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公开(公告)号：KR1020160143090A
公开(公告)日：2016-12-14
申请号：KR1020150079200
申请日：2015-06-04
Applicant: 삼성전자주식회사 , 성균관대학교산학협력단
CPC classification number: B32B37/025 , B32B37/0038 , B32B37/12 , B32B37/14 , B32B38/10 , B32B2038/166 , B32B2305/026 , B32B2457/08 , G03F1/62 , H01L21/00
Abstract: 펠리클조립체를제조하기위하여, 습식분위기하에서반송막상에탄소함유박막을부착한다. 탄소함유박막이반송막상에부착된상태에서건식분위기하에서탄소함유박막을펠리클프레임에부착한다. 탄소함유박막이펠리클프레임에부착된상태에서반송막을탄소함유박막으로부터분리한다.
Abstract translation: 一种制造防护薄膜组件的方法，所述方法包括在湿气氛中将含碳薄膜附着在转移膜上; 在含碳薄膜附着在转印膜上的同时，将干燥气氛中的含碳薄膜附着在防尘薄膜组件框架上; 并且在含碳薄膜附着到防护薄膜框架上的同时将转移膜与含碳薄膜分离。
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公开(公告)号：KR1020160085146A
公开(公告)日：2016-07-15
申请号：KR1020150002170
申请日：2015-01-07
Applicant: 삼성전자주식회사 , 성균관대학교산학협력단
IPC: H01L21/027 , G03F1/62 , H01L21/02 , H01L21/205
CPC classification number: G03F1/62 , C23C16/26 , H01L21/0274 , H01L21/0228 , H01L21/205
Abstract: 기판상에그라파이트층을형성하고, 상기그라파이트층 상에지지층을형성하고, 상기기판을제거하고, 상기그라파이트층 및상기지지층의스택을프레임상에전사하고, 및상기지지층을제거하는것을포함하는펠리클제조하는방법이설명된다.
Abstract translation: 说明的是制造防护薄膜组件的方法，其包括以下步骤：在基板上形成石墨层; 在石墨层上形成支撑层; 消除基板; 将一层石墨层和支撑层转移到框架上; 并消除支撑层。 因此，该方法可以防止或减少由于静电颗粒导致的防护薄膜组件的污染，缺陷或损坏。
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公开(公告)号：KR102254103B1
公开(公告)日：2021-05-20
申请号：KR1020150002170
申请日：2015-01-07
Applicant: 삼성전자주식회사 , 성균관대학교산학협력단
Abstract: 기판상에그라파이트층을형성하고, 상기그라파이트층 상에지지층을형성하고, 상기기판을제거하고, 상기그라파이트층 및상기지지층의스택을프레임상에전사하고, 및상기지지층을제거하는것을포함하는펠리클제조하는방법이설명된다.
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Patent Agency Ranking
公开(公告)号：KR102251999B1
公开(公告)日：2021-05-17
申请号：KR1020150003112
申请日：2015-01-09
Applicant: 삼성전자주식회사 , 성균관대학교산학협력단
IPC: G03F1/64
Abstract: 펠리클의제조방법에있어서, 기판의일 면상에, 상기기판을촉매로사용하는화학반응을이용하여막을형성한다. 상기기판의다른일 면상에, 보호막패턴을형성한다. 상기기판을식각액에침지시켜, 상기보호막패턴으로부터노출된기판부분을제거하여프레임을형성한다. 상기식각액을제1 용매로교환한다.
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公开(公告)号：KR1020170079535A
公开(公告)日：2017-07-10
申请号：KR1020150190222
申请日：2015-12-30
Applicant: 성균관대학교산학협력단
IPC: H04R7/02 , H04R31/00 , C01B31/04 , C08L101/00
Abstract: 일체형진동막을포함하는스피커장치및 상기일체형진동막의제조방법에관한것이다.
Abstract translation: 一种包括一体膜片的扬声器装置以及一种制造该一体膜片的方法。
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公开(公告)号：KR1020170118672A
公开(公告)日：2017-10-25
申请号：KR1020170134218
申请日：2017-10-16
Applicant: 성균관대학교산학협력단
IPC: H04R7/02 , H04R31/00 , C01B32/182 , C08L101/00
Abstract: 일체형진동막을포함하는스피커장치및 상기일체형진동막의제조방법에관한것이다.
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公开(公告)号：KR101360828B1
公开(公告)日：2014-02-12
申请号：KR1020120100791
申请日：2012-09-12
Applicant: 성균관대학교산학협력단
CPC classification number: G09B21/004 , B06B3/00 , G09B21/04
Abstract: A glove type device for outputting Braille alphabets according to one embodiment of the present invention may include a glove member which can cover user's palm and the back of hand, a Braille alphabet output unit which has at least one set among six Braille alphabet driving units which allow a user to feel tactile sensation like the skin of hands on the palm and the back of hand of the glove member, a data input unit which obtains input data including character information to be outputted as Braille characters through a wired or wireless communication interface or a store device interface, and a Braille character output control unit which controls Braille character driving units according to the character information.
Abstract translation: 根据本发明的一个实施例的用于输出盲文字母的手套型装置可以包括可覆盖用户手掌和手背的手套部件，盲文字母输出单元，其在六个盲文字母表驱动单元中具有至少一组， 允许用户感觉到如手掌和手套的手背上的手皮的触感，数据输入单元，其通过有线或无线通信接口获得包括要作为盲文字符输出的字符信息的输入数据，或者 存储装置接口和盲文字符输出控制单元，其根据字符信息来控制盲文字符驱动单元。
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公开(公告)号：KR1020130014919A
公开(公告)日：2013-02-12
申请号：KR1020110076664
申请日：2011-08-01
Applicant: 성균관대학교산학협력단
CPC classification number: C01B32/182 , C23C16/26
Abstract: PURPOSE: A transparent graphene sheet and a manufacturing method thereof are provided to enable users to use the sheet as a transparent electrode without separately removing of a metal catalyst particle, by maintaining transparency even when graphene is grown on a transparent substrate with the metal catalyst particle deposited partially. CONSTITUTION: A manufacturing method of a transparent graphene sheet comprises the following steps. A catalyst metal particle(210) is deposited on a transparent substrate(100). The transparent substrate with the metal catalyst particle is exposed with a carbon source to grow graphene. The catalyst metal particle is partially deposited to the transparent substrate. In the step of depositing catalyst metal particle, the catalyst metal particle is deposited when the transparent substrate is heated.
Abstract translation: 目的：提供一种透明的石墨烯片及其制造方法，即使在使用金属催化剂粒子的透明基板上生长石墨烯时，也可以通过保持透明性而使用该片材作为透明电极而无需分别除去金属催化剂粒子 部分存放。 构成：透明石墨烯片的制造方法包括以下步骤。 催化剂金属颗粒（210）沉积在透明基板（100）上。 具有金属催化剂颗粒的透明基板用碳源曝光以生长石墨烯。 催化剂金属颗粒部分地沉积到透明基底上。 在沉积催化剂金属颗粒的步骤中，当透明基板被加热时沉积催化剂金属颗粒。
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