公开(公告)号：US08989353B2

公开(公告)日：2015-03-24

申请号：US13521725

申请日：2011-03-18

Applicant: Yasuhisa Kaneko

Inventor： Yasuhisa Kaneko

IPC: H01L31/18 ,  C25D5/02 ,  G21K1/06 ,  G21K1/02 ,  C25D3/00 ,  A61B6/00

CPC classification number: G21K1/06 ,  A61B6/4092 ,  A61B6/4291 ,  A61B6/484 ,  C25D3/00 ,  G21K1/02 ,  G21K1/025 ,  G21K2201/06 ,  G21K2201/067 ,  G21K2207/005

Abstract: A conductive substrate (18) and an etching substrate (20) are bonded to each other. An etch mask (25) is formed on the etching substrate (20) using a photolithography technique. On the etching substrate (20), grooves (20a) and X-ray transmitting sections (14b) are formed by dry etching using Bosch process. The grooves (20a) are filled with Au (27) by an electroplating method using the conductive substrate (18) as an electrode. Thus, X-ray absorbing sections (14a) are formed.

Abstract translation: 导电基板（18）和蚀刻基板（20）彼此接合。 使用光刻技术在蚀刻基板（20）上形成蚀刻掩模（25）。 在蚀刻基板（20）上，通过使用Bosch工艺的干蚀刻形成槽（20a）和X射线透过部（14b）。 通过使用导电性基板（18）作为电极的电镀方法将凹槽（20a）填充有Au（27）。 因此，形成X射线吸收部（14a）。

公开(公告)号：US08895946B2

公开(公告)日：2014-11-25

申请号：US13761189

申请日：2013-02-07

Applicant: Media Lario, S.R.L.

Inventor： Natale M. Ceglio ,  Daniel Stearns ,  Jacques Kools ,  Giuseppe Valsecchi ,  Fabio Zocchi ,  Riccardo Binda

IPC: H05G2/00 ,  G21K1/06 ,  G02B5/20 ,  G02B19/00 ,  G02B27/42

CPC classification number: H05G2/005 ,  G02B5/203 ,  G02B19/0095 ,  G02B27/425 ,  G03F7/70033 ,  G03F7/70166 ,  G03F7/70316 ,  G03F7/70575 ,  G03F7/70916 ,  G21K1/067 ,  H05G2/008 ,  G21K2201/06 ,  G21K2201/064

Abstract: Source-collector modules for use with EUV lithography systems are disclosed, wherein the source-collector modules employ a laser-produced plasma EUV radiation source and a grazing-incidence collector. The EUV radiation source is generated by first forming an under-dense plasma, and then irradiating the under-dense plasma with infrared radiation of sufficient intensity to create a final EUV-emitting plasma. The grazing incidence collector can include a grating configured to prevent infrared radiation from reaching the intermediate focus. Use of debris mitigation devices preserves the longevity of operation of the source-collector modules.

Abstract translation: 公开了用于EUV光刻系统的源极集电极模块，其中源极 - 集电极模块采用激光产生的等离子体EUV辐射源和放电入射收集器。 通过首先形成低密度等离子体，然后用足够强度的红外辐射照射低密度等离子体来产生EUV辐射源，以产生最终的EUV发射等离子体。 掠入射收集器可以包括被配置为防止红外辐射到达中间焦点的光栅。 使用碎片减轻装置可以保持源 - 收集器模块的使用寿命。

公开(公告)号：US08744046B2

公开(公告)日：2014-06-03

申请号：US13203095

申请日：2009-03-19

Applicant: Kazuto Yamauchi ,  Hidekazu Mimura ,  Hiromi Okada

Inventor： Kazuto Yamauchi ,  Hidekazu Mimura ,  Hiromi Okada

IPC: G01N23/20

CPC classification number: G01N23/201 ,  G21K2201/06 ,  G21K2207/00

Abstract: Provided are a method and an apparatus of precisely measuring the intensity profile of an x-ray nanobeam, which can measure x-rays having different wavelengths with one knife edge and can perform optimal measurements corresponding to the depth of focus of an x-ray beam and the conditions of other measurement devices, using a dark field measurement method which enables precise measurements of the profile of an x-ray beam using a knife edge and using diffracted and transmitted x-rays. The knife edge (4) is formed of a heavy metal which advances the phase of an x-ray passing therethrough and is fabricated in such a manner that the thickness may change in the longitudinal direction continuously or in a stepwise fashion. The knife edge (4) is so set that an x-ray beam may traverse the knife edge (4) at such a thickness position as to achieve a phase shift in a range wherein a transmitted x-ray and a diffracted x-ray diffracted at the end of the knife edge may reinforce each other, and a superposed x-ray of the diffracted x-ray and the transmitted x-ray is measured by an x-ray detector.

Abstract translation: 提供了一种精确测量x射线nanobeam的强度分布的方法和装置，其可以用一个刀刃测量具有不同波长的x射线，并且可以执行对应于x射线束的焦深的最佳测量 以及使用暗场测量方法的其他测量装置的条件，其能够使用刀刃精确测量X射线束的轮廓并使用衍射和透射的x射线。 刀刃（4）由重金属形成，其使穿过其的X射线的相位前进，并且以这样的方式制造，使得厚度可以在纵向方向上连续地或以逐步的方式改变。 刀刃（4）被设定为使得X射线束可以在这样的厚度位置处横穿刀刃（4），以在其中透射的x射线和衍射的X射线衍射的范围内实现相移 在刀刃的端部可以彼此加强，并且通过x射线检测器测量衍射X射线和透射的X射线的叠加X射线。

公开(公告)号：US20140126703A1

公开(公告)日：2014-05-08

申请号：US14068322

申请日：2013-10-31

Applicant: Carl Zeiss X-ray Microscopy, Inc.

Inventor： Michael Feser ,  Alan Francis Lyon

IPC: G21K1/00

CPC classification number: G21K1/00 ,  G21K1/06 ,  G21K7/00 ,  G21K2201/06 ,  G21K2201/067

Abstract: A compound x-ray lens and method of fabricating these lenses are disclosed. These compound lenses use multiple zone plate stacking to achieve a pitch frequency increase for the resulting combined zone plate. The compound equivalent zone plate includes a first zone plate having an initial pitch frequency stacked onto a second zone plate to form an equivalent compound zone plate. The equivalent zone plate has a pitch frequency that is at least twice the initial pitch frequency. Also, in one example, the equivalent zone plate has a mark-to-space ratio of 1:1.

Abstract translation: 公开了一种复合X射线透镜及其制造方法。 这些复合透镜使用多个区域板堆叠来实现所得到的组合区域板的俯仰频率增加。 化合物等效区域板包括具有堆叠在第二区域板上的初始间距频率以形成等效的复合区域板的第一区域板。 等效区域板具有至少是初始俯仰频率的两倍的俯仰频率。 而且，在一个示例中，等效的带状板具有1：1的标记空间比。

公开(公告)号：US20140049850A1

公开(公告)日：2014-02-20

申请号：US14008570

申请日：2012-02-22

Applicant: Kye Hwan Gil

Inventor： Kye Hwan Gil

IPC: G02B26/08

CPC classification number: G02B26/0825 ,  G02B7/185 ,  G02B7/188 ,  G21K2201/06 ,  G21K2201/067

Abstract: Disclosed is a device for adjusting the curvature of a mirror comprising: a base block; a pair of rotating blocks which are connected to the base block by one or more elastic bodies, respectively, and rotate around the connection portions between the base block and the elastic bodies or elastically return to through the application or release of external forces; a pair of support blocks which are disposed at the pair of rotating blocks, respectively, to support both ends of the mirror and apply bending moments to the both ends of the mirror by the rotation of the pair of rotating blocks; and a driving part for rotating the pair of rotating blocks.

Abstract translation: 公开了一种用于调节反射镜的曲率的装置，包括：基座; 一对旋转块，分别通过一个或多个弹性体连接到基座，并且围绕基座和弹性体之间的连接部分旋转，或者通过外力的施加或释放弹性地返回; 一对支撑块，分别设置在一对旋转块上，以支撑反射镜的两端，并通过一对旋转块的转动将弯矩施加到反射镜的两端; 以及用于旋转所述一对旋转块的驱动部。

公开(公告)号：US20130108020A1

公开(公告)日：2013-05-02

申请号：US13809335

申请日：2011-08-01

Applicant: Taihei Mukaide

Inventor： Taihei Mukaide

IPC: G01N23/20

CPC classification number: G01N23/20 ,  G01N23/04 ,  G01N23/083 ,  G21K1/06 ,  G21K2201/06 ,  G21K2201/067 ,  G21K2207/005

Abstract: An apparatus for deriving X-ray absorbing and phase information comprises; a splitting element for splitting spatially an X-ray, a detector for detecting intensities of the X-rays transmitted through an object, the intensity of the X-rays changing according to X-ray phase and also position changes, and an calculating unit for calculating an X-ray transmittance image, and an X-ray differential phase contrast or phase sift contrast image as the phase information. The X-ray is split into two or more X-rays having different widths, and emitted onto the detector unit. And, the calculating unit calculates the X-ray absorbing and phase information based on a difference, between the two or more X-rays, in correlation between the changing of the phase of the X-ray and the changing the intensity of the X-ray in the detector unit.

Abstract translation: 用于导出X射线吸收和相位信息的装置包括： 用于在空间上分割X射线的分离元件，用于检测透过物体的X射线的强度的检测器，X射线相位变化的X射线的强度以及位置变化，以及用于 计算X射线透射率图像，以及X射线差分相位对比度或相移筛选图像作为相位信息。 X射线被分成具有不同宽度的两个或更多个X射线，并被发射到检测器单元上。 并且，计算单元根据X射线的相位的变化与X射线的强度的变化的关系，基于两个以上的X射线之间的差异来计算X射线吸收和相位信息， 射线在检测器单元。

公开(公告)号：US20130034209A1

公开(公告)日：2013-02-07

申请号：US13641966

申请日：2011-05-20

Applicant: Chidane Ouchi

Inventor： Chidane Ouchi

IPC: G01N23/04

CPC classification number: G01N23/04 ,  A61B6/4291 ,  A61B6/484 ,  G01B11/2527 ,  G01J9/00 ,  G01J9/0215 ,  G01N2223/1016 ,  G01N2223/32 ,  G02B5/18 ,  G02B5/1814 ,  G02B5/1838 ,  G02B5/1842 ,  G02B5/1871 ,  G02B5/189 ,  G21K1/06 ,  G21K2201/06 ,  G21K2207/005

Abstract: Provided is an X-ray imaging apparatus having simple configuration and obtaining differential phase contrast images in two directions crossing each other without rotating the diffraction grating and the masking grating. The apparatus including: a diffraction grating diffracting X-rays; a masking grating masking portions rays and transmitting portions are two-dimensionally arranged to partially mask bright zones of the interference pattern; a moving device changing the relative position between the interference pattern and the masking grating; a detector detecting the intensity distribution of the X-rays transmitted through the masking grating; and a calculator calculating a differential phase contrast image or a phase contrast image of a subject, the calculator being configured to calculate the differential phase contrast image or the phase contrast image in each of two mutually crossing directions on the basis of results of detection performed a plurality of times by the detector.

Abstract translation: 本发明提供一种具有简单结构的X射线成像设备，并且在不旋转衍射光栅和掩蔽光栅的情况下彼此交叉的两个方向获得差分相位差图像。 该装置包括衍射光栅衍射X射线; 屏蔽光栅遮蔽部分光线和透射部分被二维布置以部分地掩蔽干涉图案的亮区; 移动装置改变干涉图案和掩蔽光栅之间的相对位置; 检测器，其检测透过所述掩蔽光栅的X射线的强度分布; 以及计算器，其计算对象的差分相位差图像或相位对比图像，所述计算器被配置为基于检测结果a计算两个相互交叉方向中的每一个中的差分相位对比图像或相位对比图像 多次由检测器。

公开(公告)号：US20130010926A1

公开(公告)日：2013-01-10

申请号：US13634861

申请日：2011-03-29

Applicant: Takuji Tada

Inventor： Takuji Tada

IPC: G21K1/06 ,  G01N23/04

CPC classification number: A61B6/06 ,  A61B6/4291 ,  A61B6/484 ,  G21K2201/06 ,  G21K2207/005

Abstract: A radiographic system includes an X-ray source, a first transmission type grating, a second transmission type grating, a scanning mechanism, and a flat panel detector, and an arithmetic processing section. The first transmission type grating is constituted by connecting a plurality of first grating pieces in a first direction, and the second transmission type grating is constituted by connecting a plurality of second grating pieces in the first direction. In projection onto the flat panel detector with the focus of the X-ray source as a viewpoint, at least one pixel is interposed between each pixel of the flat panel detector onto which a connection point of two adjacent first grating pieces is projected and each pixel onto which a connection portion of two adjacent second grating pieces is projected.

Abstract translation: 射线照相系统包括X射线源，第一透射型光栅，第二透射型光栅，扫描机构和平板检测器，以及算术处理部。 第一透射型光栅通过沿第一方向连接多个第一光栅片而构成，第二透射型光栅通过沿第一方向连接多个第二光栅片而构成。 在将X射线源的焦点作为视点投影到平板检测器上时，在平板检测器的每个像素之间插入至少一个像素，其中两个相邻的第一光栅片的连接点投射到其上，并且每个像素 两个相邻的第二光栅片的连接部分投射到其上。

公开(公告)号：US08340243B2

公开(公告)日：2012-12-25

申请号：US13190770

申请日：2011-07-26

Applicant: Chidane Ouchi ,  Kentaro Nagai ,  Toru Den ,  Hidenosuke Itoh

Inventor： Chidane Ouchi ,  Kentaro Nagai ,  Toru Den ,  Hidenosuke Itoh

IPC: G03H5/00

CPC classification number: G06T7/0002 ,  A61B6/4291 ,  A61B6/484 ,  G01J9/02 ,  G01N23/04 ,  G01N23/20075 ,  G01N2223/401 ,  G21K1/06 ,  G21K2201/06 ,  G21K2201/067

Abstract: An X-ray imaging apparatus includes a phase grating, an absorption grating, a detector, and an arithmetic unit. The arithmetic unit executes a Fourier transform step of performing Fourier transform for an intensity distribution of a Moiré acquired by the detector, and acquiring a spatial frequency spectrum. Also, the arithmetic unit executes a phase retrieval step of separating a spectrum corresponding to a carrier frequency from a spatial frequency spectrum acquired in the Fourier transform step, performing inverse Fourier transform for the separated spectrum, and acquiring a differential phase image.

Abstract translation: X射线成像装置包括相位光栅，吸收光栅，检测器和运算单元。 算术单元执行对由检测器获取的莫尔的强度分布执行傅里叶变换并获取空间频谱的傅里叶变换步骤。 此外，运算单元执行相位检索步骤，从傅里叶变换步骤中获取的空间频谱中分离出与载波频率对应的频谱，对分离的频谱进行傅里叶逆变换，获取差分相位图像。

公开(公告)号：US08139711B2

公开(公告)日：2012-03-20

申请号：US12585283

申请日：2009-09-10

Applicant: Kenji Takahashi

Inventor： Kenji Takahashi

IPC: G03H5/00 ,  G01N23/20 ,  G01B9/021

CPC classification number: A61B6/4014 ,  A61B6/00 ,  A61B6/032 ,  A61B6/4233 ,  A61B6/466 ,  A61B6/484 ,  G03B42/026 ,  G21K1/06 ,  G21K2201/06 ,  G21K2201/064 ,  G21K2201/067 ,  G21K2207/005

Abstract: A radiation phase image radiographing apparatus, including a radiation emission unit having multiple radiation sources for emitting radiation onto a subject, the radiation sources being distributed such that radiation emitted from each of the radiation sources and transmitted through the subject forms a part of a projected image of the subject, a first diffraction grating configured to be exposed to the radiation emitted from the multiple radiation sources of the radiation emission unit and to produce a Talbot effect by the exposure, a second diffraction grating for diffracting the radiation diffracted by the first diffraction grating, and a radiation image detector for detecting the radiation diffracted by the second diffraction grating.

Abstract translation: 一种辐射相位图像摄影装置，包括具有用于向对象发射辐射的多个辐射源的辐射发射单元，辐射源被分布成使得从每个辐射源发射并透射通过对象的辐射形成投影图像的一部分 被配置为暴露于从辐射发射单元的多个辐射源发射的辐射并且通过曝光产生Talbot效应的第一衍射光栅，用于衍射由第一衍射光栅衍射的辐射的第二衍射光栅 以及用于检测由第二衍射光栅衍射的辐射的放射线图像检测器。