公开(公告)号：US20070075387A1

公开(公告)日：2007-04-05

申请号：US11562331

申请日：2006-11-21

Applicant: Joseph McAlexander

Inventor： Joseph McAlexander

IPC: H01L29/84

CPC classification number: H01H35/14 ,  B81B2201/0235 ,  B81B2201/032 ,  B81C1/0015 ,  B81C2201/019 ,  G01P15/125 ,  G01P15/135 ,  G01P2015/0828 ,  H01H1/0036

Abstract: An acceleration sensor includes a semiconductor substrate, a first layer formed on the substrate, a first aperture within the first layer, and a beam coupled at a first end to the substrate and suspended above the first layer for a portion of the length thereof. The beam includes a first boss coupled to a lower surface thereof and suspended within the first aperture, and a second boss coupled to an upper surface of the second end of the beam. A second layer is positioned on the first layer over the beam and includes a second aperture within which the second boss is suspended by the beam. Contact surfaces are positioned within the apertures such that acceleration of the substrate exceeding a selected threshold in either direction along a selected axis will cause the beam to flex counter to the direction of acceleration and make contact through one of the bosses with one of the contact surfaces.

Abstract translation: 加速度传感器包括半导体衬底，形成在衬底上的第一层，第一层内的第一孔，以及在第一端处耦合到衬底并在其长度的一部分上悬浮在第一层上方的梁。 梁包括联接到其下表面并悬挂在第一孔内的第一凸起，以及联接到梁的第二端的上表面的第二凸台。 第二层位于梁上的第一层上，并且包括第二孔，第二凸起由梁悬挂在该第二孔内。 接触表面定位在孔内，使得沿着所选择的轴线在任一方向超过选定阈值的基底的加速度将导致梁相对于加速方向弯曲并且通过一个凸起与其中一个接触表面 。

公开(公告)号：US20050082946A1

公开(公告)日：2005-04-21

申请号：US10896769

申请日：2004-07-22

Applicant: Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura ,  Natsumi Shimogawa ,  Takayoshi Akao

Inventor： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura ,  Natsumi Shimogawa ,  Takayoshi Akao

IPC: B81B3/00 ,  G02B26/08 ,  H01L41/04 ,  H01L41/09

CPC classification number: B81B3/0018 ,  B81B2201/032 ,  G02B26/0841 ,  G02B26/0858 ,  H01L41/0474 ,  H01L41/0973 ,  H04R17/005 ,  H04R2201/003

Abstract: An actuator element has a plate member, a piezoelectric/electrostrictive body disposed in facing, relation to the plate member, and a beam disposed between the plate member and the piezoelectric/electrostrictive body and fixing the piezoelectric/electrostrictive body to the plate member. The piezoelectric/electrostrictive body has a piezoelectric/electrostrictive layer, an upper electrode formed on a surface of the piezoelectric/electrostrictive layer which faces the plate member, and a lower electrode formed on a surface of the piezoelectric/electrostrictive layer which is opposite to the surface thereof facing the plate member. When an electric field is applied to the upper electrode and the lower electrode, a portion of the piezoelectric/electrostrictive body is displaced toward or away from the plate member.

Abstract translation: 致动器元件具有板构件，与板构件相对设置的面对的压电/电致伸缩体，以及设置在板构件和压电/电致伸缩体之间的梁，并将压电/电致伸缩体固定到板构件。 压电/电致伸缩体具有压电/电致伸缩层，形成在压电/电致伸缩层的面向板构件的表面上的上电极和形成在与压电/电致伸缩层相对的压电/电致伸缩层的表面上的下电极 其表面面向板构件。 当电场施加到上电极和下电极时，压电/电致伸缩体的一部分朝向或远离板构件移动。

公开(公告)号：US20050011191A1

公开(公告)日：2005-01-20

申请号：US10885280

申请日：2004-07-06

Applicant: Michael Sinclair

Inventor： Michael Sinclair

IPC: B81B3/00 ,  F02G1/04 ,  F03G7/06 ,  F01B29/10

CPC classification number: F03G7/06 ,  B81B3/0024 ,  B81B3/0037 ,  B81B2201/032 ,  B81B2203/0109 ,  B81B2203/051 ,  F02G1/04

Abstract: A unilateral in-plane thermal buckle-beam microelectrical mechanical actuator is formed on a planar substrate of semiconductor material, for example. The actuator includes first and second anchors secured to the substrate and a floating shuttle positioned movably parallel to the substrate. Symmetric first and second sets of elongated thermal half-beams are secured between the floating shuttle and the respective first and second anchors. The first and second anchors and the first and second sets of thermal half-beams are positioned along one side of the floating shuttle. The half-beams are formed of semiconductor material, such as polysilicon. A current source directs electrical current through the thermal half beams via the anchors to impart thermal expansion of the thermal half-beams and hence linear motion of the floating center beam generally parallel to the substrate. A floating cold beam connected between the shuttle and the substrate constrains and amplifies the motion of the shuttle in a predefined direction.

Abstract translation: 例如，在半导体材料的平面基板上形成单边平面内的热扣梁微电机械致动器。 致动器包括固定到基板的第一和第二锚固件以及平行于基板可移动地定位的浮动梭。 对称的第一和第二组细长的热半束固定在浮动梭和相应的第一和第二锚固件之间。 第一和第二锚定装置以及第一和第二组热半束装置沿浮动梭的一侧定位。 半波束由诸如多晶硅的半导体材料形成。 电流源通过锚定器引导电流通过热半束，以赋予热半光束的热膨胀，并因此使浮动中心光束与基底平行的线性运动。 连接在梭子和基底之间的浮动冷束限制并放大梭子在预定方向上的运动。

公开(公告)号：US06840642B2

公开(公告)日：2005-01-11

申请号：US10464663

申请日：2003-06-19

Applicant: Hiroichi Ishikawa ,  Kanji Yokomizo

Inventor： Hiroichi Ishikawa ,  Kanji Yokomizo

IPC: G02F1/00 ,  B81B3/00 ,  G02B26/08 ,  G02B7/182

CPC classification number: G02B26/0866 ,  B81B3/0051 ,  B81B2201/032 ,  B81B2201/042 ,  B81B2203/058

Abstract: A thermally actuated micro mirror includes a mirror surface, and a support structure section having a multilayer structure to support the mirror surface. The support structure section generates heat by the application of electricity thereto, and is deflected by a difference in coefficient of thermal expansion in the multilayer structure, thereby tilting the mirror surface at an arbitrary angle. The support structure section is disposed between the mirror surface and an electrode section for applying electricity. A longitudinal axis of the support structure section is perpendicular to the center axis of the mirror surface, and the longitudinal center of the support structure section is substantially placed on the center axis of the mirror surface. Therefore, the turning axis of the mirror surface is not displaced, and the light reflecting position does not move on the mirror surface.

Abstract translation: 热致动微反射镜包括镜面，以及支撑结构部分，其具有支撑镜面的多层结构。 支撑结构部分通过施加电力而产生热量，并且由于多层结构中的热膨胀系数的差异而偏转，从而以任意的角度倾斜镜面。 支撑结构部分设置在镜面和用于施加电力的电极部分之间。 支撑结构部分的纵向轴线垂直于镜面的中心轴线，并且支撑结构部分的纵向中心基本上位于镜面的中心轴线上。 因此，镜面的旋转轴线不会发生位移，反射镜位置不会在镜面上移动。

公开(公告)号：US06830944B1

公开(公告)日：2004-12-14

申请号：US10332559

申请日：2003-07-23

Applicant: Johannes G. Smits

Inventor： Johannes G. Smits

IPC: H01L2100

CPC classification number: B81B3/0018 ,  B81B2201/032 ,  G02B26/0858

Abstract: A plurality of MEMS devices that can be easily configured to impart extended ranges of rotational and/or translational motion. The MEMS devices comprise a micro-electromechanical building block including a bendable member having a first end connectable to a support structure, and a straight rigid member having a first end connected to a second end of the bendable member. In the event the bendable member is in a straight condition, the rigid member extends from the second end of the bendable member toward the support structure. Further, the bendable member has a predetermined length, and the rigid member has a length at least within a range from one half to the full predetermined length of the bendable member to allow a free end of the rigid member to undergo extended rotational and/or translational motion in response to a displacement of the bendable member. The respective MEMS devices can be employed as actuators or sensors in a variety of micro-electromechanical and micro-opto-electromechanical applications.

Abstract translation: 多个MEMS器件可以容易地构造成赋予延伸的旋转和/或平移运动范围。 MEMS器件包括微机电构建块，其包括具有可连接到支撑结构的第一端的可弯曲构件，以及具有连接到可弯曲构件的第二端的第一端的直的刚性构件。 在可弯曲构件处于直线状态的情况下，刚性构件从可弯曲构件的第二端朝向支撑结构延伸。 此外，可弯曲构件具有预定长度，并且刚性构件的长度至少在可弯曲构件的一半到整个预定长度的范围内，以允许刚性构件的自由端经历延伸的旋转和/或 响应于可弯曲构件的位移的平移运动。 各种MEMS器件可以用作各种微机电和微光机电应用中的致动器或传感器。

公开(公告)号：US20040227428A1

公开(公告)日：2004-11-18

申请号：US10868603

申请日：2004-06-14

Applicant: Microsoft Corporation

Inventor： Michael J. Sinclair

IPC: H02K005/16 ,  H02K007/08 ,  H02N001/00

CPC classification number: B81B3/0054 ,  B81B2201/032 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047

Abstract: An electrostatic bimorph actuator includes a cantilevered flexible bimorph arm that is secured and insulated at one end to a planar substrate. In an electrostatically activated state the bimorph arm is generally parallel to the planar substrate. In a relaxed state, residual stress in the bimorph arm causes its free end to extend out-of-plane from the planar substrate. The actuator includes a substrate electrode that is secured to and insulated from the substrate and positioned under and in alignment with the bimorph arm. An electrical potential difference applied between the bimorph arm and the substrate electrode imparts electrostatic attraction between the bimorph arm and the substrate electrode to activate the actuator. As an exemplary application in which such actuators could be used, a microelectrical mechanical optical display system is described.

Abstract translation: 静电双压电晶片致动器包括悬臂式柔性双压电晶臂，其在一端固定并绝缘到平面衬底。 在静电激活状态下，双压电晶片臂通常平行于平面衬底。 在松弛状态下，双压电晶片臂中的残余应力使其自由端从平面基板向外延伸。 致动器包括固定到基板并与基板绝缘并位于双压电晶片臂下方并与之对准的基板电极。 施加在双压电晶片臂和衬底电极之间的电势差使得双压电晶片臂和衬底电极之间的静电吸引力激活致动器。 作为可以使用这种致动器的示例性应用，描述了一种微电子机械光学显示系统。

公开(公告)号：US06812820B1

公开(公告)日：2004-11-02

申请号：US09554272

申请日：2000-06-06

Applicant: Yves Fouillet

Inventor： Yves Fouillet

IPC: H01H3732

CPC classification number: H01H1/0036 ,  B81B3/0024 ,  B81B2201/016 ,  B81B2201/032 ,  H01G5/16 ,  H01H2001/0042 ,  H01H2037/008 ,  Y10T29/42 ,  Y10T29/49105 ,  Y10T29/49117 ,  Y10T29/49124 ,  Y10T29/49128 ,  Y10T29/49155

Abstract: The invention concerns a microsystem, in particular for producing microswitches or microvalves, constituted on a substrate (50) and used for producing a shift between a first operating state and a second operating state by means of a heat actuated device with bi-metal switch effect. The heat-actuated device comprises a deformable element (51) connected, by opposite ends, to the substrate (50) so as to present naturally a deflection without stress relative to the substrate surface which faces it, said natural deflection determining the first operating state, the second operating state being produced by the heat-actuated device which induces, by the effect of temperature variation, a deformation of the deformable element (51) tending to reduce its deflection and submitting it to a compressive stress by buckling effect in a direction opposite to its natural deflection.

Abstract translation: 本发明涉及一种微系统，特别是用于制造微型开关或微型阀，其构造在基板（50）上并用于通过具有双金属开关效应的热致动装置在第一操作状态和第二操作状态之间产生换档 。 热致动装置包括通过相对端连接到基板（50）的可变形元件（51），以便相对于面向其的基板表面自然地呈现不受应力的偏转，所述自然偏转确定第一操作状态 所述第二操作状态由所述热驱动装置产生，所述热致动装置通过温度变化而引起所述可变形元件（51）的变形，所述变形元件倾向于减小其偏转，并且通过在方向上的屈曲效应使其变形为压缩应力 与其自然变形相反。

公开(公告)号：US06797631B2

公开(公告)日：2004-09-28

申请号：US10209866

申请日：2002-08-02

Applicant: Tae-Song Kim ,  Hyung-Joon Kim ,  Yong-Bum Kim

Inventor： Tae-Song Kim ,  Hyung-Joon Kim ,  Yong-Bum Kim

IPC: H01L21301

CPC classification number: G01N29/036 ,  B81B3/0021 ,  B81B2201/0214 ,  B81B2201/032 ,  B81B2203/0118 ,  B81C1/0015 ,  G01N2291/0256

Abstract: A high-sensitive micro cantilever sensor and a method for fabricating the same which is able to reduce size of a system greatly using a functional thin film has a structure in which an upper substrate comprising one or two piezoelectric cells including a cantilever, a piezoelectric layer formed on lower or upper surface of the cantilever, and electrodes formed on upper and lower surfaces of the piezoelectric layer is attached to a lower substrate including a cavity of an even depth by contacting the lower surface of the piezoelectric cell on the upper substrate with the cavity surface of the lower substrate.

Abstract translation: 使用功能性薄膜能够大大减小系统尺寸的高灵敏度微悬臂式传感器及其制造方法具有如下结构：其中，包括一个或两个压电单元的上基板包括悬臂，压电层 形成在悬臂的下表面或上表面上，并且形成在压电层的上表面和下表面上的电极通过使上基板上的压电单元的下表面与 下基板的腔表面。

公开(公告)号：US20040164649A1

公开(公告)日：2004-08-26

申请号：US10375975

申请日：2003-02-25

Applicant: PALO ALTO RESEARCH CENTER INCORPORATED

Inventor： Baomin Xu ,  William S. Wong

IPC: H02N002/00 ,  H01L041/04 ,  H01L041/08 ,  H01L041/18

CPC classification number: B81B3/0024 ,  B81B2201/032 ,  H01L41/094 ,  H01L41/22 ,  H01L41/313 ,  H01L41/314 ,  H01L41/337 ,  Y10T29/42 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49147 ,  Y10T29/49155 ,  Y10T29/49156

Abstract: A bimorph structure is produced by depositing a first material on a first surface of a first substrate to form a first element structure. A second material is deposited onto a surface of a second substrate to form a second element structure. Electrodes are deposited on a surface of each of the first element structure and the second element structure. The first element structure is bonded to a first transfer substrate, and the second element structure is bonded to a second transfer substrate. The first substrate is removed from the first element structure, and the second substrate is removed from the second element structure. Second side electrodes are deposited on a second surface of each of the first element structures and the second element structure. The first element structure and the second element structure are directly bonded to each other. One of the first transfer substrate and the second transfer substrate is then removed, and the surface of the element structure from which one of the transfer substrates has been removed is bonded to a final target substrate. Thereafter, the other transfer substrate is removed, and electrical connections are made. In a further embodiment, a micro-electromechanical dimensioned bimorph structure includes a first element structure, and a second element structure. A bonding layer bonds the first element structure directly to the second element structure.

Abstract translation: 通过在第一基板的第一表面上沉积第一材料以形成第一元件结构来生产双压电晶片结构。 将第二材料沉积到第二基板的表面上以形成第二元件结构。 电极沉积在第一元件结构和第二元件结构中的每一个的表面上。 第一元件结构被结合到第一转移衬底，并且第二元件结构被结合到第二转移衬底。 从第一元件结构去除第一衬底，并且从第二元件结构去除第二衬底。 第二侧电极沉积在每个第一元件结构和第二元件结构的第二表面上。 第一元件结构和第二元件结构彼此直接结合。 然后去除第一转印衬底和第二转印衬底之一，并且去除了一个转印衬底的元件结构的表面被结合到最终靶衬底。 此后，移除另一转印基板，并进行电连接。 在另一实施例中，微机电尺寸的双压电晶片结构包括第一元件结构和第二元件结构。 结合层将第一元件结构直接结合到第二元件结构。

公开(公告)号：US20030032293A1

公开(公告)日：2003-02-13

申请号：US10209866

申请日：2002-08-02

Applicant: Korean Institute of Science And Technology

Inventor： Tae-Song Kim ,  Hyung-Joon Kim ,  Yong-Bum Kim

IPC: H01L021/311

CPC classification number: G01N29/036 ,  B81B3/0021 ,  B81B2201/0214 ,  B81B2201/032 ,  B81B2203/0118 ,  B81C1/0015 ,  G01N2291/0256

Abstract: A high-sensitive micro cantilever sensor and a method for fabricating the same which is able to reduce size of a system greatly using a functional thin film has a structure in which an upper substrate comprising one or two piezoelectric cells including a cantilever, a piezoelectric layer formed on lower or upper surface of the cantilever, and electrodes formed on upper and lower surfaces of the piezoelectric layer is attached to a lower substrate including a cavity of an even depth by contacting the lower surface of the piezoelectric cell on the upper substrate with the cavity surface of the lower substrate.

Abstract translation: 使用功能性薄膜能够大大减小系统尺寸的高灵敏度微悬臂式传感器及其制造方法具有如下结构：其中，包括一个或两个压电单元的上基板包括悬臂，压电层 形成在悬臂的下表面或上表面上，并且形成在压电层的上表面和下表面上的电极通过使上基板上的压电单元的下表面与 下基板的腔表面。