Abstract:
PROBLEM TO BE SOLVED: To overcome a defect of low coherence interference measurement and the serviceability and scanning speed of the light source of optical coherent tomography.SOLUTION: This apparatus includes at least one first arrangement for providing not only at least one first electromagnetic radiation to a sample 86 but also at least one second electromagnetic radiation to a reference 82, at least one second arrangement constituted to change the frequency of at least one of the first and second electromagnetic radiations to at least partially reduce, shift the frequency of at least one of the first and second electromagnetic radiations, divide or eliminate the negative frequency component of the interference, an interferometer for allowing the first and second electromagnetic radiations to interfere with each other to form an interference signal and at least one third arrangement for detecting the interference between the first and second electromagnetic radiations.
Abstract:
PROBLEM TO BE SOLVED: To improve the measurement accuracy of positional deviation in a roll direction, by improving the parallelism of each optical component of an output laser beam with a simplified operation for polarization adjustment of each optical component. SOLUTION: A laser interferometer 1 comprises a reflecting mirror 2 having two flat mirrors 4 and 5; and a laser interference part 3 which includes a polarization beam splitter 8, which inputs and splits two orthogonal linearly-polarized lights, and a biprism 6 which reflects each split optical component so as to be incident and reflected vertically to the flat mirrors 4 and 5, in which each optical component is outputted after reciprocated between the biprism 6 and the reflecting mirror 2. The laser interference part 3 includes a polarization part 15, having a pair of wedge prisms 15a and 15b, the polarization part being disposed in between the polarizing beam splitter 8 and the biprism 6 to pass one of the optical components, when each optical component is reciprocated first and to pass the other optical component when each optical component is reciprocated next, so that the polarizing direction of the optical component passed therethrough can be freely adjusted. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a method and an apparatus for improving detection of defocusing on a wafer. SOLUTION: The sensitivity with respect to local defocus defects is increased by using hyper-spectral imaging. The sensitivity with respect to a wide defocus defects is increased, by using a Fourier spatial analysis. The overall sensitivity with respect to the local and wide-area defocus defects is improved by combining them. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To improve the measurement precision in the measurement of optical spectrum, without mechanically narrowing the slit width. SOLUTION: The diffraction grating 14 disperses light to be measured by wavelength dispersion and emits diffraction light of the selected wavelength while turning to the specific direction. The conversion lens 13 forms convergent beam by converging the diffracted light. The slit control part 15 moves the width of the slit with a constant scanning speed for making the width of transmission band variable. The received light measurement part 16 receives the transmission light from the slit, and reproduce the spectrum shape of the light to be measured by differentiating the level function by the scanning speed after obtaining the level function representing the level of the received light power fluctuating according to the fluctuation of the light frequency. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To provide a reflection measuring instrument of high sensitivity capable of bringing high sensitivity of measurement by simple constitution. SOLUTION: This reflection measuring instrument 12 of high sensitivity provided on an optical path X 1 (X 4 ) between a light emitting means 14 and a detection means 16 of an analyzer 10, constituted to bring an incident angle θ of a measuring light 22 to a sample measuring face 20 into a range of 70° or more to less than 90° with respect to a direction orthogonal to the sample measuring face 20, and used when obtaining information about the sample measuring face 20, based on reflected light 24 from the sample measuring face 20, is provided with an incident angle side optical element 28 for bending an optical path of the measuring light 22 from the light emitting means 14 (X 1 -X 2 ) to bring the incident angle θ of the measuring light 22 to the sample measuring face 20 into a desired angle within the range of 70° or more to less than 90°, and for transmitting the measuring light 22 as a linear polarization light having a desired vibration direction to get incident into the sample measuring face 20. COPYRIGHT: (C)2005,JPO&NCIPI