Abstract:
For a substrate having fine convexoconcave patterns on its surface, the dimensions of the convexoconcave patterns in a vertical direction of a quartz glass substrate are controlled to be uniform with extreme accuracy and over the entire substrate surface. The quartz glass substrate is made to have a fictive temperature distribution of at most 4O°C and a halogen concentration of less than 400 ppm, or a fictive temperature distribution of at most 4O°C, a halogen concentration of at least 400ppm and a halogen concentration distribution of at most 400ppm and the etching rate of the surface of the quartz glass substrate is made uniform, whereby the dimensions of the convexoconcave patterns in a vertical direction of the quartz glass substrate are controlled to be uniform with good accuracy and over the entire substrate surface.
Abstract:
Granules based on silicon dioxide and having the properties : Average grain size: 10 to 120 μm BET surface area: 40 to 400 m2/g Pore volume: 0.5 to 2.5 ml/g Pore size distribution: less than 5 % of the total pore volume exists of pores with a diameter
Abstract:
Bei einem bekannten Verfahren erfolgt die Herstellung eines Quarzglas-Bauteils für eine für eine UV-Strahlenquelle durch Erschmelzen von SiO 2 -haltiger Körnung. Um hiervon ausgehend ein kostengünstiges Verfahren anzugeben, mittels dem ein Quarzglas-Bauteil erhalten wird, das sich durch hohe Strahlenbeständigkeit auszeichnet, wird erfindungsgemäß vorgeschlagen, dass synthetisch erzeugte Quarzkristalle zu einem Vorprodukt erschmolzen werden, das aus Quarzglas besteht, das Hydroxylgruppen in einer Anzahl enthält, die größer ist als die Anzahl an SiH-Gruppen, und dass zur Beseitigung von SiH-Gruppen das Vorprodukt einer Temperbehandlung bei einer Temperatur von mindestens 850 °C unterzogen und dabei das Quarzglas-Bauteil erhalten wird. Bei dem erfindungsgemäßen Quarzglas-Bauteil ist das Quarzglas aus synthetisch erzeugten Quarzkristallen erschmolzen, und es weist einen Gehalt an SiH-Gruppen von weniger als 5 x 10 17 Molekülen/cm 3 auf.
Abstract translation:在已知的方法制备用于UV辐射源的石英玻璃部件的通过SiO 2的含谷物的融化。发生 要指定此基础上具有成本效益的方法,通过其获得石英玻璃元件,其特征是高耐辐射性,本发明提出的是合成产生的熔融石英的晶体,以形成一个初步的产品,它由石英玻璃含有以羟基数 比SiH基团的数量越多,并且进行消除SiH基团,所述前体的退火在至少850℃的温度,而获得石英玻璃元件。 在本发明的石英玻璃元件,合成产生的石英晶体的石英玻璃被熔化并具有小于5×10 <17>分子/ cm <3>的SiH基团的含量。
Abstract:
A method of forming an alkali metal oxide-doped optical fiber by diffusing an alkali metal into a surface of a glass article is disclosed. The silica glass article may be in the form of a tube or a rod, or a collection of tubes or rods. The silica glass article containing the alkali metal, and impurities that may have been unintentionally diffused into the glass article, is etched to a depth sufficient to remove the impurities. The silica glass article may be further processed to form a complete optical fiber preform. The preform, when drawn into an optical fiber, exhibits a low attenuation.
Abstract:
A quartz powder, preferably, a synthetic quartz powder prepared by the sol−gel method, which while heated from room temperature to 1700˚C, generates a gas containing CO and CO 2 in amounts of 300 nanoliter/g or less and 30 nanoliter/g or less, respectively; a method for preparing the quartz powder; and a formed glass article prepared by melting the quartz powder and forming the resultant molten quartz. The quartz powder has extremely high purity and quality and the formed glass article contains an extremely small amount of foam.
Abstract:
An object of the present invention is to overcome the problems of the prior art technique, and to provide a heat treatment method as well as a heat treatment apparatus capable of heat treating, with higher efficiency, a synthetic quartz glass for optical use having higher homogeneity and higher purity. Another object of the present invention is to provide an a synthetic quartz glass for optical use. The problems above are solved by, in a method for heat treating a flat cylindrical synthetic quartz glass body provided as the object to be heat treated in a heating furnace, a method for heat treating a synthetic quartz glass for optical use comprising preparing a vessel made of quartz glass and having a flat cylindrical space for setting therein the object synthetic quartz glass body, placing two or more object synthetic quartz glass bodies into the vessel in parallel with each other, filling the space with SiO2 powder, setting the vessel inside the heating furnace with its lid closed, and applying the heat treatment to the vessel.