ETCHING AGENT AND METHOD FOR PRODUCING CIRCUIT BOARD

    公开(公告)号:EP4245886A1

    公开(公告)日:2023-09-20

    申请号:EP21891519.7

    申请日:2021-09-30

    Abstract: The present invention includes an etching agent that selectively etches a copper layer of a processing target in which a noble metal layer containing a metal nobler than copper and the copper layer coexist, the etching agent including: a copper ion; one or more nitrogen-containing compounds selected from the group consisting of a heterocyclic compound having two or more nitrogen atoms in a ring and an amino group-containing compound having 8 or less carbon atoms; a polyalkylene glycol; and a halogen ion, in which the polyalkylene glycol is contained in an amount of 0.0005% by weight or more and 7% by weight or less, and the halogen ion is contained in an amount of 1 ppm or more and 250 ppm or less.

    MICROETCHING AGENT FOR COPPER, REPLENISHMENT SOLUTION THEREOF, AND METHOD FOR PRODUCING WIRING BOARD
    166.
    发明公开
    MICROETCHING AGENT FOR COPPER, REPLENISHMENT SOLUTION THEREOF, AND METHOD FOR PRODUCING WIRING BOARD 有权
    用于微蚀刻的铜,补充其溶液及其制造方法的电路板

    公开(公告)号:EP2878705A1

    公开(公告)日:2015-06-03

    申请号:EP13762721.2

    申请日:2013-03-04

    Abstract: Disclosed is a microetching solution for copper, a replenishment solution therefor and a method for production of a wiring board. The microetching solution of the present invention consists of an aqueous solution containing a cupric ion, an organic acid, a halide ion, an amino group-containing compound having a molecular weight of 17 to 400 and a polymer. The polymer is a water-soluble polymer including a polyamine chain and/or a cationic group and having a weight average molecular weight of 1000 or more. When a concentration of the amino group-containing compound is A% by weight and a concentration of the polymer is B% by weight, a value of A/B of the microetching solution of the present invention is 50 to 6000. According to the present invention, an adhesion between copper and a resin or the like may be maintained even with a low etching amount.

    Abstract translation: 公开了一种用于铜微蚀刻剂,其的补充溶液以及用于生产接线板的方法。 的水溶液含有铜离子的有机酸,卤化物离子的本发明besteht的微蚀刻剂,对氨基具有17至400和聚合物的分子量基团的化合物。 该聚合物是一种水溶性聚合物包含聚胺链和/或阳离子基团,并且具有1,000或更高的重均分子量。 重量当含氨基的化合物的浓度是按重量计,并且聚合物的浓度A%是B%,本发明的微蚀刻剂的A / B的值是50到6000。根据本 发明中,对铜和树脂或类似物之间的粘附性可以甚至具有低蚀刻量被维持。

    Etchant and replenishment solution for producing copper wiring
    169.
    发明公开
    Etchant and replenishment solution for producing copper wiring 审中-公开
    Ätzmittel,Ergänzungslösungund Verfahren zur Herstellung von Kupferleiterbahenen

    公开(公告)号:EP2226410A1

    公开(公告)日:2010-09-08

    申请号:EP10006632.3

    申请日:2004-07-21

    CPC classification number: C23F1/18 H05K3/067 H05K2203/124

    Abstract: The present invention concerns an etchant for copper and copper alloys, comprising an aqueous solution comprising:
    14 to 155 g/liter of cupric ion source in terms of a concentration of copper ions;
    7 to 180 g/liter of hydrochloric acid; and
    0.1 to 50 g/liter of tetrazole based compound.

    Abstract translation: 本发明涉及铜和铜合金的蚀刻剂,其包含水溶液,其包含以铜离子浓度计的14至155g /升的铜离子源; 7〜180g / l盐酸; 和0.1〜50g / l的四唑类化合物。

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