Laser interferometer and measuring instrument using the same
    163.
    发明专利
    Laser interferometer and measuring instrument using the same 审中-公开
    激光干涉仪和使用它的测量仪器

    公开(公告)号:JP2009168709A

    公开(公告)日:2009-07-30

    申请号:JP2008009032

    申请日:2008-01-18

    Abstract: PROBLEM TO BE SOLVED: To improve the measurement accuracy of positional deviation in a roll direction, by improving the parallelism of each optical component of an output laser beam with a simplified operation for polarization adjustment of each optical component. SOLUTION: A laser interferometer 1 comprises a reflecting mirror 2 having two flat mirrors 4 and 5; and a laser interference part 3 which includes a polarization beam splitter 8, which inputs and splits two orthogonal linearly-polarized lights, and a biprism 6 which reflects each split optical component so as to be incident and reflected vertically to the flat mirrors 4 and 5, in which each optical component is outputted after reciprocated between the biprism 6 and the reflecting mirror 2. The laser interference part 3 includes a polarization part 15, having a pair of wedge prisms 15a and 15b, the polarization part being disposed in between the polarizing beam splitter 8 and the biprism 6 to pass one of the optical components, when each optical component is reciprocated first and to pass the other optical component when each optical component is reciprocated next, so that the polarizing direction of the optical component passed therethrough can be freely adjusted. COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:通过利用简化的每个光学部件的偏振调整操作来提高输出激光束的每个光学部件的平行度,来提高辊方向上的位置偏差的测量精度。 解决方案:激光干涉仪1包括具有两个平面镜4和5的反射镜2; 以及激光干涉部分3,其包括输入和分离两个正交的线性偏振光的偏振分束器8和反射每个分裂的光学部件以便垂直于平面镜4,5的入射和反射的双棱镜6 其中每个光学分量在双棱镜6和反射镜2之间往复运动后输出。激光干涉部分3包括具有一对楔形棱镜15a和15b的偏振部分15,偏振部分设置在偏振光 分光器8和双棱镜6通过光学部件之一,当每个光学部件首先往复运动并且在每个光学部件被往复运动时通过另一个光学部件,使得通过其中的光学部件的偏振方向可以是 自由调整。 版权所有(C)2009,JPO&INPIT

    Light measurement apparatus
    168.
    发明专利
    Light measurement apparatus 有权
    轻量测量装置

    公开(公告)号:JP2006029884A

    公开(公告)日:2006-02-02

    申请号:JP2004206711

    申请日:2004-07-14

    CPC classification number: G01J3/18 G01J3/027 G01J3/04 G01J3/1895 G01J3/453

    Abstract: PROBLEM TO BE SOLVED: To improve the measurement precision in the measurement of optical spectrum, without mechanically narrowing the slit width.
    SOLUTION: The diffraction grating 14 disperses light to be measured by wavelength dispersion and emits diffraction light of the selected wavelength while turning to the specific direction. The conversion lens 13 forms convergent beam by converging the diffracted light. The slit control part 15 moves the width of the slit with a constant scanning speed for making the width of transmission band variable. The received light measurement part 16 receives the transmission light from the slit, and reproduce the spectrum shape of the light to be measured by differentiating the level function by the scanning speed after obtaining the level function representing the level of the received light power fluctuating according to the fluctuation of the light frequency.
    COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 要解决的问题:为了提高光谱测量中的测量精度,而不会使狭缝宽度变窄。 解决方案:衍射光栅14通过波长色散分散待测光,并在转向特定方向的同时发射所选波长的衍射光。 转换透镜13通过会聚衍射光来形成会聚光束。 狭缝控制部15以使扫描宽度变宽的扫描速度恒定地移动狭缝的宽度。 接收光测量部16接收来自狭缝的透射光,并且在获得表示接收光功率的电平的电平函数之后,通过将电平函数除以扫描速度来再现要测量的光的光谱形状,根据 光频波动。 版权所有(C)2006,JPO&NCIPI

    Reflection measuring instrument of high sensitivity
    169.
    发明专利
    Reflection measuring instrument of high sensitivity 有权
    反射测量仪器的高灵敏度

    公开(公告)号:JP2005249674A

    公开(公告)日:2005-09-15

    申请号:JP2004062558

    申请日:2004-03-05

    CPC classification number: G01J3/453 G01N21/211 G01N2021/215 G01N2021/3595

    Abstract: PROBLEM TO BE SOLVED: To provide a reflection measuring instrument of high sensitivity capable of bringing high sensitivity of measurement by simple constitution. SOLUTION: This reflection measuring instrument 12 of high sensitivity provided on an optical path X 1 (X 4 ) between a light emitting means 14 and a detection means 16 of an analyzer 10, constituted to bring an incident angle θ of a measuring light 22 to a sample measuring face 20 into a range of 70° or more to less than 90° with respect to a direction orthogonal to the sample measuring face 20, and used when obtaining information about the sample measuring face 20, based on reflected light 24 from the sample measuring face 20, is provided with an incident angle side optical element 28 for bending an optical path of the measuring light 22 from the light emitting means 14 (X 1 -X 2 ) to bring the incident angle θ of the measuring light 22 to the sample measuring face 20 into a desired angle within the range of 70° or more to less than 90°, and for transmitting the measuring light 22 as a linear polarization light having a desired vibration direction to get incident into the sample measuring face 20. COPYRIGHT: (C)2005,JPO&NCIPI

    Abstract translation: 要解决的问题:提供一种具有高灵敏度的反射测量仪器,能够通过简单的结构实现高灵敏度的测量。 解决方案:在发光装置14和检测装置16的光路X 1(X 4 )之间提供高灵敏度的反射测量仪12 分析器10,其被构造成使得测量光22相对于样品测量面20的入射角θ相对于与样品测量面20正交的方向成70°以上且小于90°的范围,并使用 当获取关于样品测量面20的信息时,基于来自样品测量面20的反射光24,设置有入射角侧光学元件28,用于弯曲来自发光装置14的测量光22的光路(X 1 -X 2 ),使得测量光22与样品测量面20的入射角θ成为70°以上的范围内的期望角度 并且用于将测量光22作为具有期望的振动方向的线偏振光发射 (C)2005,JPO&NCIPI

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