Abstract:
PROBLEM TO BE SOLVED: To provide a confocal probe constituted so that any light beam made incident on a part to be observed may have nearly uniform power by restraining the loss of light quantity, and also made compact and thin in terms of diameter. SOLUTION: The confocal probe is provided with an optical fiber for guiding a beam radiated from a light source part and having wavelength of specified width into the confocal probe, a collimating lens for changing the beam emitted from the end face of the optical fiber to parallel beams, a dispersion prism for dispersing the parallel beams to multiple dispersed light beams in accordance with the wavelength, and a condensing means for condensing the multiple dispersed light beams so that the respective dot images of the dispersed light beams formed on the part to be observed may be arranged in a 1st direction. COPYRIGHT: (C)2004,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To provide a scanning laser microscope having an improved mirror driving mechanism and a mirror driven by the mirror driving mechanism. SOLUTION: The scanning laser microscope is provided with drive parts (25a, 25b) to drive a plurality of mirrors (11a, 11b) to reflect luminous flux while adjusting the wavelength width and wavelength band of spectrally resolved luminous flux, and a control part 27 to control the drive parts.
Abstract in simplified Chinese:描述一种用以评估脉冲光束之光谱特征的方法,该脉冲光束由光源产生且朝向微影设备之晶圆。该方法包含:接收由该光束之N个脉冲光谱组成的一集合;保存所接收之该等N个光谱至一保存集合;转换在该保存集合中的该等光谱以形成一转换光谱集合;平均该等转换光谱以形成一平均光谱;以及基于该平均光谱来评估该脉冲光束的一光谱特征。
Abstract in simplified Chinese:本发明可提供一种于各种环境下均保持均匀色彩之发光设备。又,本发明之光源控制设备具有光检测设备,其检测发出不同色彩之光的复数个光源之发光亮度,基于上述光检测设备之检测结果控制上述复数个光源中之至少一个光源之发光亮度,上述光源控制设备之构成为如下:于使自上述光源发出之光向特定方向反射的反射构件设置有贯通孔,隔着上述反射构件于与上述光源侧相反侧设置有上述光检测设备,对于上述贯通孔设置光传播构件。
Abstract in simplified Chinese:本发明提供一种光谱分析工具。在一实施例中,描述一种可在真空紫外(VUV)中运行中分辨率光谱分析所利用的高效构件。在一实施例中,该等技术可用作一适合与一数组侦测器结合使用之高通量光谱仪,该高通量光谱仪用以使VUV中及周围之波长以产生一大体上平场焦平面之方式空间色散。一些实施例利用基于棱镜之光谱仪。一些实施例利用可移动及/或可位于该光谱仪内之侦测组件。在一些实施例中,可提供准直光作为至该光谱仪之一输入。
Abstract:
High-throughput hyperspectral imaging systems (100) are provided. According to an aspect of the invention, a system includes an excitation light source (110); an objective (140) that is configured to image excitation light onto the sample (150), such that the excitation light causes the sample to emit fluorescence light; a channel separator (170) that is configured to separate the fluorescence light into a plurality of spatially dispersed spectral channels; and a sensor (180). The excitation light source (110) includes a light source and a plurality of lenslet arrays. Each of the lenslet arrays is configured to receive light from the light source and to generate a pattern of light, and the patterns of light generated by the lenslet arrays are combined to form the excitation light. The objective is configured to simultaneously image each of the patterns of light to form a plurality of parallel lines or an array of circular spots at different depths of the sample.
Abstract:
An apparatus for analyzing visible and shortwave infrared light includes an input aperture for receiving light that includes a visible wavelength component and a shortwave infrared wavelength component; a first set of one or more lenses configured to relay light from the input aperture; one or more dispersive optical elements configured to disperse light from the first set of one or more lenses; a second set of one or more lenses configured to focus the dispersed light from the one or more dispersive optical elements; and an array detector configured for converting the light from the second set of one or more lenses to electrical signals that include electrical signals indicating intensity of the visible wavelength component and electrical signals indicating intensity of the shortwave infrared wavelength component.
Abstract:
Apparatus for hyperspectral imaging, the apparatus including input optics that receive radiation reflected or radiated from a scene, a spatial modulator that spatially samples radiation received from the input optics to generate spatially sampled radiation, a spectral modulator that spectrally samples the spatially sampled radiation received from the spatial modulator to generate spectrally sampled radiation, a sensor that senses spectrally sampled radiation received from the spectral modulator and generates a corresponding output signal and at least one electronic processing device that controls the spatial and spectral modulators to cause spatial and spectral sampling to be performed, receives output signals and processes the output signals in accordance with performed spatial and spectral sampling to generate a hyperspectral image.