公开(公告)号：US07408641B1

公开(公告)日：2008-08-05

申请号：US11058153

申请日：2005-02-14

Applicant: Hidong Kwak ,  Shankar Krishnan ,  Shing Lee ,  Haixing Zou

Inventor： Hidong Kwak ,  Shankar Krishnan ,  Shing Lee ,  Haixing Zou

IPC: G01J4/00

CPC classification number: G01J3/10 ,  G01B11/0641 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/0237 ,  G01J3/14 ,  G01J3/1809 ,  G01N21/211 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/212 ,  G01N2021/213 ,  G01N2021/95676

Abstract: An illumination subsystem configured to provide illumination for a measurement system includes first and second light sources configured to generate light for measurements in different wavelength regimes. The illumination subsystem also includes a TIR prism configured to be moved into and out of an optical path from the first and second light sources to the measurement system. If the TIR prism is positioned out of the optical path, light from only the first light source is directed along the optical path. If the TIR prism is positioned in the optical path, light from only the second light source is directed along the optical path. Various measurement systems are also provided. One measurement system includes an optical subsystem configured to perform measurements of a specimen using light in different wavelength regimes directed along a common optical path. The different wavelength regimes include vacuum ultraviolet, ultraviolet, visible, and near infrared wavelength regimes.

Abstract translation: 被配置为为测量系统提供照明的照明子系统包括被配置为产生用于不同波长方案中的测量的光的第一和第二光源。 照明子系统还包括被配置为移入和移出从第一和第二光源到测量系统的光路的TIR棱镜。 如果TIR棱镜位于光路外，则仅沿着光路引导来自第一光源的光。 如果TIR棱镜位于光路中，则仅沿着光路引导来自第二光源的光。 还提供了各种测量系统。 一个测量系统包括光学子系统，该光学子系统被配置为使用沿着公共光路引导的不同波长方式的光来对样本进行测量。 不同的波长方案包括真空紫外线，紫外线，可见光和近红外波长方案。

公开(公告)号：US20080094626A1

公开(公告)日：2008-04-24

申请号：US11629143

申请日：2005-06-02

Applicant: Helmut Becker-Ross ,  Stefan Florek ,  Gunter Wesemann ,  Michael Okruss

Inventor： Helmut Becker-Ross ,  Stefan Florek ,  Gunter Wesemann ,  Michael Okruss

IPC: G01J3/28

CPC classification number: G01J3/1809 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/0237 ,  G01J3/0286 ,  G01J3/0294 ,  G01J3/08 ,  G01J3/12 ,  G01J3/2803

Abstract: The invention relates to a spectrometer arrangement (10) comprising a spectrometer (14) for producing a spectrum of a first wavelength range of radiation from a radiation source on a detector (42). Said arrangement also comprises: an Echelle grating (36) for the spectral decomposition of the radiation penetrating the spectrometer arrangement (10) in a main dispersion direction (46); a dispersing element (34) for separating the degrees by means of spectral decomposition of the radiation in a transversal dispersion direction (48) which forms an angle with the main dispersion direction of the Echelle grating (36), in such a way that a two-dimensional spectrum (50) can be produced with a plurality of separated degrees (52); an imaging optical element (24, 38) for imaging the radiation penetrating through an inlet gap (20) into the spectrometer arrangement (10), in an image plane (40); and a surface detector (42) comprising a two dimensional arrangement of a plurality of detector elements in the image plane (40). The inventive arrangement is characterised in that another spectrometer (12) comprising at least one other dispersing element (64) and another imaging optical element (60,66) is provided in order to produce a spectrum (68) of a second wavelength range of radiation, which is different from the first wavelength range, from a radiation source on the same detector (42). The spectra can be spatially or temporally separated on the detector.

Abstract translation: 本发明涉及一种分光计装置（10），其包括用于产生来自检测器（42）上的辐射源的第一波长范围的光谱仪（14）。 所述布置还包括：用于在主色散方向（46）上穿透光谱仪装置（10）的辐射的光谱分解的梯形光栅（36）; 分散元件（34），用于通过在与梯形光栅（36）的主色散方向形成角度的横向色散方向（48）上的辐射的光谱分解来分离度数，使得两个 可以用多个分离的度数（52）产生维度谱（50）; 用于在图像平面（40）中将穿过入口间隙（20）的辐射成像到成像光学装置（10）中的成像光学元件（24,38）; 以及包括所述图像平面（40）中的多个检测器元件的二维布置的表面检测器（42）。 本发明的装置的特征在于，提供包括至少一个其它分散元件（64）和另一成像光学元件（60,66）的另一个光谱仪（12），以产生第二波长范围的辐射（68） ，其与第一波长范围不同，来自相同检测器（42）上的辐射源。 光谱可以在检测器上进行空间或时间分离。

公开(公告)号：US20080074645A1

公开(公告)日：2008-03-27

申请号：US11782475

申请日：2007-07-24

Applicant: Andrew Sappey ,  James Howell ,  Henrik Hofvander ,  Bernard Masterson

Inventor： Andrew Sappey ,  James Howell ,  Henrik Hofvander ,  Bernard Masterson

IPC: G01J3/00 ,  G01N21/00

CPC classification number: G01J3/36 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/0218 ,  G01J3/0237 ,  G01J3/024 ,  G01J3/0289 ,  G01J3/0297 ,  G01J3/108 ,  G01J3/1809 ,  G01J5/601 ,  G01J2003/104 ,  G01J2003/423 ,  G01N21/359 ,  G01N21/39 ,  G01N2021/399 ,  G02B6/14

Abstract: A method of sensing a process utilizing a sensing apparatus consisting of more than one diode laser having select lasing frequencies, a multiplexer optically coupled to the outputs of the diode lasers with the multiplexer being further optically coupled to a pitch side optical fiber. Multiplexed laser light is transmitted through the pitch side optical fiber to a pitch optic operatively associated with a process chamber which may be a combustion chamber or the boiler of a coal or gas fired power plant. The pitch optic is oriented to project multiplexed laser output through the process chamber. Also operatively oriented with the process chamber is a catch optic in optical communication with the pitch optic to receive the multiplexed laser output projected through the process chamber. The catch optic is optically coupled to an optical fiber which transmits the multiplexed laser output to a demultiplexer. The demultiplexer demultiplexes the laser light and optically couples the select lasing frequencies of light to a detector with the detector being sensitive to one of the select lasing frequencies.

Abstract translation: 一种使用由多于一个具有选择的激光频率的二极管激光器组成的感测装置来感测处理的方法，多路复用器光学耦合到二极管激光器的输出端，多路复用器进一步光耦合到俯仰侧光纤。 多路复用激光通过俯仰侧光纤传输到与可以是燃烧室或煤或燃气发电厂的锅炉的处理室可操作地连接的俯仰光学器件。 俯仰光学器件定向成投影通过处理室的多路复用激光输出。 还与操作室一起操作地定向的是与俯仰光学器件光学通信的接收光学器件，以接收通过处理室投射的多路复用的激光输出。 捕捉光学器件光耦合到将多路复用的激光输出传输到解复用器的光纤。 解复用器解复用激光并将选择的激光频率光耦合到检测器，检测器对选择的激光频率之一敏感。

公开(公告)号：US20080013887A1

公开(公告)日：2008-01-17

申请号：US11782492

申请日：2007-07-24

Applicant: Andrew Sappey ,  James Howell ,  Henrik Hofvander ,  Bernard Masterson

Inventor： Andrew Sappey ,  James Howell ,  Henrik Hofvander ,  Bernard Masterson

IPC: G02B6/00

CPC classification number: G01J3/36 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/0218 ,  G01J3/0237 ,  G01J3/024 ,  G01J3/0289 ,  G01J3/0297 ,  G01J3/108 ,  G01J3/1809 ,  G01J5/601 ,  G01J2003/104 ,  G01J2003/423 ,  G01N21/359 ,  G01N21/39 ,  G01N2021/399 ,  G02B6/14

Abstract: A diode laser spectroscopy gas sensing apparatus having a diode laser with a select lasing frequency, a pitch optic coupled to the diode laser with the pitch optic being operatively associated with a process chamber and oriented to project laser light along a projection beam through the process chamber. This embodiment additionally includes a catch optic in optical communication with the pitch optic to receive the laser light projected through the process chamber and an optical fiber optically coupled to the catch optic. In addition, the catch optic is operatively associated with a catch side alignment mechanism which provides for the alignment of the catch optic with respect to the projection beam to increase a quantity of laser light received by the catch optic from the pitch optic and coupled to the optical fiber and a detector sensitive to the select lasing frequency optically coupled to the optical fiber. The catch side alignment mechanism may consist of means to tilt the catch optic along a first axis and a second axis orthogonal to the first axis with both the first and second axes being approximately orthogonal to the projection beam.

Abstract translation: 一种具有选择激光频率的二极管激光器的二极管激光光谱气体感测装置，耦合到二极管激光器的俯仰光学器件，其中俯仰光学器件与处理室可操作地相关联并且被定向成沿着投影束将激光投射通过处理室 。 该实施例另外包括与俯仰光学器件光学通信的接收光学器件，以接收通过处理室投射的激光，以及光学耦合到捕捉光学器件的光纤。 另外，捕捉光学元件与捕捉侧对准机构可操作地相关联，该机构提供捕获光学元件相对于投影光束的对准，以增加由光阑从俯仰光学元件接收的激光的数量并耦合到 光纤和对光纤耦合的选择激光频率敏感的检测器。 捕获侧对准机构可以包括用于使捕获光学器件沿第一轴线和与第一轴线正交的第二轴线倾斜的装置，其中第一和第二轴线几乎与投影光束正交。

公开(公告)号：US20080013883A1

公开(公告)日：2008-01-17

申请号：US11782481

申请日：2007-07-24

Applicant: Andrew Sappey ,  James Howell ,  Henrik Hofvander ,  Bernard Masterson

Inventor： Andrew Sappey ,  James Howell ,  Henrik Hofvander ,  Bernard Masterson

IPC: G02B6/00

CPC classification number: G01J3/36 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/0218 ,  G01J3/0237 ,  G01J3/024 ,  G01J3/0289 ,  G01J3/0297 ,  G01J3/108 ,  G01J3/1809 ,  G01J5/601 ,  G01J2003/104 ,  G01J2003/423 ,  G01N21/359 ,  G01N21/39 ,  G01N2021/399 ,  G02B6/14

Abstract: A pitch side optical system for use in diode laser spectroscopy consisting of more than one diode laser having select lasing frequencies with each diode laser being coupled to an end of a distinct input optical fiber. The pitch side optical system further consists of a multiplexer optically coupled to the other end of less than all of the input optical fibers with the multiplexer outputting multiplexed laser light to a pitch side optical fiber. The pitch side optical system further consists of a coupler optically coupled to the far end of the pitch side optical fiber and the far end of an unmultiplexed input optical fiber with the coupler combining the multiplexed laser light and the unmultiplexed laser light and outputting the combined light to a transmission optical fiber. Typically, the coupler is located near the combustion process. The pitch side optical system further consists of a pitch optic coupled to the transmission optical fiber. Typically, all optical fibers used in the pitch side optical system are single mode optical fibers.

Abstract translation: 用于二极管激光光谱的俯仰侧光学系统，其由具有选择的激光频率的多于一个的二极管激光器组成，每个二极管激光器耦合到不同的输入光纤的端部。 音调侧光学系统还包括多路复用器，其光耦合到少于所有输入光纤的另一端，多路复用器将多路复用的激光输出到音调侧光纤。 俯仰侧光学系统还包括光耦合到俯仰侧光纤的远端的耦合器和未复用输入光纤的远端，耦合器组合复用的激光和未复用的激光，并输出组合的光 传输光纤。 通常，耦合器位于燃烧过程附近。 俯仰侧光学系统还包括耦合到传输光纤的俯仰光学器件。 通常，在俯仰侧光学系统中使用的所有光纤都是单模光纤。

公开(公告)号：US07019833B2

公开(公告)日：2006-03-28

申请号：US10892832

申请日：2004-07-15

Applicant: Bernd Harnisch

Inventor： Bernd Harnisch

IPC: G01J3/28

CPC classification number: G01J3/12 ,  G01J3/1809 ,  G01J2003/1204 ,  G01J2003/1828

Abstract: A high resolution spectrometer with a large free spectral range comprising an entrance slit for a beam of electromagnetic radiation to be analyzed, a first dispersion device for dispersing the beam to be analyzed into various wavelength components in a first direction, a second dispersion device for dispersing each wavelength component output from the first dispersion device in a second direction, and an imaging device comprising a sensitive detection spectrum surface on which the beam dispersed in the first and second directions is focused, the first dispersion device being an optical filter that varies linearly and has a surface on which the beam to be analyzed is focused, each point on the surface of the filter operating like a pass band filter with a central frequency varying linearly in the first direction.

Abstract translation: 一种具有大的自由光谱范围的高分辨率光谱仪，包括用于待分析的电磁辐射束的入口狭缝，用于将待分析的光束在第一方向上分散成各种波长分量的第一分散装置，用于分散的第二分散装置 每个波长分量从第一分散装置沿第二方向输出;以及成像装置，其包括在第一和第二方向上分散有光束的敏感检测光谱表面，第一色散装置是线性变化的滤光器， 具有待分析的光束聚焦在其上的表面，滤光器表面上的每个点像在中心频率沿第一方向呈线性变化的通带滤光器操作。

公开(公告)号：US20050157293A1

公开(公告)日：2005-07-21

申请号：US10503636

申请日：2003-01-28

Applicant: Stefan Florek ,  Helmut Becker-Ross ,  Uwe Heitmann

Inventor： Stefan Florek ,  Helmut Becker-Ross ,  Uwe Heitmann

IPC: G01J3/02 ,  G01J3/04 ,  G01J3/08 ,  G01J3/12 ,  G01J3/14 ,  G01J3/18 ,  G01J3/28

CPC classification number: G01J3/04 ,  G01J3/02 ,  G01J3/0229 ,  G01J3/08 ,  G01J3/14 ,  G01J3/1809 ,  G01J3/28 ,  G01J2003/1208 ,  G01J2003/2866

Abstract: A spectrometer assembly (10) comprises a light source (11) with a continuous spectrum, a pre-monochromator (2) for generating a spectrum with a relatively small linear dispersion from which a spectral portion is selectable, the spectral bandwidth of such spectral portion being smaller than or equal to the bandwidth of the free spectral range of such order in the echelle spectrum wherein the centre wavelength of the selected spectral interval is measurable with maximum blaze efficiency, an echelle spectrometer (4) with means for wavelength calibration, an entrance slit (21) at the pre-monochromator (2), an intermediate slit assembly (50) with an intermediate slit (3) and a spatially resolving light detector (5) in the exit plane of the spectrometer for the detection of wavelength spectra. The assembly is characterised in that the width of the intermediate slit (3) is larger than the monochromatic image of the entrance slit generated by the pre-monochromator at the location of the intermediate slit, and means for calibrating the pre-monochromator are provided, which are adapted to calibrate the light of the light source with a continuous spectrum on the detector to a reference position.

Abstract translation: 光谱仪组件（10）包括具有连续光谱的光源（11），用于产生光谱部分可选择的相对小的线性色散的光谱的预单色器（2），该光谱部分的光谱带宽 小于或等于梯级光谱中这种顺序的自由光谱范围的带宽，其中所选择的光谱间隔的中心波长可以用最大的火焰效率测量，具有用于波长校准的装置的梯形光谱仪（4），入口 在预分光器（2）处的狭缝（21），具有用于检测波长光谱的光谱仪的出射平面中的中间狭缝（3）和空间分辨光检测器（5）的中间狭缝组件（50）。 组件的特征在于，中间狭缝（3）的宽度大于由中间狭缝位置处的预单色仪产生的入口狭缝的单色图像，并且提供用于校准预单色仪的装置， 其适合于用检测器上的连续光谱校准光源的光到参考位置。

公开(公告)号：US06753959B2

公开(公告)日：2004-06-22

申请号：US09958448

申请日：2001-10-05

Applicant: Michael R. Hammer ,  Martin K. Masters ,  Stewart R. Campbell ,  Peter G. Layton

Inventor： Michael R. Hammer ,  Martin K. Masters ,  Stewart R. Campbell ,  Peter G. Layton

IPC: G01J328

CPC classification number: G01J5/62 ,  G01J3/02 ,  G01J3/0213 ,  G01J3/0227 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/1809 ,  G01J3/2803 ,  G01J2003/1828 ,  G01N21/27 ,  G01N21/31

Abstract: Spectroscopy apparatus for spectrochemical analysis of a sample having an excitation source (60) for providing spectral light (62) of the sample for analysis. The spectral light (62) is analysed via an optical system (64-66-68) that includes a polychromator (70, 74-80) and solid state multielement array detector (82). The elements (i.e. pixels) of the detector (82) are serially reel by means (84) to provide light intensity measurements as a function of wavelength. A problem is that the elements (pixels) of the detector (82) continue to accumulate change during the serial read-out. This is avoided by providing an optical shutter (72) for blocking the spectral light (62) whilst elements (pixels) of the detector (82) are being serially read. Shutter (72) has a piezoelectric actuator which is preferably a bimorph mounted as a cantilever. It is preferably located adjacent to the entrance aperture (70) of the polychromator. Bimorph structures for the actuator and drive and protective circuit arrangements are also disclosed.

Abstract translation: 具有用于提供用于分析的样品的光谱光（62）的激发源（60）的样品的光谱分析用光谱仪。 分光光（62）通过包括多色分光器（70,74-80）和固态多元件阵列检测器（82）的光学系统（64-66-68）进行分析。 检测器（82）的元件（即，像素）通过装置（84）串联卷绕以提供作为波长的函数的光强度测量。 问题在于，在串行读出期间，检测器（82）的元件（像素）继续积累变化。 这是通过提供用于阻挡分光光（62）的光学快门（72）而避免的，同时检测器（82）的元件（像素）被串行读取。 快门（72）具有压电致动器，其优选地是作为悬臂安装的双压电晶片。 它优选地位于多色调色板的入口孔（70）附近。 还公开了用于致动器和驱动器和保护电路装置的双压电晶片结构。

公开(公告)号：US20040114139A1

公开(公告)日：2004-06-17

申请号：US10416566

申请日：2003-10-03

Inventor： Stefan Florek ,  Michael Okruss ,  Helmut Becker-Ross

IPC: G01J003/28

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/06 ,  G01J3/1809 ,  G01J3/28 ,  G01J2003/2866

Abstract: A method for the wavelength calibration of echelle spectra, in which the wavelengths are distributed across number of orders is characterised by the steps: recording of a line-rich reference spectrum with known wavelengths for a number of the lines, determination of the position of a number of peaks of the reference spectrum in the recorded spectrum, selection of at least two first lines of known order, position and wavelength, determination of a wavelength scale for the order in which the known lines lie, by means of a fit function nullm(x), determination of a provisional wavelength scale nullnullm 1(x) for at least one neighbouring order m 1, by means of addition/subtraction of a wavelength difference nullFSR which corresponds to a free spectral region, according to nullm 1 null(x)null0nullm(x)nullFSR with nullFSRnullnullm(x)/m, determination of the wavelengths of lines in said neighbouring order m 1, by means of the provisional wavelength scale null 1(x), replacement of the provisional wavelength of at least two lines by the reference wavelength for said lines as obtained in step (a) and repeat of steps (d) to (g) for at least one further neighbouring order.

Abstract translation: 用于波长校准的方案，其中波长分布在多个阶数上，其特征在于以下步骤：对多条线记录具有已知波长的线路丰富的参考频谱，确定一个 在记录光谱中参考光谱的峰数，已知顺序，位置和波长的至少两条第一行的选择，已知线所在的顺序的波长标度的确定，借助于拟合函数g x），临时波长标度的确定γ？m 1 （ 根据γ m 1 ？（x）= 0 gammam（x）gammaFSR with gammaFSR = gamma m（x）/ m，通过临时波长标度gamma 1（x）确定所述相邻次序m 1中的线的波长，将所述线的参考波长的至少两条线的临时波长的替换 如在步骤（a）中获得的并且对于至少一个更进一步的相邻顺序重复步骤（d）至（g）。

公开(公告)号：US06573989B2

公开(公告)日：2003-06-03

申请号：US09801001

申请日：2001-03-08

Applicant: Toru Suzuki ,  Osamu Wakabayashi

Inventor： Toru Suzuki ,  Osamu Wakabayashi

IPC: G01J328

CPC classification number: G01J3/1809 ,  G01J3/1838 ,  G01J3/22

Abstract: A spectrometer measures a spectrum of a light beam supplied from a light source so as to obtain fine information and coarse information of the spectrum easily. This spectrometer has a holographic grating, an Echelle grating, a rotation stage and a line sensor. In the case where a single pass beam is to be detected, a control processing unit controls the rotation stage so as to rotate the Echelle grating from the Littrow arrangement by a predetermined angle &dgr;1. On the other hand, in the case where a double pass beam is to be detected, the control processing unit controls the rotation stage so as to rotate the Echelle grating from the Littrow arrangement by a predetermined angle &dgr;2.

Abstract translation: 光谱仪测量从光源提供的光束的光谱，以便容易地获得光谱的精细信息和粗略信息。 该光谱仪具有全息光栅，Echelle光栅，旋转台和线传感器。 在要检测单程光束的情况下，控制处理单元控制旋转阶段，以使Echelle光栅从Littrow布置旋转预定角度δ1。 另一方面，在要检测双通光束的情况下，控制处理单元控制旋转台，以便将梯形光栅从Littrow布置旋转预定角度δ2。