公开(公告)号：WO2003025630A2

公开(公告)日：2003-03-27

申请号：PCT/US2002/030013

申请日：2002-09-19

Applicant: CAPELLA PHOTONICS, INC.

Inventor： WILDE, Jeffrey, P. ,  POLYNKIN, Pavel ,  TIMMONS, Michael, J. ,  GARRETT, Mark, H.

IPC: G02B

CPC classification number: G01J3/447 ,  G01J3/0224 ,  G01J3/2803 ,  G01J2003/2866

Abstract: This invention provides a novel method and apparatus which use a wavelength-dispersing means such as a diffraction grating to spatially separate a multi-wavelength optical signal along with a reference signal by wavelength into multiple spectral channels and a reference spectral component in a spectral array with a predetermined relative alignment. By aligning the reference spectral component at a predetermined location, the spectral channels simultaneously impinge onto designated locations, e.g., on an array of beam-receiving elements positioned in accordance with the spectral array. The reference spectral component may be further maintained at the predetermined location by way of servo-control, thereby ensuring that the spectral channels stay aligned at the designated locations. The present invention can be used to construct a new line of servo-based optical systems, including spectral power monitors and optical multiplexers/demultiplexers, for WDM optical networking applications.

Abstract translation: 本发明提供了一种新颖的方法和装置，其使用诸如衍射光栅的波长分散装置将多波长光信号与参考信号一起通过波长空间分离成多个光谱通道和光谱阵列中的参考光谱分量， 预定的相对对准。 通过在预定位置对准参考光谱分量，光谱通道同时撞击到指定位置，例如在根据光谱阵列定位的波束接收元件的阵列上。 参考频谱分量可以通过伺服控制进一步保持在预定位置，从而确保频谱信道在指定位置保持对准。 本发明可用于构建用于WDM光网络应用的基于伺服的光学系统的新系列，包括光功率监视器和光复用器/解复用器。

公开(公告)号：WO2011163091A1

公开(公告)日：2011-12-29

申请号：PCT/US2011/040974

申请日：2011-06-17

Applicant: CAPELLA PHOTONICS, INC. ,  YANG, Long ,  GARRETT, Mark. H ,  EHRLICH, Jeffrey E.

Inventor： YANG, Long ,  GARRETT, Mark. H ,  EHRLICH, Jeffrey E.

IPC: G02B6/26

CPC classification number: G02B6/3546 ,  G02B6/3518 ,  G02B6/356 ,  G02B6/359

Abstract: An optical apparatus can include an optical port array having an MxN array of fiber collimator ports. The array of ports is configured such that there is a gap within each column of ports located between two rows of ports. The gap is wide enough to permit a hitless beam switching trajectory to pass between the two rows of ports from one side of the array of ports to an opposite side.

Abstract translation: 光学装置可以包括具有光纤准直器端口的M×N阵列的光端口阵列。 端口阵列被配置为使得位于两行端口之间的端口的每列内存在间隙。 间隙足够宽以允许无中断束切换轨迹在两排端口之间从端口阵列的一侧到另一侧通过。

公开(公告)号：WO2007018758A3

公开(公告)日：2007-02-15

申请号：PCT/US2006/024075

申请日：2006-06-21

Applicant: CAPELLA PHOTONICS, INC. ,  TREMAINE, Brian, P.

Inventor： TREMAINE, Brian, P.

IPC: G02B6/42

Abstract: Methods for adjusting dither amplitude for MEMS mirrors in optical switches and optical switches employing such a method are disclosed. A dither amplitude of one or more MEMS mirrors may be adjusted in an optical switch having an input port, and an array of one or more MEMS mirrors that can be selectively optically coupled to one or more of optical input/output (I/O) ports. Digital-to-analog (DAC) settings for positioning mirrors are used to determine a dither amplitude for one of the MEMS mirrors positioned to couple optical signals to an output port at a position x. The servo control assembly includes memory containing digital-to-analog converter (DAC) settings for positioning each mirror in an open control loop as a function of a port position x. The servo control assembly is programmed to adjust dither amplitude of one or more of the MEMS mirrors using the stored DAC settings.

公开(公告)号：WO2007018758A2

公开(公告)日：2007-02-15

申请号：PCT/US2006024075

申请日：2006-06-21

Applicant: CAPELLA PHOTONICS INC ,  TREMAINE BRIAN P

Inventor： TREMAINE BRIAN P

IPC: H04J14/02

CPC classification number: H04Q11/0005 ,  G02B6/3512 ,  G02B6/3546 ,  G02B6/356 ,  G02B6/3588 ,  G02B6/3594 ,  H04Q2011/0049

Abstract: Methods for adjusting dither amplitude for MEMS mirrors in optical switches and optical switches employing such a method are disclosed. A dither amplitude of one or more MEMS mirrors may be adjusted in an optical switch having an input port, and an array of one or more MEMS mirrors that can be selectively optically coupled to one or more of N=3 optical input/output (I/O) ports. The MEMS mirrors are aligned mirrors to achieve nominal peak coupling at each of the N collimators. Digital-to-analog (DAC) settings for positioning mirrors in an open control loop as a function of the selected collimator are stored to a non-volatile memory. The DAC settings are used to determine a dither amplitude DITHER(x) for one of the MEMS mirrors positioned to couple optical signals to an output port at a position x. The optical switch apparatus may comprise N=3 optical input/output (I/O) ports, an array of one or more MEMS mirrors that can selectively reflect one or more spectral channels to one or more of the N ports, and a servo-control assembly in communication with said one or more of the MEMS mirrors. The servo control assembly includes memory containing digital-to-analog converter (DAC) settings for positioning each mirror in an open control loop as a function of a port position x. The servo control assembly is programmed to adjust dither amplitude of one or more of the MEMS mirrors using the stored DAC settings.

Abstract translation: 公开了采用这种方法的用于调整光开关中的MEMS反射镜的抖动振幅的方法和使用这种方法的光开关。 可以在具有输入端口的光学开关中调整一个或多个MEMS反射镜的抖动幅度，以及可以选择性地光耦合到N = 3个光输入/输出（I）中的一个或多个的一个或多个MEMS反射镜的阵列 / O）端口。 MEMS反射镜是对齐的反射镜，以在N个准直仪的每一个处实现标称峰值耦合。 作为所选择的准直仪的函数，将开放控制回路中的定位镜的数模转换（DAC）设置存储到非易失性存储器。 DAC设置用于确定用于将光信号耦合到位置x处的输出端口的MEMS镜之一的抖动幅度DITHER（x）。 光开关装置可以包括N = 3个光输入/输出（I / O）端口，可以选择性地将一个或多个频谱信道反映到N个端口中的一个或多个的一个或多个MEMS反射镜的阵列， 所述控制组件与所述一个或多个所述MEMS反射镜连通。 伺服控制组件包括存储器，该存储器包含数字 - 模拟转换器（DAC）设置，用于将开启的控制回路中的每个反射镜定位为端口位置x的函数。 伺服控制组件被编程为使用存储的DAC设置来调整一个或多个MEMS反射镜的抖动振幅。

公开(公告)号：WO2002075410A1

公开(公告)日：2002-09-26

申请号：PCT/US2002/008046

申请日：2002-03-14

Applicant: CAPELLA PHOTONICS, INC. ,  WILDE, Jeffrey ,  MANSURIPUR, Masud ,  GARRETT, Mark, H. ,  POLYNKIN, Pavel, G. ,  BELSER, Karl, Arnold ,  CHEN, Tai

Inventor： WILDE, Jeffrey ,  MANSURIPUR, Masud ,  GARRETT, Mark, H. ,  POLYNKIN, Pavel, G. ,  BELSER, Karl, Arnold ,  CHEN, Tai

IPC: G02B6/34

CPC classification number: G02B6/3588 ,  G02B6/272 ,  G02B6/2793 ,  G02B6/2931 ,  G02B6/29383 ,  G02B6/32 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3556 ,  G02B6/356 ,  G02B6/3582 ,  G02B6/3586 ,  G02B6/3592 ,  G02B26/0833

Abstract: This invention provides a novel wavelength-separating-routing (WSR) apparatus that uses a diffraction grating (101) to separate a multi-wavelength optical signal by wavelength into multiple spectral channels, which are than focused onto an array of corresponding channel micromirrors (220). The channel micromirrors are individually controllable and continuously pivotable to reflect the spectral channels into multiple output ports. As such, the inventive WSR apparatus is capable of routing the spectral channels on a channel-by-channel basis and coupling any spectral channel into any one of the output ports. The WSR apparatus of the present invention may be further equipped with servo-control and spectral power-management capabilities, thereby maintaining the coupling efficiencies of the spectral channels into the output ports at desired values. The WSR apparatus of the present invention can be used to construct a novel class of dynamically reconfigurable optical add-drop multiplexers (OADMs) for wavelength division multiplexing (WDM) optical networking applications.

Abstract translation: 本发明提供了一种新颖的波长分离路由（WSR）装置，其使用衍射光栅（101）将波长的多波长光信号分离成多个光谱通道，其被聚焦到对应的通道微镜阵列（220 ）。 通道微镜可独立控制，并可连续转动，以将光谱通道反射到多个输出端口。 因此，本发明的WSR设备能够在逐个信道的基础上路由频谱信道，并将任何频谱信道耦合到任何一个输出端口。 本发明的WSR设备可以进一步配备伺服控制和频谱功率管理功能，从而将频谱信道的耦合效率保持在输出端口的期望值。 本发明的WSR装置可用于构造用于波分复用（WDM）光网络应用的新型动态可重配置的光分插复用器（OADM）。

公开(公告)号：WO2012125390A3

公开(公告)日：2014-04-17

申请号：PCT/US2012028189

申请日：2012-03-08

Applicant: CAPELLA PHOTONICS INC ,  YANG LONG ,  EHRLICH JEFFREY ,  MARTINELLI MASSIMO

Inventor： YANG LONG ,  EHRLICH JEFFREY ,  MARTINELLI MASSIMO

IPC: H04J14/00

CPC classification number: G02B6/356 ,  G02B6/3512 ,  G02B6/3556

Abstract: Optical switches can include collimator elements that accommodate two or more optical ports. This increases the number of ports the switch can accommodate without having to increase the size of other optical components within the switch. Separate deflectors can be used to accommodate optical signals from two different groups of ports. In some embodiments cross-coupling of signals between the two groups can be accomplished through use of re-direction optics.

Abstract translation: 光开关可以包括容纳两个或更多光端口的准直元件。 这增加了开关可以适应的端口数量，而不必增加开关内的其他光学部件的尺寸。 分离的偏转器可用于适应来自两个不同端口组的光信号。 在一些实施例中，两组之间的信号交叉耦合可以通过使用重新定向的光学器件实现。

公开(公告)号：WO2010099027A1

公开(公告)日：2010-09-02

申请号：PCT/US2010/024621

申请日：2010-02-18

Applicant: Capella Photonics, Inc. ,  Ostrom, Robert

Inventor： Ostrom, Robert

IPC: C23F1/00

CPC classification number: G02B26/0841 ,  B81B2201/045 ,  B81B2203/058 ,  B81B2207/096 ,  B81C1/00095 ,  G02B26/0866 ,  Y10T29/49002

Abstract: A MEMS device and fabrication method are disclosed. A bottom substrate having an insulating layer sandwiched between an upper layer and a lower layer may be bonded to a device layer. One or more portions of the upper layer may be selectively removed to form one or more device cavities. Conductive vias may be formed through the lower layer at locations that underlie the one or more device cavities and electrically isolated from the lower layer. Devices may be formed from the device layer. Each device overlies a corresponding device cavity. Each device may be connected to the rest of the device layer by one or more corresponding hinges formed from the device layer. One or more electrical contacts may be formed on a back side of the lower layer. Each contact is electrically connected to a corresponding conductive via.

Abstract translation: 公开了MEMS器件和制造方法。 具有夹在上层和下层之间的绝缘层的底部基板可以结合到器件层。 可以选择性地去除上层的一个或多个部分以形成一个或多个器件腔。 导电通孔可以在位于一个或多个器件空腔下方并且与下层电隔离的位置处通过下层形成。 设备可以从设备层形成。 每个设备覆盖相应的设备腔。 每个设备可以通过由设备层形成的一个或多个相应铰链连接到设备层的其余部分。 一个或多个电触头可以形成在下层的背面上。 每个触点电连接到相应的导电通孔。

公开(公告)号：WO2007078415A2

公开(公告)日：2007-07-12

申请号：PCT/US2006043169

申请日：2006-11-06

Applicant: CAPELLA PHOTONICS ,  DAVIS JOSEPH E ,  TREMAINE BRIAN P

Inventor： DAVIS JOSEPH E ,  TREMAINE BRIAN P

IPC: G02B6/26 ,  G02B6/42 ,  G02B26/08

CPC classification number: G02B6/3588 ,  G02B6/266 ,  G02B6/2931 ,  G02B6/29311 ,  G02B6/29313 ,  G02B6/29383 ,  G02B6/3512 ,  G02B6/352 ,  G02B6/356 ,  G02B6/3586 ,  G02B6/3594 ,  G02B6/4215 ,  G02B6/4246 ,  G02B26/0833 ,  G02B27/095

Abstract: Effects of diffraction of a spectral beam from an edge of the micromirrors are reduced in order to optimize the passband in a wavelength selective switch. The effects of diffraction on the pass band may be reduced by using rotation of the micromirror about both the attenuation axis and the switching axis to achieve the desired level of attenuation. Peak coupling can be attained by dithering the micromirror about a dither axis that is tangent to a contour of constant attenuation using simultaneous rotation about the switching and attenuation axes. A power level of a spectral channel may be attenuated by rotating the channel micromirror with respect to an effective attenuation axis that is non-orthogonal to the dither axis through a combination of rotations about the switching axis and the attenuation axis.

Abstract translation: 降低了来自微镜边缘的光谱束的衍射效应，以便优化波长选择开关中的通带。 可以通过使用微镜绕衰减轴和切换轴两者的旋转来减小衍射对通带的影响，以实现期望的衰减水平。 可以通过围绕开关和衰减轴的同时旋转使微镜围绕与所述恒定衰减轮廓相切的抖动轴抖动微镜来实现峰值耦合。 可以通过相对于通过关于切换轴和衰减轴的旋转的组合与抖动轴非正交的有效衰减轴旋转通道微镜来衰减光谱通道的功率电平。

公开(公告)号：WO2006110241A1

公开(公告)日：2006-10-19

申请号：PCT/US2006/008639

申请日：2006-03-13

Applicant: CAPELLA PHOTONICS, INC. ,  DAVIS, Joseph, E. ,  GARRETT, Mark, H. ,  TREMAINE, Brian, P.

Inventor： DAVIS, Joseph, E. ,  GARRETT, Mark, H. ,  TREMAINE, Brian, P.

IPC: G02B6/26 ,  G02B6/42

CPC classification number: G02B6/352 ,  G02B6/29311 ,  G02B6/29383 ,  G02B6/356 ,  G02B6/3588 ,  G02B6/3594 ,  G02B6/4215 ,  G02B26/0833 ,  G02B27/095

Abstract: The effects of diffraction on the pass band may be reduced by appropriate modification of the edges of the micromirrors, by modification of the input and/or output ports to allow for attenuation by rotation of the micromirror about the switching axis, by using rotation of the micromirror about both the attenuation axis and the switching axis to achieve the desired level of attenuation, by inserting an aperture at a focal plane or external to the device to reduce the magnitude of the micromirror edge diffraction transmitted to any or all output ports, or by appropriate filtering of angular frequencies with a diffraction grating used to separate a multi-channel optical signal into constituent spectral beams. Peak coupling can be attained by dithering the micromirror about an axis tangent to a contour of constant attenuation using simultaneous rotation about the switching and attenuation axes.

Abstract translation: 衍射对通带的影响可以通过适当地修改微镜的边缘来减少，通过改变输入端口和/或输出端口以允许微镜绕开关轴旋转而衰减，通过使用 关于衰减轴和切换轴两者的微镜，通过在焦平面处或设于外部插入孔径以减小传输到任何或所有输出端口的微镜边缘衍射的幅度，或者通过 用用于将多通道光信号分离成组成光束的衍射光栅适当滤波角频率。 通过使用围绕开关和衰减轴的同时旋转，可以使微镜围绕与恒定衰减轮廓相切的轴线抖动微镜来实现峰值耦合。

公开(公告)号：WO2003102631A2

公开(公告)日：2003-12-11

申请号：PCT/US2003/016278

申请日：2003-05-21

Applicant: CAPELLA PHOTONICS, INC.

Inventor： VAN DRIEENHUIZEN, Bert, P. ,  WILDE, Jeffrey, P. ,  KUAN, Nelson

IPC: G02B

CPC classification number: G02B26/0841

Abstract: This invention provides method and apparatus for fabricating a MEMS apparatus having a bulk element with hinges underneath. The bulk element may comprise single-crystal silicon, fabricated by way of bulk micromachining techniques. The hinges may be made of thin-films, fabricated by way of surface micromachining techniques. A distinct feature of the MEMS apparatus of the present invention is that by disposing the hinges underneath the bulk element, the surface of the bulk element can be maximized and the entire surface becomes usable (e.g., for optical beam manipulation). Such a feature would be highly advantageous in making arrayed MEMS devices, such as an array of MEMS mirrors with a high optical fill factor. Further, by advantageously making use of both bulk and surface micromachining techniques, a MEMS mirror thus produced is equipped with a large and flat mirror along with flexible hinges, hence capable of achieving a substantial rotational range at modest electrostatic drive voltages.

Abstract translation: 本发明提供了一种用于制造MEMS器件的方法和装置，其具有在下面具有铰链的块体元件。 本体元件可以包括通过体微加工技术制造的单晶硅。 铰链可以由通过表面微加工技术制造的薄膜制成。 本发明的MEMS装置的一个显着特征在于，通过将铰链设置在体元件下方，可以使块体元件的表面最大化，并且整个表面变得可用（例如，用于光束操纵）。 这样的特征在制造阵列MEMS器件（例如具有高光学填充因子的MEMS反射镜的阵列）方面将是非常有利的。 此外，通过有利地利用本体和表面微加工技术，由此制造的MEMS反射镜与柔性铰链一起配备大型和平面镜，因此能够在适度的静电驱动电压下实现基本的旋转范围。