08 , H01J9/14 , H01J29/04 , H01J29/52 , H01J31/12 , H01J31/15 , H01J29/50
Abstract: An electron-beam generator comprises an electron-emitting device and a modulating electrode capable of modulating an electron beam emitted from the electron-emitting device, in accordance with an information signal. The modulating electrode and the electron-emitting device are so laminated as to interpose an insulating substrate therebetween.
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公开(公告)号：DE69030978D1
公开(公告)日：1997-08-07
申请号：DE69030978
申请日：1990-03-23
Applicant: CANON KK
Inventor： NOMURA ICHIRO , TAKEDA TOSHIHIKO , BANNO YOSHIKAZU , KANEKO TETSUYA , ONO HARUHITO , SUZUKI HIDETOSHI
IPC: H01J9/02 , G09F9/30 , H01J1/316 , H01J3/08 , H01J9/14 , H01J29/04 , H01J29/52 , H01J31/12 , H01J31/15 , H01J29/50
Abstract: An electron-beam generator comprises an electron-emitting device and a modulating electrode capable of modulating an electron beam emitted from the electron-emitting device, in accordance with an information signal. The modulating electrode and the electron-emitting device are so laminated as to interpose an insulating substrate therebetween.
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Patent Agency Ranking
公开(公告)号：FR2641412B1
公开(公告)日：1991-02-15
申请号：FR8817484
申请日：1988-12-30
Applicant: THOMSON TUBES ELECTRONIQUES
Inventor： EPSZTEIN BERNARD
Abstract: The invention relates to an electron source (20) formed of at least one elementary electron emitter (31, 31b) comprising an emissive tip (34) having a very small radius of curvature and operating in accordance with the field emission principle. The invention applies particularly in the case of constructions employing technologies used for integrated circuits or in the area of thin-layered films, these technologies enabling a plurality of elementary emitters to be produced on one substrate. … The aim of the invention is in particular to enable an electron beam (F1) to be produced, the intensity of which is independent of possible variations in electron emission by the emissive tip 34. … The emissive tip (34) interacts with an extractor electrode (27), and according to a characteristic of the invention, a control electrode (29), having a negative potential relative to the extractor electrode (27), is arranged downstream of this latter in relation to the sense of propagation (41) of the beam (F1). … …
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公开(公告)号：DD276360A1
公开(公告)日：1990-02-21
申请号：DD32096588
申请日：1988-10-21
Applicant: AKAD WISSENSCHAFTEN DDR
Inventor： JANSSEN DIETMAR , TEICHERT JOCHEN
IPC: H01J3/08
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公开(公告)号：GB2196175A
公开(公告)日：1988-04-20
申请号：GB8623842
申请日：1986-10-03
Applicant: TRIALSITE LTD
Inventor： GARTH SIMON CHRISTOPHER JOHN
IPC: H01L21/66 , G01Q10/02 , G01Q30/02 , G01Q90/00 , G01R31/302 , G21K5/04 , H01J37/04 , H01J37/06 , H01J37/26 , H01J37/28 , H01J3/00 , H01J3/08 , H01J3/26 , H01J37/147
Abstract: Apparatus for producing a pulsed electron beam, particularly adapted for inspecting integrated circuits, includes a beam scanner (10) for causing a continuous electron beam to scan a circle, which beam may emerge from the second of three electrostatic lenses of an electron beam microscope. The beam then passes a deflecting means (12) on the circle for deflecting the beam in a radial direction at selected locations, before being collected by means (14) for collecting the electron pulses from alternate locations to provide a pulsed electron beam.
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公开(公告)号：GB2178203A
公开(公告)日：1987-02-04
申请号：GB8615340
申请日：1986-06-24
Applicant: RADIATION DYNAMICS
Inventor： MALONE HOWARD F
Abstract: A system for regulating the electron beam emission of an accelerator has a filament whose temperature is controlled by pulse width modulation of the current flowing to the filament (8). A variable impedance transformer (4) serially connected between the filament and RF power source (4) is electronically switched between high and low impedance at a rate faster than the thermal time constant of the filament whereby the variations of current flowing in the filament are averaged by the thermal response time of the filament so that the temperature and electron emission level of the filament remain substantially constant. The impedance switching signal is generated in response to changes in current flowing in the high voltage coils of the accelerator. The pulse width can be modulated over a wide range to vary the electron current over a range greater than 2:1. The switching signal is transmitted across the high voltage gradient of the accelerator by an optical link including an LED coupled to a phototransistor (15) by a light pipe (16).
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