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公开(公告)号：KR1020120046957A
公开(公告)日：2012-05-11
申请号：KR1020100108527
申请日：2010-11-03
IPC: B23K26/38 , B23K26/70 , H01L21/301
Abstract: PURPOSE: A laser processing apparatus and method are provided to discharge a completed wafer and lead in the next wafer to be processed while processing a wafer. CONSTITUTION: A laser processing apparatus comprises a cassette lifter, a wafer aligner, an edge detector, a feeder, a work stage(140), a transfer arm, and a laser processing unit. The wafer aligner is formed on the exit side of the cassette lifter. The edge detector detects the outline of a wafer located in the wafer aligner. The feeder lifts a wafer by reciprocating between the cassette lifter and the wafer aligner. The work stage implements three-axis transfer and a z-axis rotation. The transfer arm exchanges wafers placed on the wafer aligner and the work stage. The laser processing unit provides processing laser beams to the work stage.
Abstract translation: 目的：提供一种激光加工设备和方法，以便在处理晶片时，将完成的晶片放电并在待处理的下一晶片中引出。 构成：激光加工装置包括盒式升降机，晶片对准器，边缘检测器，进料器，工作台（140），传送臂和激光处理单元。 晶片对准器形成在盒式升降机的出口侧。 边缘检测器检测位于晶片对准器中的晶片的轮廓。 进料器通过在盒式升降器和晶片对准器之间往复运动来提升晶片。 工作台实现三轴转动和z轴旋转。 转移臂交换放置在晶片对准器和工作台上的晶片。 激光处理单元向工作台提供加工激光束。
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公开(公告)号：KR1020110093301A
公开(公告)日：2011-08-18
申请号：KR1020100013254
申请日：2010-02-12
CPC classification number: G01R31/2887
Abstract: PURPOSE: A rotating device, a rotating driving method, and a rotating system are provided to reduce costs and process time by rotating and translating a rotation member which supports an object. CONSTITUTION: A rotating device(100) includes a rotation member(110), a transmission member(120), and a driver(130). The rotation member is installed in a support frame and includes a holding member which holds an object. The transmission member is connected to the rotation member. The driver is connected to the transmission member. The transmission member changes the rotation movement of the driver into the intermittent rotation and translation of the rotation member.
Abstract translation: 目的：提供旋转装置，旋转驱动方法和旋转系统，以通过旋转和平移支撑物体的旋转构件来降低成本和处理时间。 构成：旋转装置（100）包括旋转构件（110），传动构件（120）和驱动器（130）。 旋转构件安装在支撑框架中并且包括保持物体的保持构件。 传动构件连接到旋转构件。 驱动器连接到传输部件。 传动构件将驾驶员的旋转运动改变为旋转构件的间歇旋转和平移。
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公开(公告)号：KR100991720B1
公开(公告)日：2010-11-03
申请号：KR1020100088768
申请日：2010-09-10
Abstract: PURPOSE: A beam shaping module for a laser processor is provided to process a substrate without decreasing brightness and strength and to prevent process time from becoming increased. CONSTITUTION: A beam shaping module for a laser processor is composed of a cylindrical concave lens, a cylindrical convex lens, and a moving unit(600). The cylindrical concave lens emits a laser beam. The cylindrical concave lens corrects the angle of the emitted laser beam. A spot of the laser beam is formed in an object by the angle correction. The moving unit changes a distance between the c cylindrical concave and convex lenses.
Abstract translation: 目的：提供用于激光处理器的光束成形模块来处理衬底而不降低亮度和强度并防止工艺时间增加。 构成：用于激光处理器的光束成形模块由圆柱形凹透镜，圆柱形凸透镜和移动单元（600）组成。 圆柱形凹透镜发射激光束。 圆柱形凹透镜校正发射的激光束的角度。 通过角度校正在物体中形成激光束的光点。 移动单元改变c圆柱形凹凸透镜之间的距离。
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公开(公告)号：KR100984723B1
公开(公告)日：2010-10-01
申请号：KR1020100035138
申请日：2010-04-16
IPC: B23K26/38 , B23K26/02 , B23K26/08 , H01L21/301
Abstract: PURPOSE: A method for laser processing, suitable for a cutting process or scribing process of a target object with a mounting part is provided to prevent the heat and crack between a substrate and a nitride layer. CONSTITUTION: A method for laser processing comprises next steps. A sapphire substrate with a plurality of mounting parts on the surface is prepared. A laser beam is radiated from a laser light source(103). The laser beam is passed through a light-collecting unit(105) and is focused on the sapphire substrate. The location of the light-collecting unit or the sapphire substrate is adjusted. The laser light source emits ultra-short pulse laser beam.
Abstract translation: 目的：提供一种适用于具有安装部件的目标物体的切割过程或划线过程的激光加工方法，以防止基板和氮化物层之间的热和裂纹。 构成：激光加工方法包括下列步骤。 准备表面上具有多个安装部件的蓝宝石基板。 激光束从激光光源（103）辐射。 激光束通过聚光单元（105）并聚焦在蓝宝石衬底上。 调整聚光单元或蓝宝石衬底的位置。 激光光源发射超短脉冲激光束。
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公开(公告)号：KR100787627B1
公开(公告)日：2007-12-26
申请号：KR1020070010434
申请日：2007-02-01
Applicant: (주)큐엠씨
IPC: H01L21/677
CPC classification number: H01L21/67271 , H01L21/67144 , H01L21/67721 , H01L21/6838 , H01L21/68707 , H05K13/0408
Abstract: A semiconductor chip sorting apparatus is provided to reduce a working time required at a sorting process and to reduce loads applied to a rotatory motor. A plurality of rotary arms(5) are arranged to be positioned simultaneously at a wafer loading part(2) and an empty block(3). A picker is coupled with the rotary arms in order to be upwardly and downwardly moved at each of the rotary arms. The picker is formed to pick up a semiconductor chip from the wafer loading part, to transfer and sort the picked semiconductor chip to the empty block. A rotation unit rotates the rotary arms in one direction by using the driving force provided from a rotatory motor. The wafer loading part and the empty block are positioned opposite to each other in order to reduce the length of the rotary arm.
Abstract translation: 提供半导体芯片分选装置，以减少分选过程所需的工作时间并减少施加到旋转电动机的负载。 多个旋转臂（5）被布置成同时位于晶片加载部分（2）和空块（3）处。 拾取器与旋转臂联接以在每个旋转臂上向上和向下移动。 拾取器形成为从晶片装载部分拾取半导体芯片，以将拾取的半导体芯片传送并分类到空块。 旋转单元通过使用由旋转马达提供的驱动力使旋转臂沿一个方向旋转。 为了减小旋转臂的长度，晶片装载部分和空块彼此相对定位。
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Patent Agency Ranking
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公开(公告)号：KR101754396B1
公开(公告)日：2017-07-06
申请号：KR1020160098861
申请日：2016-08-03
Applicant: (주)큐엠씨
IPC: G01R31/28
CPC classification number: G01R31/2893 , G01R31/2863 , G01R31/2891
Abstract: 광소자테스트장치는복수의광소자가부착된광소자필름이안착되는워크스테이지, 워크스테이지의상부에위치하고, 복수의광소자의각 광소자와순차적으로접촉되는프로브핀을포함하는프로브유닛및 일측이개방되는개구를가지는적분구를포함하고, 워크스테이지의하부에서복수의광소자의특성을순차적으로측정하는측정유닛을포함한다.
Abstract translation: 该光学器件测试装置位于所述多个工件的光学装置自附着的光学元件薄膜被安置阶段的上部，工件托架，探头单元和所述开口包括一个探针接脚的一侧被顺序地接触与每个光学装置的多个光学元件中的 以及测量单元，用于依次测量工件台下部的多个光学元件的特性。
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公开(公告)号：KR1020160023444A
公开(公告)日：2016-03-03
申请号：KR1020140109874
申请日：2014-08-22
Applicant: (주)큐엠씨
CPC classification number: B05B9/03 , B05B1/3013 , B05B12/02 , B05B17/06 , B05D1/02
Abstract: 피에조액츄에어터기반의도우징장치가개시되며, 본피에조액츄에어터기반의도우징장치는공정용액이저장되는공정용액저장부; 클리닝용액이저장되는클리닝저장부; 상기공정용액저장부와상기클리닝저장부에연결되어, 상기공정용액또는클리닝용액을노즐부로공급하는용액공급부; 상기용액공급부로부터공급받은용액을분사구를통해외부로분사하는노즐부; 상기분사구를개폐하기위해상하방향으로승강가능하도록결합되는태핏; 및제어신호에따라상기태핏을상하방향으로구동하는피에조액츄에이터를포함한다.
Abstract translation: 公开了一种基于压电致动器的计量装置。 基于压电致动器的计量装置包括：存储处理液的处理溶液存储单元; 存储清洁溶液的清洁储存单元; 连接到处理液存储单元和清洁存储单元的解决方案供应单元，以将处理溶液或清洁溶液供应到喷嘴单元; 所述喷嘴单元被配置为通过喷射孔将从所述溶液供应单元供应的溶液喷射到外部; 挺杆，其联接成可垂直移动以打开或关闭喷孔; 以及压电致动器，被配置为根据控制信号垂直地驱动挺杆。 因此，定量给料装置容易洗涤喷嘴单元。
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公开(公告)号：KR1020140059875A
公开(公告)日：2014-05-19
申请号：KR1020120125415
申请日：2012-11-07
Applicant: (주)큐엠씨
Abstract: The present invention relates to an electronic component inspection and classification device for classifying electronic components by characteristic after inspecting the electronic components. The purpose of the present invention is to provide the electronic component inspection and classification device capable of improving efficiency by quickly and accurately classifying the electronic components that inspection is complete according to the characteristic. The electronic component classification device according to an embodiment quickly and accurately performs a task of classifying the electronic components.
Abstract translation: 本发明涉及一种电子部件检查和分类装置，用于在检查电子部件之后通过特性对电子部件进行分类。 本发明的目的是提供一种电子部件检查和分类装置，其能够根据特性快速准确地对检查完成的电子部件进行分类，从而提高效率。 根据实施例的电子部件分类装置快速且准确地执行对电子部件进行分类的任务。
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