公开(公告)号：US09704847B2

公开(公告)日：2017-07-11

申请号：US15239196

申请日：2016-08-17

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Toshiyuki Nakaiso ,  Nobuo Sakai

IPC: H01L27/02 ,  H01L27/08 ,  B81B7/00 ,  H01L29/93 ,  H01G7/06 ,  H01L49/02

CPC classification number: H01L27/0248 ,  B81B7/0022 ,  B81B2201/0221 ,  H01G4/33 ,  H01G7/06 ,  H01L27/0805 ,  H01L28/55 ,  H01L29/93

Abstract: A variable capacitance device that includes a semiconductor substrate, a redistribution layer disposed on a surface of the semiconductor substrate, and a plurality of terminal electrodes including first and second input/output terminals, a ground terminal and a control voltage application terminal. Moreover, a variable capacitance element section is formed in the redistribution layer from a pair of capacitor electrodes connected to the first and second input/output terminals, respectively, and a ferroelectric thin film disposed between the capacitor electrodes. Further, an ESD protection element is connected between the one of the input/output terminals and the ground terminal is formed on the surface of the semiconductor substrate.

公开(公告)号：US20170154734A1

公开(公告)日：2017-06-01

申请号：US15374719

申请日：2016-12-09

Applicant: wiSpry, Inc.

Inventor： Arthur S. Morris, III ,  Dana DeReus ,  Norito Baytan

IPC: H01G5/16 ,  B81C1/00 ,  B81B3/00

CPC classification number: H01G5/16 ,  B81B3/0008 ,  B81B3/0016 ,  B81B3/0051 ,  B81B2201/0221 ,  B81C1/00166 ,  B81C1/00476 ,  B81C2201/0109 ,  B81C2201/013 ,  H01G5/18 ,  H01G7/00

Abstract: Systems, devices, and methods for micro-electro-mechanical system (MEMS) tunable capacitors can include a fixed actuation electrode attached to a substrate, a fixed capacitive electrode attached to the substrate, and a movable component positioned above the substrate and movable with respect to the fixed actuation electrode and the fixed capacitive electrode. The movable component can include a movable actuation electrode positioned above the fixed actuation electrode and a movable capacitive electrode positioned above the fixed capacitive electrode. At least a portion of the movable capacitive electrode can be spaced apart from the fixed capacitive electrode by a first gap, and the movable actuation electrode can be spaced apart from the fixed actuation electrode by a second gap that is larger than the first gap.

公开(公告)号：US09571938B2

公开(公告)日：2017-02-14

申请号：US14558993

申请日：2014-12-03

Applicant: Robert Bosch GmbH

Inventor： Christoph Schelling ,  Rolf Scheben ,  Ricardo Ehrenpfordt

IPC: H04R23/00 ,  H04R19/00 ,  B81B3/00 ,  H04R19/04 ,  H04R29/00

CPC classification number: H04R19/005 ,  B81B3/0018 ,  B81B3/0021 ,  B81B2201/0221 ,  B81B2201/0257 ,  B81B2201/0285 ,  H04R19/04 ,  H04R29/004

Abstract: A capacitive MEMS microphone element is described which may be used optionally for detecting acoustic signals (microphone mode) or for detecting ultrasound signals in a defined frequency range (ultrasound mode). In the layered structure of the MEMS microphone element, at least two carrier elements for the two electrode sides of a capacitor system are formed one above the other and at a distance from one another for signal detection. At least one of the two carrier elements is sound pressure-sensitive and at least one of the two electrode sides includes at least two electrode segments which are electrically contactable independent of one another, which together with the at least one electrode of the other electrode side form partial capacitances which are independent of one another.

Abstract translation: 描述了可以可选地用于检测声信号（麦克风模式）或用于在限定的频率范围（超声模式）中检测超声信号的电容式MEMS麦克风元件。 在MEMS麦克风元件的分层结构中，用于电容器系统的两个电极侧的至少两个载体元件彼此之间并且彼此间隔一定距离地形成用于信号检测。 两个载体元件中的至少一个是声压敏的，并且两个电极侧中的至少一个包括彼此独立地电接触的至少两个电极段，这两个电极段与另一个电极侧的至少一个电极 形成彼此独立的部分电容。

公开(公告)号：US20160264401A1

公开(公告)日：2016-09-15

申请号：US15064879

申请日：2016-03-09

Applicant: MURATA MANUFACTURING CO., LTD.

Inventor： Matti LIUKKU ,  Jaakko RUOHIO ,  Hannu VESTERINEN

IPC: B81B3/00

CPC classification number: B81B3/0045 ,  B81B3/0056 ,  B81B3/0086 ,  B81B2201/0221 ,  B81B2201/0271 ,  G01P15/125 ,  G01P2015/0814 ,  H01G5/14

Abstract: A MEMS structure that provides an improved way to selectively control electromechanical properties of a MEMS device with an applied voltage. The MEMS structure includes a capacitor element that comprises at least one stator element, and at least one rotor element suspended for motion parallel to a first direction in relation to the stator element. The stator element and the rotor element form at least one capacitor element, the capacitance of which varies according to displacement of the rotor element from an initial position. The stator element and the rotor element are mutually oriented such that in at least one range of displacements of the rotor element from an initial position, the second derivative of the capacitance with respect to the displacement has negative values.

Abstract translation: MEMS结构提供了一种改进的方法来选择性地控制具有施加电压的MEMS器件的机电性能。 MEMS结构包括电容器元件，其包括至少一个定子元件，以及至少一个与定子元件平行于第一方向运动的转子元件。 定子元件和转子元件形成至少一个电容器元件，其电容根据转子元件从初始位置的位移而变化。 定子元件和转子元件相互取向，使得在转子元件从初始位置的至少一个位移范围内，相对于位移的电容的二次导数具有负值。

公开(公告)号：US20160240320A1

公开(公告)日：2016-08-18

申请号：US15024931

申请日：2014-09-24

Applicant: CAVENDISH KINETICS, INC.

Inventor： Mickael RENAULT ,  Vikram JOSHI ,  Robertus Petrus VAN KAMPEN ,  Thomas L. MAGUIRE ,  Richard L. KNIPE

IPC: H01G5/16 ,  B81B3/00 ,  B81C1/00 ,  H01G5/011

CPC classification number: H01G5/16 ,  B81B3/0086 ,  B81B2201/0221 ,  B81B2203/04 ,  B81C1/00166 ,  B81C2201/0104 ,  B81C2201/0109 ,  H01G5/011 ,  H01H59/0009

Abstract: The present invention generally relates to a MEMS device and a method of manufacture thereof. The RF electrode, and hence, the dielectric layer thereover, has a curved upper surface that substantially matches the contact area of the bottom surface as of the movable plate. As such, the movable plate is able to have good contact with the dielectric layer and thus, good capacitance is achieved.

Abstract translation: 本发明一般涉及一种MEMS器件及其制造方法。 RF电极，因此其上的电介质层具有基本上与可动板的底面的接触面积匹配的弯曲的上表面。 因此，可移动板能够与电介质层良好的接触，从而实现良好的电容。

公开(公告)号：US20160115013A1

公开(公告)日：2016-04-28

申请号：US14988842

申请日：2016-01-06

Applicant: Robert Bosch GmbH

Inventor： Ando Feyh ,  Po-Jui Chen ,  Markus Ulm

IPC: B81B3/00 ,  B81C1/00

CPC classification number: B81B3/0021 ,  B81B2201/0221 ,  B81B2201/0228 ,  B81C1/00134 ,  B81C1/00246 ,  B81C2203/0771

Abstract: A method of fabricating a semiconductor device comprises forming a dielectric layer above a substrate, the dielectric layer including a fixed dielectric portion and a proof mass portion, forming a source region and a drain region in the substrate, forming a gate electrode in the proof mass portion, and releasing the proof mass portion, such that the proof mass portion is movable with respect to the fixed dielectric portion and the gate electrode is movable with the proof mass portion relative to the source region and the drain region.

Abstract translation: 一种制造半导体器件的方法包括在衬底上形成电介质层，所述电介质层包括固定电介质部分和校准质量部分，在衬底中形成源极区域和漏极区域，在校准质量块中形成栅极电极 部分，并且释放证明质量部分，使得证明质量部分相对于固定电介质部分可移动，并且栅极电极可相对于源极区域和漏极区域与校准质量部分一起移动。

公开(公告)号：US20160101975A1

公开(公告)日：2016-04-14

申请号：US14972237

申请日：2015-12-17

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Hidekazu Ono ,  Tsuyoshi OKAMI ,  Nobuaki TSUJI ,  Yuki UEYA

IPC: B81B3/00 ,  G01C19/5712

CPC classification number: B81B3/0045 ,  B81B3/0056 ,  B81B2201/0221 ,  B81B2203/0127 ,  B81B2203/0163 ,  B81B2203/019 ,  B81B2203/0307 ,  B81B2203/04 ,  B81B2203/053 ,  G01C19/56 ,  G01C19/5712 ,  G01C19/5733

Abstract: A resonance frequency adjustment module is disclosed forming a MEMS sensor for detecting an angular velocity. The resonance frequency adjustment module includes a movable electrode; a fixed electrode facing the movable electrode to form a capacitor; and an elastic body supporting the movable electrode so as to be displaceable in one direction. The movable electrode and the fixed electrode have surfaces facing each other to form a capacitor, and the surface can be inclined to a displacement direction. A region sandwiched between the movable electrode and the fixed electrode has a volume fixed region where the volume is not decreased by movement of the movable electrode.

Abstract translation: 公开了一种形成用于检测角速度的MEMS传感器的共振频率调节模块。 共振频率调节模块包括可动电极; 面向可动电极的固定电极以形成电容器; 以及弹性体，其支撑所述可动电极，以便能够在一个方向上移位。 可动电极和固定电极具有彼此面对以形成电容器的表面，并且该表面可以沿位移方向倾斜。 夹在可动电极和固定电极之间的区域具有通过可移动电极的移动而不减小体积的体积固定区域。

公开(公告)号：US09269497B2

公开(公告)日：2016-02-23

申请号：US14292598

申请日：2014-05-30

Applicant: Raytheon Company

Inventor： Francis J. Morris

IPC: H01G5/16 ,  H01H59/00 ,  H01L29/92 ,  H01L49/02 ,  H01L29/66

CPC classification number: H01G5/16 ,  B81B2201/01 ,  B81B2201/0221 ,  H01G5/18 ,  H01H59/0009 ,  H01L28/40 ,  H01L29/66181 ,  H01L29/92

Abstract: A switchable capacitor including a first electrode, a dielectric layer on the first electrode, a second electrode configured to be suspended in an undeflected position over the dielectric layer in a de-activated state, and to deflect toward the first electrode in an activated state in response to a voltage difference between the two electrodes, a gap between the second electrode and the dielectric layer in the activated state being less than a corresponding gap in the de-activated state, and a capacitor having a first and second end, coupled to one of the electrodes at the first end, and configured to reduce the voltage difference between the electrodes as the second electrode deflects toward the first electrode in the activated state, wherein the voltage difference between the electrodes corresponds to a bias voltage applied across the second end of the capacitor and an other one of the first and second electrodes.

Abstract translation: 一种可切换电容器，包括第一电极，第一电极上的电介质层，第二电极，被配置为悬浮在处于去激活状态的电介质层上的未偏转位置，并且以激活状态朝向第一电极偏转 响应于两个电极之间的电压差，在激活状态下第二电极和电介质层之间的间隙小于去激活状态下的对应间隙，以及具有第一和第二端耦合到一个的电容器 并且被配置为当激活状态下第二电极朝着第一电极偏转时，减小电极之间的电压差，其中电极之间的电压差对应于跨过第二端施加的偏置电压 电容器和第一和第二电极中的另一个。

公开(公告)号：US09087929B2

公开(公告)日：2015-07-21

申请号：US14249890

申请日：2014-04-10

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yoshihiro Konaka ,  Toshiya Kawate

IPC: H01L29/93 ,  H01L21/00 ,  H01G5/16 ,  H01L49/02 ,  B81C1/00 ,  H01L23/64

CPC classification number: H01L29/93 ,  B81B2201/0221 ,  B81C1/00976 ,  H01G5/16 ,  H01L23/642 ,  H01L28/60 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A variable capacitance device includes a fixed substrate, a movable portion, driving electrodes, an RF capacitance electrode and an insulating film. The movable portion faces the fixed substrate and can change a gap between the movable portion and the fixed substrate. The driving electrodes are formed on the fixed substrate so as to face the movable portion. The RF capacitance electrode is formed on the fixed substrate so as to face the movable portion and be spaced apart from the driving electrodes. The insulating film is formed between the movable portion and the driving electrodes. The level of a voltage applied to the driving electrodes and the level of a voltage applied to the movable portion are periodically switched and the level of a voltage applied to the RF capacitance electrode and the level of a voltage applied to the movable portion are always the same.

Abstract translation: 可变电容器件包括固定衬底，可动部分，驱动电极，RF电容电极和绝缘膜。 可移动部分面向固定基板并且可以改变可移动部分和固定基板之间的间隙。 驱动电极形成在固定基板上以面对可动部分。 RF电容电极形成在固定基板上，以面对可动部分并与驱动电极间隔开。 绝缘膜形成在可动部和驱动电极之间。 施加到驱动电极的电压的电平和施加到可动部分的电压的电平被周期性地切换，并且施加到RF电容电极的电压的电平和施加到可动部分的电压的电平总是 相同。

公开(公告)号：US20150156591A1

公开(公告)日：2015-06-04

申请号：US14558993

申请日：2014-12-03

Applicant: Robert Bosch GmbH

Inventor： Christoph SCHELLING ,  Rolf SCHEBEN ,  Ricardo EHRENPFORDT

IPC: H04R23/00

CPC classification number: H04R19/005 ,  B81B3/0018 ,  B81B3/0021 ,  B81B2201/0221 ,  B81B2201/0257 ,  B81B2201/0285 ,  H04R19/04 ,  H04R29/004

Abstract: A capacitive MEMS microphone element is described which may be used optionally for detecting acoustic signals (microphone mode) or for detecting ultrasound signals in a defined frequency range (ultrasound mode). In the layered structure of the MEMS microphone element, at least two carrier elements for the two electrode sides of a capacitor system are formed one above the other and at a distance from one another for signal detection. At least one of the two carrier elements is sound pressure-sensitive and at least one of the two electrode sides includes at least two electrode segments which are electrically contactable independent of one another, which together with the at least one electrode of the other electrode side form partial capacitances which are independent of one another.

Abstract translation: 描述了可以可选地用于检测声信号（麦克风模式）或用于在限定的频率范围（超声模式）中检测超声信号的电容式MEMS麦克风元件。 在MEMS麦克风元件的分层结构中，用于电容器系统的两个电极侧的至少两个载体元件彼此之间并且彼此间隔一定距离地形成用于信号检测。 两个载体元件中的至少一个是声压敏的，并且两个电极侧中的至少一个包括彼此独立地电接触的至少两个电极段，这两个电极段与另一个电极侧的至少一个电极 形成彼此独立的部分电容。